Semiconductor device and method for manufacturing the same

ABSTRACT

A semiconductor device having a reduced amount of oxygen vacancy in a channel formation region of an oxide semiconductor is provided. Further, a semiconductor device which includes an oxide semiconductor and has improved electric characteristics is provided. Furthermore, a methods for manufacturing the semiconductor device is provided. An oxide semiconductor film is formed; a conductive film is formed over the oxide semiconductor film at the same time as forming a low-resistance region between the oxide semiconductor film and the conductive film; the conductive film is processed to form a source electrode and a drain electrode; and oxygen is added to the low-resistance region between the source electrode and the drain electrode, so that a channel formation region having a higher resistance than the low-resistance region is formed and a first low-resistance region and a second low-resistance region between which the channel formation region is positioned are formed.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.17/358,295, filed Jun. 25, 2021, now allowed, which is a continuation ofU.S. application Ser. No. 16/833,918, filed Mar. 30, 2020, now U.S. Pat.No. 11,049,974, which is a continuation of U.S. application Ser. No.16/024,967, filed Jul. 2, 2018, now U.S. Pat. No. 10,672,913, which is adivisional of U.S. application Ser. No. 14/137,476, filed Dec. 20, 2013,now abandoned, which claims the benefit of a foreign priorityapplication filed in Japan as Serial No. 2012-281801 on Dec. 25, 2012,all of which are incorporated by reference.

TECHNICAL FIELD

The present invention relates to a product (including a machine, amanufacture, and a composition of matter) and a process (including asimple process and a production process). In particular, one embodimentof the present invention relates to, a semiconductor device, a displaydevice, a light-emitting device, a power storage device, a drivingmethod thereof, or a manufacturing method thereof. In particular, oneembodiment of the present invention relates to a semiconductor deviceincluding an oxide semiconductor, a display device including an oxidesemiconductor, or a light-emitting device including an oxidesemiconductor.

BACKGROUND ART

Transistors used for most flat panel displays typified by a liquidcrystal display device and a light-emitting display device are formedusing silicon semiconductors such as amorphous silicon, single crystalsilicon, and polycrystalline silicon provided over glass substrates.Further, transistors formed using such silicon semiconductors are usedin integrated circuits (ICs) and the like.

In recent years, attention has been drawn to a technique in which,instead of a silicon semiconductor, a metal oxide exhibitingsemiconductor characteristics is used for transistors. Note that in thisspecification, a metal oxide exhibiting semiconductor characteristics isreferred to as an oxide semiconductor.

For example, a technique by which a transistor is formed using zincoxide or an In—Ga—Zn-based oxide semiconductor as an oxide semiconductoris disclosed (see Patent Document 1).

REFERENCE Patent Document

[Patent Document 1] Japanese Published Patent Application No.2006-165528

DISCLOSURE OF INVENTION

In the case where a material of a conductive film to be a sourceelectrode and a drain electrode formed over an oxide semiconductor filmin a transistor including an oxide semiconductor is a conductivematerial which is more likely to be bonded to oxygen than to a metalelement contained in the oxide semiconductor film, oxygen in the oxidesemiconductor film is bonded to the conductive material. The bondingcauses oxygen vacancy in a region of the oxide semiconductor film in thevicinity of an interface with the conductive film. Alternatively, damage(oxygen vacancy) to the top surface of the oxide semiconductor film iscaused when the conductive film to be the source electrode and the drainelectrode is formed over the oxide semiconductor film. A low-resistanceregion is formed owing to the oxygen vacancy and hydrogen, so thatcontact resistance between the oxide semiconductor film and the sourceelectrode or the drain electrode is reduced. Accordingly, conductivityis improved, whereby high speed operation of the transistor can beachieved. Also in the case where the material of the conductive film isa conductive material which is easily diffused into the oxidesemiconductor film by heat treatment, the low-resistance region isformed. However, the conductive film is also in contact with a channelformation region in the oxide semiconductor film, and thus oxygenvacancy is also caused in a region of the channel formation region inthe vicinity of the interface with the conductive film; as a result, adefect of electrical characteristics of the transistor might occur.

Thus, an object of one embodiment of the present invention is to providea semiconductor device or the like in which a channel formation regionof an oxide semiconductor has a small amount of oxygen vacancy. Anotherobject of one embodiment of the present invention is to provide asemiconductor device which includes an oxide semiconductor and hasimproved electrical characteristics. Another object of one embodiment ofthe present invention is to provide a method for manufacturing thesemiconductor device or the like. Another object of one embodiment ofthe present invention is to provide a semiconductor device or the likewith low off-state current. Another object of one embodiment of thepresent invention is to provide a semiconductor device or the like inwhich leakage current through an insulating film is small. Anotherobject of one embodiment of the present invention is to provide asemiconductor device or the like with high mobility. Another object ofone embodiment of the present invention is to provide a semiconductordevice or the like with high switching characteristics. Another objectof one embodiment of the present invention is to provide a semiconductordevice or the like with low power consumption. Another object of oneembodiment of the present invention is to provide a semiconductor deviceor the like including a transparent semiconductor film. Another objectof one embodiment of the present invention is to provide a semiconductordevice or the like using a highly reliable semiconductor film. Anotherobject of one embodiment of the present invention is to provide a novelsemiconductor device. Note that the descriptions of these problems donot disturb the existence of other problems. Note that in one embodimentof the present invention, there is no need to achieve all the objects.Other objects will be apparent from and can be derived from thedescription of the specification, the drawings, the claims, and thelike.

Although the conductive film to be the source electrode and the drainelectrode formed over the oxide semiconductor film also reduces theresistance of the channel formation region, the resistance of thechannel formation region is increased by supply of oxygen using thesource electrode and the drain electrode as masks.

One embodiment of the present invention is a semiconductor deviceincluding an oxide semiconductor film: a source electrode and a drainelectrode over the oxide semiconductor film; a first low-resistanceregion between the oxide semiconductor film and the source electrode; asecond low-resistance region between the oxide semiconductor film andthe drain electrode; and a channel formation region positioned in theoxide semiconductor film and between the first low-resistance region andthe second low-resistance region. The first low-resistance region ispositioned in a region of the oxide semiconductor film at a depth ofgreater than 0 nm and less than or equal to 15 nm from an interfacebetween the oxide semiconductor film and the source electrode, and thesecond low-resistance region is positioned in a region of the oxidesemiconductor film at a depth of greater than 0 nm and less than orequal to 15 nm from an interface between the oxide semiconductor filmand the drain electrode.

Another embodiment of the present invention is a semiconductor deviceincluding an oxide semiconductor film; a source electrode and a drainelectrode over the oxide semiconductor film; a first low-resistanceregion between the oxide semiconductor film and the source electrode; asecond low-resistance region between the oxide semiconductor film andthe drain electrode; a channel formation region positioned in the oxidesemiconductor film and between the first low-resistance region and thesecond low-resistance region; a gate insulating film over the oxidesemiconductor film, the source electrode, and the drain electrode; and agate electrode over the gate insulating film to overlap with the oxidesemiconductor film. The first low-resistance region is positioned in aregion of the oxide semiconductor film at a depth of greater than 0 nmand less than or equal to 15 nm from an interface between the oxidesemiconductor film and the source electrode, and the secondlow-resistance region is positioned in a region of the oxidesemiconductor film at a depth of greater than 0 nm and less than orequal to 15 nm from an interface between the oxide semiconductor filmand the drain electrode.

Another embodiment of the present invention is a semiconductor deviceincluding a gate electrode; a gate insulating film over the gateelectrode; an oxide semiconductor film over the gate insulating film; asource electrode and a drain electrode over the oxide semiconductorfilm; a first low-resistance region between the oxide semiconductor filmand the source electrode; a second low-resistance region between theoxide semiconductor film and the drain electrode; a channel formationregion positioned in the oxide semiconductor film and between the firstlow-resistance region and the second low-resistance region; and aninsulating film over the oxide semiconductor film, the source electrode,and the drain electrode. The first low-resistance region is positionedin a region of the oxide semiconductor film at a depth of greater than 0nm and less than or equal to 15 nm from an interface between the oxidesemiconductor film and the source electrode, and the secondlow-resistance region is positioned in a region of the oxidesemiconductor film at a depth of greater than 0 nm and less than orequal to 15 nm from an interface between the oxide semiconductor filmand the drain electrode.

In the above structure, a first oxide film and a second oxide filmbetween which the oxide semiconductor film is positioned are provided.The energy of the bottom of the conduction band in each of the firstoxide film and the second oxide film is closer to a vacuum level thanthe energy of the bottom of the conduction band in the oxidesemiconductor film by 0.05 eV or higher and 2 eV or lower.

In the above structure, a difference between a length between the sourceelectrode and the drain electrode and a length between the firstlow-resistance region and the second low-resistance region is less than30% of the length between the source electrode and the drain electrode.

In the above structure, a region in which an oxygen content issequentially increased from a surface of the channel formation regiontoward a depth direction of the oxide semiconductor film is provided.

In the above structure, the gate insulating film contains aluminumoxide.

Another embodiment of the present invention is a method formanufacturing a semiconductor device, including the steps of forming anoxide semiconductor film; forming a conductive film over the oxidesemiconductor film at the same step as forming a low-resistance regionbetween the oxide semiconductor film and the conductive film; processingthe conductive film to form a source electrode and a drain electrode;and adding oxygen to the low-resistance region that overlaps withneither the source electrode nor the drain electrode, so that a channelformation region having a higher resistance than the low-resistanceregion is formed and a first low-resistance region and a secondlow-resistance region between which the channel formation region ispositioned are formed.

Another embodiment of the present invention is a method formanufacturing a semiconductor device, including the steps of forming anoxide semiconductor film; forming a conductive film over the oxidesemiconductor film at the same step as forming a low-resistance regionbetween the oxide semiconductor film and the conductive film; processingthe conductive film to form a source electrode and a drain electrode;forming a gate insulating film over the oxide semiconductor film, thesource electrode, and the drain electrode; adding oxygen to thelow-resistance region that overlaps with neither the source electrodenor the drain electrode, so that a channel formation region having ahigher resistance than the low-resistance region is formed and a firstlow-resistance region and a second low-resistance region between whichthe channel formation region is positioned are formed; and forming agate electrode over the gate insulating film to overlap with the oxidesemiconductor film.

Another embodiment of the present invention is a method formanufacturing a semiconductor device, including the steps of forming agate electrode; forming a gate insulating film over the gate electrode;forming an oxide semiconductor film over the gate insulating film;forming a conductive film over the oxide semiconductor film at the samestep as forming a low-resistance region between the oxide semiconductorfilm and the conductive film; processing the conductive film to form asource electrode and a drain electrode; adding oxygen to thelow-resistance region that overlaps with neither the source electrodenor the drain electrode, so that a channel formation region having ahigher resistance than the low-resistance region is formed and a firstlow-resistance region and a second low-resistance region between whichthe channel formation region is positioned are formed; and forming aninsulating film over the oxide semiconductor film, the source electrode,and the drain electrode.

In the above manufacturing method, the addition of oxygen is performedby an ion doping method or an ion implantation method.

By the manufacturing method of one embodiment of the present invention,the amount of oxygen vacancy in the channel formation region in theoxide semiconductor can be reduced. In addition, electricalcharacteristics of a semiconductor device including the oxidesemiconductor can be improved.

BRIEF DESCRIPTION OF DRAWINGS

FIGS. 1A to 1C are a top view and cross-sectional views illustrating atransistor.

FIGS. 2A and 2B each illustrate the band structure of an oxidesemiconductor film.

FIGS. 3A and 3B are each an enlarged cross-sectional view of atransistor.

FIG. 4A is a top view and a cross-sectional view illustrating atransistor, and FIG. 4B illustrates the band structure of an oxidesemiconductor film.

FIGS. 5A to 5C are each a cross-sectional view illustrating atransistor.

FIGS. 6A and 6B are each a cross-sectional view illustrating atransistor.

FIGS. 7A and 7B are each a cross-sectional view illustrating atransistor.

FIGS. 8A to 8C illustrate a method for manufacturing a transistor.

FIGS. 9A to 9C illustrate a method for manufacturing a transistor.

FIGS. 10A to 10C are a top view and cross-sectional views illustrating atransistor.

FIGS. 11A to 11C are each a cross-sectional view illustrating atransistor.

FIGS. 12A and 12B are each a cross-sectional view illustrating atransistor.

FIGS. 13A and 13B are each a cross-sectional view illustrating atransistor.

FIGS. 14A to 14C illustrate a method for manufacturing a transistor.

FIGS. 15A to 15C illustrate a method for manufacturing a transistor.

FIGS. 16A to 16C are a cross-sectional view and a circuit diagram of asemiconductor device.

FIGS. 17A and 17B are a circuit diagram and a perspective view of asemiconductor device.

FIGS. 18A and 18B are schematic views illustrating sputtered particlesseparated from a sputtering target.

FIGS. 19A, 19B1 and 19B2, and 19C are diagrams for describing adischarge state when sputtering is performed using an AC power source.

FIGS. 20A and 20B are schematic views illustrating a situation wheresputtered particles which are not charged reach a deposition surface.

FIGS. 21A and 21B are flow charts showing an example of a method formanufacturing a sputtering target.

FIG. 22 is a block diagram of a semiconductor device.

FIG. 23 is a cross-sectional view of a semiconductor device.

FIGS. 24A to 24C are block diagrams of a semiconductor device.

FIGS. 25A to 25C illustrate electronic appliances to which semiconductordevices can be applied.

FIG. 26A illustrates a semiconductor device and FIGS. 26B and 26C areeach a circuit diagram illustrating a pixel.

FIG. 27 is a top view illustrating the semiconductor device.

FIG. 28 is a cross-sectional view illustrating a semiconductor device.

FIG. 29 shows a cross-sectional STEM image of a sample formed in anexample.

FIG. 30 shows TDS measurement results of a sample formed in an example.

FIG. 31 shows TDS measurement results of a sample formed in an example.

FIGS. 32A to 32F show measurement results of XRD spectra of samplesformed in an example.

FIG. 33 shows measurement results of an XRD spectra of a sample formedin an example.

FIG. 34 shows measurement results of sheet resistances of samples formedin an example.

FIG. 35 shows measurement results of sheet resistances of samples formedin an example.

FIG. 36 shows SIMS analysis results of samples formed in an example.

FIGS. 37A and 37B each show evaluation results of electriccharacteristics of transistors formed in an example.

FIG. 38 illustrates the structure of a transistor formed in an example.

FIG. 39 shows calculation results of electrical characteristics of atransistor formed in an example.

FIG. 40 shows a band structure of a transistor including an oxidesemiconductor film.

FIG. 41 illustrates a cross-sectional structure of a calculation model.

FIG. 42 shows band structures of calculation models.

FIGS. 43A and 43B each show CPM measurement results of an oxidesemiconductor film.

FIG. 44 shows CPM measurement results of an oxide semiconductor film.

FIG. 45 shows a cross-sectional TEM image of a CAAC-OS film.

FIGS. 46A to 46D each show a nanobeam electron diffraction patterns of aCAAC-OS film.

FIG. 47 shows a cross-sectional TEM image of a CAAC-OS film.

FIGS. 48A and 48B are a cross-sectional TEM image and an X-raydiffraction spectrum of a CAAC-OS film.

FIGS. 49A to 49D each show an electron diffraction pattern of a CAAC-OSfilm.

FIGS. 50A and 50B are a cross-sectional TEM image and an X-raydiffraction spectrum of a CAAC-OS film.

FIGS. 51A to 51D each show an electron diffraction pattern of a CAAC-OSfilm.

FIGS. 52A and 52B are a cross-sectional TEM image and an X-raydiffraction spectrum of a CAAC-OS film.

FIGS. 53A to 53D each show an electron diffraction pattern of a CAAC-OSfilm.

FIGS. 54A to 54D show a cross-sectional TEM image and electrondiffraction patterns of a nanocrystalline oxide semiconductor film.

FIGS. 55A and 55B are a TEM image and electron diffraction patterns of ananocrystalline oxide semiconductor film.

FIGS. 56A to 56C are conceptual diagrams of electron diffractionintensity distribution.

FIG. 57 shows a nanobeam electron diffraction pattern of a quartz glasssubstrate.

FIG. 58 shows an electron diffraction pattern of a nanocrystalline oxidesemiconductor film.

FIGS. 59A and 59B each show a cross-sectional TEM image of ananocrystalline oxide semiconductor film.

FIG. 60 shows X-ray diffraction analysis results of a metal oxide filmof a nanocrystalline oxide semiconductor film.

BEST MODE FOR CARRYING OUT THE INVENTION

Embodiments will be described in detail with reference to the drawings.Note that the present invention is not limited to the followingdescription and it will be readily appreciated by those skilled in theart that modes and details can be modified in various ways withoutdeparting from the spirit and the scope of the present invention.Therefore, the present invention should not be limited to thedescriptions of the embodiment modes and the embodiment below. Notethat, in the structures of the invention described below, in some cases,the same portions or portions having similar functions are denoted bythe same reference numerals in different drawings, and the descriptionsof such portions are not repeated.

Embodiment 1

In this embodiment, a semiconductor device of one embodiment of thepresent invention is described with reference to drawings.

FIGS. 1A to 1C are a top view and cross-sectional views illustrating atransistor of one embodiment of the present invention. FIG. 1A is thetop view, and a cross section taken along a dashed-dotted line A1-A2 anda dashed-dotted line A3-A4 in FIG. 1A corresponds to FIG. 1B. FIG. 1C isan enlarged view of a region surrounded by a circle of a dotted line inFIG. 1B. Note that some components in the top view in FIG. 1A are notillustrated for simplification of the drawing.

A transistor 150 illustrated in FIGS. 1A to 1C includes a baseinsulating film 102 over a substrate 100; a multilayer film 104including an oxide semiconductor film over the base insulating film 102;a low-resistance region 105 a and a low-resistance region 105 b over themultilayer film 104; a source electrode 106 a over the low-resistanceregion 105 a; a drain electrode 106 b over the low-resistance region 105b; a gate insulating film 108 over the multilayer film 104, the sourceelectrode 106 a, and the drain electrode 106 b; and a gate electrode 110over the gate insulating film 108. Further, an oxide insulating film 112may be provided over the gate insulating film 108 and the gate electrode110. The oxide insulating film 112 may be formed as necessary, andanother insulating film (e.g., a nitride insulating film 114) may beprovided thereover.

Note that functions of a source and a drain of a transistor may beswitched in the case where transistors of different polarities areemployed or in the case where the direction of a current flow changes ina circuit operation. Therefore, the terms “source” and “drain” can bereplaced with each other in this specification.

The substrate 100 is not limited to a simple supporting substrate, andmay be a substrate where a device such as a transistor is formed. Inthis case, at least one of the gate electrode 110, the source electrode106 a, and the drain electrode 106 b of the transistor 150 may beelectrically connected to the device.

The base insulating film 102 can have a function of supplying oxygen tothe oxide semiconductor film of the multilayer film 104 as well as afunction of preventing diffusion of an impurity from the substrate 100;thus, the base insulating film 102 is preferably an insulating filmcontaining oxygen, further preferably an insulating film containingexcess oxygen. Note that in the case where the substrate 100 is asubstrate where another device is formed as described above, the baseinsulating film 102 has also a function as an interlayer insulatingfilm. In that case, the base insulating film 102 is preferably subjectedto planarization treatment such as chemical mechanical polishing (CMP)treatment so as to have a flat surface.

The multilayer film 104 has a structure in which an oxide film 104 a, anoxide semiconductor film 104 b, and an oxide film 104 c are stacked fromthe substrate 100 side. An oxide semiconductor whose electron affinity(an energy from the vacuum level to the bottom of the conduction band)is higher than those of the oxide film 104 a and the oxide film 104 c isused as the oxide semiconductor film 104 b. The electron affinity can beobtained by subtracting an energy difference between the bottom of theconduction band and the top of the valence band (what is called a bandgap) from an energy difference between the vacuum level and the top ofthe valence band (what is called an ionization potential).

Depending on materials used for the oxide film 104 a, the oxidesemiconductor film 104 b, and the oxide film 104 c, boundaries betweenthe oxide film 104 a and the oxide semiconductor film 104 b and betweenthe oxide semiconductor film 104 b and the oxide film 104 c in themultilayer film 104 cannot be clearly recognized in some cases. Thus,the boundaries of the oxide film 104 a, the oxide semiconductor film 104b, and the oxide film 104 c are denoted by dotted lines in the drawings.

Although the case where the multilayer film 104 is a stack of threelayers is described in this embodiment, the multilayer film 104 may be asingle layer or a stack of two layers or four or more layers. In thecase of a single layer, a layer corresponding to the oxide semiconductorfilm 104 b is used. In the case of two layers, a layer corresponding tothe oxide semiconductor film 104 b is used on the substrate 100 side anda layer corresponding to the oxide film 104 a or the oxide film 104 c isused on the gate insulating film 108 side. In the case of four or morelayers, as in the description of this embodiment, a structure in whichthe oxide semiconductor film 104 b is sandwiched between layerscorresponding to the oxide film 104 a and the oxide film 104 c is used.

It is preferable that each of the oxide film 104 a and the oxide film104 c contains one or more kinds of metal elements forming the oxidesemiconductor film 104 b, and is formed using an oxide whose energy ofthe bottom of the conduction band is closer to the vacuum level thanthat of the oxide semiconductor film 104 b by 0.05 eV or more, 0.07 eVor more, 0.1 eV or more, or 0.15 eV or more and 2 eV or less, 1 eV orless, 0.5 eV or less, or 0.4 eV or less.

When a voltage is applied to the gate electrode 110 in such a structure,a channel is formed in the oxide semiconductor film 104 b of themultilayer film 104, because the oxide semiconductor film 104 b has thelowest energy at the bottom of the conduction band. In other words, theoxide film 104 c is formed between the oxide semiconductor film 104 band the gate insulating film 108, whereby a structure in which thechannel of the transistor is not in contact with the gate insulatingfilm can be obtained.

Further, the oxide film 104 a contains one or more metal elements whichare contained in the oxide semiconductor film 104 b; therefore, aninterface state is not easily formed at the interface between the oxidesemiconductor film 104 b and the oxide film 104 a. The interface statesometimes forms a channel; therefore, a second transistor which has adifferent threshold voltage is formed and accordingly the apparentthreshold voltage of the transistor is changed in some cases. Thus, withthe oxide film 104 a, variation in electrical characteristics of thetransistor, such as a threshold voltage, can be reduced.

Further, since the oxide film 104 c contains one or more metal elementswhich are contained in the oxide semiconductor film 104 b, carrierscattering is not likely to occur at the interface between the oxidesemiconductor film 104 b and the oxide film 104 c. Therefore, with theoxide film 104 c, the field-effect mobility of the transistor can beincreased.

Note that when each of the oxide film 104 a, the oxide semiconductorfilm 104 b, and the oxide film 104 c is an In-M-Zn oxide containing atleast indium, zinc, and M (M is a metal such as Al, Ti, Ga, Ge, Y, Zr,Sn, La, Ce, or Hf), and the oxide film 104 a has an atomic ratio ofIn:M:Zn=x₁:y₁:z₁, the oxide semiconductor film 104 b has an atomic ratioof In:M:Zn=x₂:y₂:z₂, and the oxide film 104 c has an atomic ratio ofIn:M:Zn=x₃:y₃:z₃, each of y₁/x₁ and y₃/x₃ is preferably larger thany₂/x₂. Each of y₁/x₁ and y₃/x₃ is one and a half times or more as largeas y₂/x₂, preferably twice or more as large as y₂/x₂, more preferablythree times or more as large as y₂/x₂. At this time, when y₂ is greaterthan or equal to x₂ in the oxide semiconductor film 104 b, a transistorcan have stable electrical characteristics. However, when y₂ is threetimes or more as great as x₂, the field-effect mobility of thetransistor is reduced; accordingly, y₂ is preferably less than threetimes x₂.

The atomic ratio of In to Min each of the oxide film 104 a and the oxidefilm 104 c in the case where Zn and O are not taken into considerationis preferably as follows: the proportion of In is lower than 50 atomic %and the proportion of M is higher than or equal to 50 atomic %; and itis further preferably as follows: the proportion of In be lower than 25atomic % and the proportion of M is higher than or equal to 75 atomic %.The atomic ratio of In to M in the oxide semiconductor film 104 b in thecase where Zn and O are not taken into consideration is preferably asfollows: the proportion of In is higher than or equal to 25 atomic % andthe proportion of M is lower than 75 atomic %; and it is furtherpreferably as follows: the proportion of In is higher than or equal to34 atomic % and the proportion of M is lower than 66 atomic %.

The thickness of each of the oxide film 104 a and the oxide film 104 cis greater than or equal to 3 nm and less than or equal to 100 nm,preferably greater than or equal to 3 nm and less than or equal to 50nm. The thickness of the oxide semiconductor film 104 b is greater thanor equal to 3 nm and less than or equal to 200 nm, preferably greaterthan or equal to 3 nm and less than or equal to 100 nm, furtherpreferably greater than or equal to 3 nm and less than or equal to 50nm.

For each of the oxide film 104 a, the oxide semiconductor film 104 b,and the oxide film 104 c, for example, an oxide semiconductor containingindium, zinc, and gallium can be used. Note that the oxide semiconductorfilm 104 b preferably contains indium because carrier mobility can beincreased.

In order to obtain a transistor having stable electricalcharacteristics, where a channel is the oxide semiconductor film, it iseffective to make the oxide semiconductor film intrinsic orsubstantially intrinsic by reducing the concentration of impurities inthe oxide semiconductor film. The term “substantially intrinsic” refersto the state where an oxide semiconductor film has a carrier densitylower than 1×10¹⁷/cm³, preferably lower than 1×10¹⁵/cm³, furtherpreferably lower than 1×10¹³/cm³.

Further, in the oxide semiconductor film, hydrogen, nitrogen, carbon,silicon, and a metal element other than main components are impurities.For example, hydrogen and nitrogen form donor levels to increase thecarrier density. Silicon forms impurity states in an oxide semiconductorfilm. The impurity state becomes a trap, which might deteriorate theelectric characteristics of the transistor. Therefore, it is effectiveto reduce the impurity concentrations in the oxide film 104 a, the oxidesemiconductor film 104 b, and the oxide film 104 c, and the impurityconcentrations at interfaces thereof.

In order that the oxide semiconductor film is intrinsic or substantiallyintrinsic, the concentration of silicon in the oxide semiconductor film,which is measured by secondary ion mass spectrometry (SIMS) analysis, isset lower than 1×10¹⁹ atoms/cm³, preferably lower than 5×10¹⁸ atoms/cm³,further preferably lower than 1×10¹⁸ atoms/cm³. The concentration ofhydrogen in the oxide semiconductor film is set lower than or equal to1×10¹⁹ atoms/cm³, preferably lower than or equal to 5×10¹⁷ atoms/cm³,further preferably lower than or equal to 1×10¹⁷ atoms/cm³. Theconcentration of nitrogen in the oxide semiconductor film is set lowerthan 5×10¹⁹ atoms/cm³, preferably lower than or equal to 5×10¹⁸atoms/cm³, further preferably lower than or equal to 1×10¹⁸ atoms/cm³,still further preferably lower than or equal to 5×10¹⁷ atoms/cm³.

In addition, in a case where the oxide semiconductor film includes acrystal, the crystallinity of the oxide semiconductor film might bedecreased if silicon or carbon is included at high concentration. Inorder not to lower the crystallinity of the oxide semiconductor film,the concentration of silicon in the oxide semiconductor film ispreferably set lower than 1×10¹⁹ atoms/cm³, preferably lower than 5×10¹⁸atoms/cm³, further preferably lower than 1×10¹⁸ atoms/cm³. Moreover, theconcentration of carbon in the oxide semiconductor film is set lowerthan 1×10¹⁹ atoms/cm³, preferably lower than 5×10¹⁸ atoms/cm³, morepreferably lower than 1×10¹⁸ atoms/cm³.

Further, the concentration of alkali metal or alkaline earth metal ofthe oxide semiconductor film, which is measured by SIMS analysis, is setlower than or equal to 1×10¹⁸ atoms/cm³, preferably lower than or equalto 2×10¹⁶ atoms/cm³. This is because an alkali metal and an alkalineearth metal might generate carriers when bonded to an oxidesemiconductor, in which case the off-state current of the transistormight be increased.

A transistor in which a highly purified oxide semiconductor film is usedfor a channel formation region as described above has an extremely lowoff-state current, and the off-state current normalized on the channelwidth of the transistor can be as low as several yoktoamperes permicrometer to several zeptoamperes per micrometer.

Note that as the gate insulating film of the transistor, an insulatingfilm containing silicon is used in many cases; therefore, it ispreferable that a region of the oxide semiconductor film, which servesas a channel, be not in contact with the gate insulating film for theabove-described reason. In the case where a channel is formed at theinterface between a gate insulating film and an oxide semiconductorfilm, scattering of carriers occurs at the interface, whereby thefield-effect mobility of a transistor is reduced in some cases. Alsofrom the view of the above, it is preferable that a region of the oxidesemiconductor film, which serves as a channel, be distant from the gateinsulating film.

Therefore, when the multilayer film 104 has the stacked-layer structureof the oxide film 104 a, the oxide semiconductor film 104 b, and theoxide film 104 c, the oxide semiconductor film 104 b in which a channelof the transistor is formed can be distant from the gate insulatingfilm, so that the transistor can have high field-effect mobility andstable electrical characteristics.

Here, the localized level in the oxide semiconductor film is described.Here, measurement results of the oxide semiconductor film obtained by aconstant photocurrent method (CPM) are described.

First, the structures of measurement samples are described.

The measurement samples each include an oxide semiconductor filmprovided over a glass substrate, a pair of electrodes in contact withthe oxide semiconductor film, and an insulating film covering the oxidesemiconductor film and the pair of electrodes.

Next, methods for forming the oxide semiconductor films included in themeasurement samples are described.

A first oxide semiconductor film was formed by a sputtering method underthe following conditions: an In—Ga—Zn-oxide target (having an atomicratio of In:Ga:Zn=1:1:1) was used; argon with a flow rate of 30 sccm andoxygen with a flow rate of 15 sccm were used as a sputtering gas; thepressure was 0.4 Pa; the substrate temperature was room temperature; anda DC power of 0.5 kW was applied. Note that the first oxidesemiconductor film is a microcrystalline oxide semiconductor film.

In addition, the first oxide semiconductor film was heated at 450° C. ina nitrogen atmosphere for one hour and then heated at 450° C. in anoxygen atmosphere for one hour, whereby hydrogen contained in the firstoxide semiconductor film was released and oxygen was supplied to thefirst oxide semiconductor film; as a result, a second oxidesemiconductor film was formed. The second oxide semiconductor film is amicrocrystalline oxide semiconductor film.

Next, the measurement sample including the first oxide semiconductorfilm and the measurement sample including the second oxide semiconductorfilm were subjected to CPM measurement. Specifically, the amount oflight with which a surface of the measurement sample between the pair ofelectrodes was irradiated was adjusted so that a photocurrent value waskept constant in the state where voltage was applied between theelectrodes provided in contact with the oxide semiconductor film, andthen an absorption coefficient was derived from the amount of theirradiation light in an intended wavelength range.

Absorption coefficients shown in FIGS. 43A and 43B were each obtained byremoving an absorption coefficient due to the band tail from theabsorption coefficient obtained by CPM measurement of the measurementsample. That is, absorption coefficients due to defects are shown inFIGS. 43A and 43B. In FIGS. 43A and 43B, the horizontal axis indicatesthe absorption coefficient, and the vertical axis indicates the photonenergy. On the vertical axis in each of FIGS. 43A and 43B, the bottom ofthe conduction band of the oxide semiconductor film is set to 0 eV, andthe top of the valence band is set to 3.15 eV. Each curve in FIGS. 43Aand 43B represents a relation between the absorption coefficient andphoton energy, which corresponds to a defect level.

FIG. 43A shows measurement results of the measurement sample includingthe first oxide semiconductor film, in which an absorption coefficientdue to a defect level is 5.28×10⁻¹ cm⁻¹. FIG. 43B shows measurementresults of the measurement sample including the second oxidesemiconductor film, in which an absorption coefficient due to a defectlevel is 1.75×10⁻² cm⁻¹.

These results show that defects in the oxide semiconductor film can bereduced by heat treatment.

Note that film densities of the first oxide semiconductor film and thesecond oxide semiconductor film were measured by X-ray reflectometry(XRR). The film density of the first oxide semiconductor film was 5.9g/cm³ and the film density of the second oxide semiconductor film was6.1 g/cm³.

These results indicate that the film density of an oxide semiconductorfilm can be increased by heat treatment.

That is, it is found that as the film density of an oxide semiconductorfilm becomes higher, the number of defects in the oxide semiconductorfilm is reduced.

Next, a measurement result of another measurement sample prepared in acondition different from the above measurement sample obtained by aconstant photocurrent method (CPM) is described

First, the structure of a sample subjected to CPM measurement aredescribed.

The measurement sample includes an oxide semiconductor film providedover a glass substrate, a pair of electrodes in contact with the oxidesemiconductor film, and an insulating film covering the oxidesemiconductor film and the pair of electrodes.

Next, a method for forming the oxide semiconductor film included in themeasurement sample is described.

The oxide semiconductor film was formed by a sputtering method under thefollowing conditions: an In—Ga—Zn-oxide target (having an atomic ratioof In:Ga:Zn=1:1:1) was used; argon with a flow rate of 30 sccm andoxygen with a flow rate of 15 sccm were used as a sputtering gas; thepressure was 0.4 Pa; the substrate temperature was 400° C.; and a DCpower of 0.5 kW was applied. Next, the oxide semiconductor film washeated at 450° C. in a nitrogen atmosphere for one hour and then heatedat 450° C. in an oxygen atmosphere for one hour, whereby hydrogencontained in the oxide semiconductor film was released and oxygen wassupplied to the oxide semiconductor film. Note that the oxidesemiconductor film is a CAAC-OS (c-axis-aligned crystalline oxidesemiconductor) film.

Next, the measurement sample including the oxide semiconductor film wassubjected to CPM measurement. Specifically, the amount of light withwhich a surface of the sample between the pair of electrodes wasirradiated was adjusted so that a photocurrent value was kept constantin the state where voltage was applied between the electrodes providedin contact with the oxide semiconductor film, and then an absorptioncoefficient is derived from the amount of the irradiation light in anintended wavelength range.

An absorption coefficient shown in FIG. 44 was obtained by removing anabsorption coefficient due to the band tail from the absorptioncoefficient obtained by CPM measurement of the measurement sample. Thatis, an absorption coefficient due to defects is shown in FIG. 44 . InFIG. 44 , the horizontal axis indicates the absorption coefficient, andthe vertical axis indicates the photon energy. The bottom of theconduction band and the top of the valence band of the oxidesemiconductor film are set to 0 eV and 3.15 eV, respectively, on thevertical axis in FIG. 44 . The curve in FIG. 44 represents a relationbetween the absorption coefficient and photon energy, which correspondsto a defect level.

In a curve shown in FIG. 44 , an absorption coefficient due to a defectlevel is 5.86×10⁻⁴ cm⁻¹. That is, the CAAC-OS film has an absorptioncoefficient due to a defect level of less than 1×10⁻³ cm⁻¹, preferablyless than 1×10⁻⁴ cm⁻¹ and is a film which has a low density of a defectlevel.

The film density of the oxide semiconductor film was measured by X-rayreflectometry (XRR). The film density of the oxide semiconductor filmwas 6.3 g/cm³. That is, the CAAC-OS film is a film with a high filmdensity.

Next, deterioration caused by the application of positive voltage to thedrain electrode of the transistor is described.

FIG. 40 shows a band structure in the channel length direction. Notethat an oxide semiconductor film (OS) is shown as an i-layer (denoted by“i”) in FIG. 40 to be distinguished from the n-layer.

As shown in FIG. 40 , the Fermi energy of the oxide semiconductor filmis higher than the mid gap. This is because when the distance betweenthe source electrode and the drain electrode is sufficiently short, theenergy (Ec) of the bottom of the conduction band is lowered by theeffect of the source electrode and the drain electrode and thus, theenergy of the bottom of the conduction band and the Fermi energy comeclose to each other. This phenomenon is called a conduction bandlowering (CBL) effect. The CBL effect is an effect specific to an oxidesemiconductor, which is due to an extremely large depletion layer of theoxide semiconductor film.

Here, the CBL effect is described in detail.

It seems intuitively that in the case where an intrinsic orsubstantially intrinsic oxide semiconductor film is used as the oxidesemiconductor film, a barrier that is about half the energy gap of theoxide semiconductor film is formed between the source and drainelectrodes and the oxide semiconductor film. However, the transistorincluding the oxide semiconductor film actually has such Vg-Idcharacteristics that drain current starts to flow when gate voltage isabout 0 V.

In view of the above, the following structure illustrated in FIG. 41 isassumed: an oxide semiconductor film (OS) is provided; a sourceelectrode (S) and a drain electrode (D) are provided over the oxidesemiconductor film; and a gate insulating film (GI) is provided over theoxide semiconductor film, the source electrode, and the drain electrode.Then, a band structure along dashed-dotted line E1-E2 of the case wherethe channel length (L) is changed is calculated. In FIG. 41 , n-layersare provided in regions of the oxide semiconductor film, which are incontact with the source electrode and the drain electrode.

From an estimate of the curve width of the band obtained by solving thePoisson's equation, the curve width of the band is found to becharacterized by the Debye shielding length λ_(D) in the followingformula. Note that in the following equation, k_(B) represents aBoltzmann constant.

$\begin{matrix}{{{the}{curve}{width}{of}{the}{band}}‐\sqrt{\frac{{\varepsilon\varepsilon}_{0}k_{B}T}{e^{2}ni}}‐{{the}{Debye}{shielding}{length}\lambda_{D}}} & \left\lbrack {{Formula}1} \right\rbrack\end{matrix}$

By substituting 6.6×10⁻⁹ cm⁻³ for the intrinsic carrier density ni ofthe oxide semiconductor film, 15 for the relative permittivity s of theoxide semiconductor film, and 300 K for temperature T in the aboveformula, the Debye shielding length λ_(D) is found to be as long as5.7×10¹⁰ μm. This indicates that when the channel length is greater than1.14×10¹¹ μm, which is twice as large as the Debye shielding lengthλ_(D), the height of a barrier between the p-layer and the i-layer ishalf the energy gap of the oxide semiconductor film.

FIG. 42 shows calculation results of band structures with channellengths of 0.03 μm, 0.3 μm, 1 μm, 10 μm, 100 μm, and 1×10¹² μm. Notethat in FIG. 42 , “n” denotes the n-layer and “i” denotes a region of anoxide semiconductor film (i-layer) which is sandwiched between then-layers, and a dashed-dotted line represents the Fermi energy of theoxide semiconductor film and a dashed line indicates the mid gap of theoxide semiconductor film.

According to FIG. 42 , in the case where a channel length is as large as1×10¹² μm, the difference in electron energy between the i-layer and then-layer is half the energy gap of the oxide semiconductor film. However,the difference in electron energy between the i-layer and the n-layergradually becomes smaller as the channel length becomes smaller, andthere is almost no barrier when the channel length is 1 μm or less. Notethat the electron energy of the n-layer is fixed by the source electrodeand the drain electrode.

As described above, the barrier between the n-layer and the i-layer issufficiently small when the channel length is small.

Owing to the CBL effect, the subthreshold value of the transistorincluding the oxide semiconductor film is reduced to near thetheoretical limit even when there is a barrier between the source anddrain electrodes and the oxide semiconductor film; thus, favorableswitching characteristics are obtained.

In a channel having n-type conductivity, an electron can easily passfrom the source to the drain and a path is formed between the source andthe drain. As a result, the switching characteristics are hard to beobtained. To avoid this, the channel needs to be completely preventedfrom having n-type conductivity and needs to be necessarily intrinsic(i-type).

A material of a conductive film to be the source electrode and the drainelectrode is a conductive material which is more likely to be bonded tooxygen than to a metal element included in the oxide semiconductor film;therefore, oxygen in the multilayer film 104 is bonded to the conductivematerial. The bonding causes oxygen vacancy in a region of themultilayer film 104 in the vicinity of an interface with the conductivefilm. Alternatively, damage (oxygen vacancy) to the top surface of themultilayer film 104 is caused when the conductive film to be formed overthe multilayer film 104 is formed. Regions whose resistances are reducedowing to the oxygen vacancy and hydrogen, i.e., the low-resistanceregion 105 a and the low-resistance region 105 b are formed, so thatcontact resistance between the multilayer film and the source electrodeor the drain electrode is reduced. Also in the case where the materialof the conductive film is a conductive material which is easily diffusedinto the oxide semiconductor film by heat treatment, the low-resistanceregion 105 a and the low-resistance region 105 b are formed. Althoughboundaries between the multilayer film 104 and each of thelow-resistance region 105 a and the low-resistance region 105 b exist inthe oxide film 104 c, this embodiment is not limited thereto; theboundaries may exist in the oxide film 104 a, in the oxide semiconductorfilm 104 b, at the interface between the oxide film 104 a and the oxidesemiconductor film 104 b, or at the interface between the oxidesemiconductor film 104 b and the oxide film 104 c. A low-resistanceregion is, for example, a region that has a sheet resistance lower thanor equal to 1.0×10⁶ Ω/square, preferably lower than or equal to 1.0×105Ω/square, further preferably lower than or equal to 1.0×10⁴ Ω/square.

The source electrode 106 a and the drain electrode 106 b are formed soas to have a step-like edge portion. The end portions can be formed insuch a manner that a step of making a resist mask recede by ashing andan etching step are alternately performed plural times. Therefore, theedge portions of the source electrode 106 a and the drain electrode 106b are provided over the low-resistance region 105 a and thelow-resistance region 105 b, respectively.

Accordingly, a channel formation region of the transistor 150corresponds to a region 105 c of the multilayer film 104 between thelow-resistance region 105 a and the low-resistance region 105 b, aregion of the low-resistance region 105 a which is not in contact withthe source electrode 106 a, and a region of the low-resistance region105 b which is not in contact with the drain electrode 106 b. Theresistance of the channel formation region of the transistor 150 isreduced (the channel formation region is made to be an n-type);therefore, it is necessary that the impurity concentration of the oxidesemiconductor film in the multilayer film 104 is reduced so that theoxide semiconductor film is highly purified to be intrinsic. Obtaining ahighly purified intrinsic oxide semiconductor film refers to making theoxide semiconductor film be an intrinsic or substantially intrinsicoxide semiconductor film. The term “substantially intrinsic” refers tothe state where an oxide semiconductor film has a carrier density lowerthan 1×10¹⁷/cm³, preferably lower than 1×10¹⁵/cm³, further preferablylower than 1×10¹³/cm³.

In order that the channel formation region of the transistor 150 ishighly purified to be intrinsic, oxygen is added to the region 105 c ofthe multilayer film 104. The addition of oxygen can reduces the amountof oxygen vacancy, so that a highly purified intrinsic region can beformed. Accordingly, the highly purified intrinsic region and the lowresistance regions can be formed separately at one time.

Further, excess oxygen can be easily released from the base insulatingfilm 102, the gate insulating film 108, and the oxide insulating film112 by heat treatment, so that the oxygen vacancy in the multilayer film104 can be reduced. Thus, the amount of oxygen vacancy in the channelformation region of the multilayer film 104 is further reduced, so thatthe channel formation region is highly purified intrinsic.

Next, the band structure of the multilayer film 104 is described. Astack corresponding to the multilayer film 104 is formed, and in thestack, an In—Ga—Zn oxide having an energy gap of 3.15 eV is used as alayer corresponding to each of the oxide film 104 a and the oxide film104 c and an In—Ga—Zn oxide having an energy gap of 2.8 eV is used as alayer corresponding to the oxide semiconductor film 104 b. The bandstructure thereof is analyzed. Note that the stack is referred to as themultilayer film 104 and the layers included in the stack are referred toas the oxide film 104 a, the oxide semiconductor film 104 b, and theoxide film 104 c, for convenience.

The thickness of each of the oxide film 104 a, the oxide semiconductorfilm 104 b, and the oxide film 104 c was 10 nm. The energy gap wasmeasured with use of a spectroscopic ellipsometer (UT-300 manufacturedby HORIBA Jobin Yvon). Further, the energy gap in the vicinity of theinterface between the oxide film 104 a and the oxide semiconductor film104 b and the energy gap in the vicinity of the interface between theoxide film 104 c and the oxide semiconductor film 104 b were each 3 eV.

FIG. 2A schematically shows part of a band structure of a difference inenergy (electron affinity) between the vacuum level and the bottom ofthe conduction band of each layer, which is calculated by subtractingthe energy gap of each layer from the difference in energy between thevacuum level and the top of the valence band. With reference to FIG. 2A,a case is described in which silicon oxide films are provided in contactwith the oxide film 104 a and the oxide film 104 c. Here, Evacrepresents energy of the vacuum level, EcI1 and EcI2 each represent theenergy of the bottom of the conduction band in the silicon oxide film,EcS1 represents the energy of the bottom of the conduction band in theoxide film 104 a, EcS2 represents the energy of the bottom of theconduction band in the oxide semiconductor film 104 b, and EcS3represents the energy of the bottom of the conduction band in the oxidefilm 104 c. Further, in forming a transistor, a gate electrode (the gateelectrode 110 in the transistor 150) is to be in contact with a siliconoxide film having EcI2.

As shown in FIG. 2A, the energies of the bottoms of the conduction bandin the oxide film 104 a, the oxide semiconductor film 104 b, and theoxide film 104 c are changed continuously. This can be understood alsofrom the fact that the compositions of the oxide film 104 a, the oxidesemiconductor film 104 b, and the oxide film 104 c are close to eachother and oxygen is easily diffused among them. Thus, the oxide film 104a, the oxide semiconductor film 104 b, and the oxide film 104 c have acontinuous physical property although they are a stack of layers havingdifferent compositions. In the drawings in this specification,interfaces between the layers of the stack are indicated by dottedlines.

The multilayer film 104 in which layers containing the same maincomponents are stacked is formed to have not only a simple stacked-layerstructure of the layers but also a continuous energy band (here, inparticular, a well structure having a U-shape in which energies of thebottoms of the conduction band are changed continuously between layers).That is, a stacked structure is formed so that impurities that causedefect levels such as a trap center and a recombination center for theoxide semiconductor or a barrier impeding carrier flow do not exist atthe interfaces between the layers. If impurities are mixed between theoxide semiconductor film and the oxide film stacked, the continuity ofthe energy band is lost and carriers disappear by a trap orrecombination.

In order to form continuous junction, the layers need to be stackedsuccessively without being exposed to the air by using a multi-chamberdeposition system (sputtering apparatus) provided with a load lockchamber. It is preferable that each chamber of the sputtering apparatusbe able to be evacuated to a high vacuum (to about 1×10⁻⁴ Pa to 5×10⁻⁷Pa) by an adsorption vacuum pump such as a cryopump and that the chamberbe able to heat a substrate over which a film is to be deposited to 100°C. or higher so that water and the like acting as impurities of theoxide semiconductor are removed as much as possible. Alternatively, acombination of a turbo molecular pump and a cold trap is preferably usedto prevent back-flow of a gas containing a carbon component, moisture,or the like from an exhaust system into a chamber.

Not only high vacuum evaporation in a chamber but also high purity of asputtering gas is necessary to obtain a high-purity intrinsic oxidesemiconductor. As an oxygen gas or an argon gas used for a sputteringgas, a gas which is highly purified to have a dew point of −80° C. orlower, preferably −100° C. or lower, further preferably −120° C. orlower is used, whereby entry of moisture or the like into the oxidesemiconductor film can be prevented as much as possible.

Note that FIG. 2A shows the case where EcI1 and EcI3 are similar to eachother; however, EcI1 and EcI3 may be different from each other. Forexample, in the case where EcS1 is higher than EcS3, the structure ofFIG. 2B is more favorable than the structure of FIG. 2A. This is becausecurrent flows mainly through EcS2 near EcS3 on the gate electrode side.

When the oxide film 104 c and the gate electrode are provided so that asilicon oxide film is sandwiched therebetween, the silicon oxide filmfunctions as a gate insulating film, and the oxide film 104 c canprevent indium contained in the oxide semiconductor film 104 b fromdiffusing into the gate insulating film. To prevent indium diffusion bythe oxide film 104 c, the indium content of the oxide film 104 c ispreferably lower than that of the oxide semiconductor film 104 b.

For example, when EcI1 is equal to EcI3, an In—Ga—Zn oxide having anatomic ratio of In:Ga:Zn=1:3:2 can be used for the oxide film 104 a andthe oxide film 104 c and an In—Ga—Zn oxide having an atomic ratio ofIn:Ga:Zn=1:1:1 can be used for the oxide semiconductor film 104 b.Further, when EcI1 is higher than EcI3, an In—Ga—Zn oxide having anatomic ratio of In:Ga:Zn=1:6:4 or 1:9:6 can be used for the oxide film104 a, an In—Ga—Zn oxide having an atomic ratio of In:Ga:Zn is 1:1:1 or3:1:2 can be used for the oxide semiconductor film 104 b, and anIn—Ga—Zn oxide having an atomic ratio of In:Ga:Zn=1:3:2 can be used forthe oxide film 104 c.

According to FIGS. 2A and 2B, the oxide semiconductor film 104 b of themultilayer film 104 serves as a well and a channel of the transistorincluding the multilayer film 104 is formed in the oxide semiconductorfilm 104 b. Since the energy of the bottom of the conduction band iscontinuously changed, the multilayer film 104 can also be referred to asa U-shaped well. Further, a channel formed to have such a structure canalso be referred to as a buried channel.

Note that trap levels resulting from impurities or defects can be formedin the vicinity of the interfaces between the oxide film 104 a and aninsulating film such as the silicon oxide film and between the oxidefilm 104 c and an insulating film. The oxide films 104 a and 104 cenables the oxide semiconductor film 104 b and the trap levels to bedistant from each other. However, when the energy difference betweenEcS1 and EcS2 and the energy difference between EcS3 and EcS2 is small,an electron in the oxide semiconductor film 104 b might reach the traplevel by passing over the energy difference. When the electrons arecaptured by the trap levels, negative fixed charges are generated, sothat the threshold voltage of the transistor is shifted in the positivedirection.

Thus, the energy gap between EcS1 and EcS2 and the energy gap betweenEcS3 and EcS2 are each preferably 0.1 eV or larger, further preferably0.15 eV or larger, because the variation amount of the threshold voltageof the transistor is reduced and the transistor can have stableelectrical characteristics.

Note that one or more of the oxide film 104 a, the oxide semiconductorfilm 104 b, and the oxide film 104 c preferably contain crystal parts.For example, the oxide film 104 a is amorphous, and the oxidesemiconductor film 104 b and the oxide film 104 c are layers containingcrystal parts. Since the oxide semiconductor film 104 b where a channelis formed includes crystal parts, the transistor can have stableelectrical characteristics.

In particular, crystal parts included in the oxide semiconductor film104 b and the oxide film 104 c are preferably crystals whose c-axes arealigned in a direction substantially perpendicular to the surfaces ofthe oxide semiconductor film 104 b and the oxide film 104 c.

In the transistor having the structure in FIGS. 1A to 1C, the oxide film104 c is in contact with the source electrode 106 a and the drainelectrode 106 b, and it is preferable that the energy gap of the oxidefilm 104 c be not large like an insulator and the film thickness besmall in order that current can be extracted efficiently. Further, inthe case where an In—Ga—Zn oxide is used for the multilayer film 104, itis preferable that the oxide film 104 c contain less In than the oxidesemiconductor film 104 b so that diffusion of In to the gate insulatingfilm can be prevented.

As illustrated in a cross-sectional enlarged view of the transistor inFIG. 3A, a region 104 d having a curved surface may be provided at anend portion of the multilayer film 104. In the case where the multilayerfilm 104 is formed using an In-M-Zn oxide (M is Al, Ti, Ga, Y, Zr, La,Ce, Nd, or Hf), the amount of M (MS4) contained in the region 104 d ispreferably larger than that of M (MS2) contained in the oxidesemiconductor film 104 b. Further preferably, the amount of MS4 is thesame as that of M (MS1) contained in the oxide film 104 a.

The region 104 d at the end portion of the multilayer film 104 can beformed by utilizing a so-called rabbit ear, in which a composition ofthe oxide film 104 a is reattached by a dry-etching method. Further,when the etching gas component attached at the formation of the rabbitear is removed and the M component is oxidized by oxidation treatment,the insulating property of the region 104 d can be improved.

Further, as illustrated in FIG. 3B, the base insulating film 102 ispartly etched when the multilayer film is subjected to dry etching.Therefore, a region of the base insulating film 102 which is in contactwith the multilayer film has a larger thickness than a region of thebase insulating film 102 which is not in contact with the multilayerfilm. With such a structure, the adhesion between the multilayer filmand the source electrode or the drain electrode can be improved.

FIG. 4A is a top view of the transistor illustrated in FIGS. 1A to 1Cand a cross-sectional view of the multilayer film 104. The region 104 dof the multilayer film 104 overlapping with the gate electrode is likelyto be changed to an n-type because impurities due to an external factorare mixed therein or oxygen vacancy is generated; thus, the region 104 dacts as a parasitic channel in some cases. It is particularly noticeablethat the oxide semiconductor film 104 b having a small energy gap islikely to be changed to an n-type; therefore, the region 104 d coveringthe oxide semiconductor film 104 b has an effect of suppressinggeneration of a parasitic channel.

When the main components of the oxide film 104 a are the same as thoseof the region 104 d, the effect of suppressing generation of a parasiticchannel can be more enhanced as a difference (4E) between energy (EcS1)of the bottom of the conduction band in the oxide film 104 a and energy(EcS4) at the bottom of the conduction band in the region 104 d getslarger. Further, the 104 d is preferably thicker than the oxide film 104a or the oxide film 104 c, and generation of a parasitic channel due tochange of an end portion of the oxide semiconductor film 104 b to ann-type can be suppressed as the region 104 d gets thicker.

The composition of the region 104 d approximates the compositions of theoxide film 104 a, the oxide semiconductor film 104 b, and the oxide film104 c, whereby the energy of the bottom of the conduction bandcontinuously changes as illustrated in FIG. 4B showing part of the bandstructure of the multilayer film. That is, the oxide film 104 a, theoxide semiconductor film 104 b, the oxide film 104 c, and the region 104d make a continuous junction. Note that the direction of D1-D2 and thedirection of E1-E2 in FIG. 4B corresponds to the direction of adashed-dotted line D1-D2 and the direction of a dashed-dotted line E1-E2in the cross-sectional view of the multilayer film 104 in FIG. 4A,respectively.

The source electrode 106 a and the drain electrode 106 b can be formedusing a conductive material which is more likely to be bonded to oxygenthan a metal element contained in the oxide film and the oxidesemiconductor film (hereinafter the phrase “than a metal elementcontained in the oxide film and the oxide semiconductor film” is omittedand the phrase “be bonded easily to oxygen” may be used without acomparison object). For example, Al, Cr, Cu, Ta, Mo, or W can be used. W(tungsten) having a high melting point is especially preferred because arelatively high process temperature can be employed in a later step.Note that the conductive material which is likely to be bonded to oxygenincludes a material in which oxygen is more easily diffused than theoxide film and the oxide semiconductor film (hereinafter the phrase“than the oxide film and the oxide semiconductor film” is omitted andthe phrase “oxygen is easily diffused” may be used without a comparativeobject). Further, a conductive material which is easily diffused intothe oxide semiconductor film by heat treatment can be used. For example,Ti can be used. Alternatively, a plurality of above materials may bestacked. For example, Cu may be stacked over W; Cu may be stacked overTi.

A contact between the conductive material which is likely to be bondedto oxygen and the multilayer film causes a phenomenon in which oxygen inthe multilayer film is bonded to the conductive material.

Some heating steps are included in the manufacturing process of thetransistor, and thus owing to the phenomenon, oxygen vacancy isgenerated in and around the region of the multilayer film which is incontact with the source electrode and the drain electrode, so that theregion becomes an n-type. When a conductive material which is easilydiffused into the oxide semiconductor film is used as the material ofthe conductive film, the conductive material is diffused into the oxidesemiconductor film by some heating steps, so that the region becomes ann-type. Accordingly, the n-type regions can serve as a source or a drainregion of the transistor. Therefore, contact resistance between themultilayer film and the source electrode or the drain electrode isreduced to improve conductivity. As a result, high speed operation ofthe transistor can be achieved.

End portions of the source electrode 106 a and the drain electrode 106 bin FIGS. 1A to 1C each preferably have a shape having a plurality ofsteps. With such a shape including a plurality of steps, coverage with afilm formed over the source electrode and the drain electrode can beimproved, whereby the electrical characteristics and long-termreliability of the transistor can be improved.

The gate insulating film 108 can be formed using an insulating filmcontaining one or more of aluminum oxide, magnesium oxide, siliconoxide, silicon oxynitride, silicon nitride oxide, silicon nitride,gallium oxide, germanium oxide, yttrium oxide, zirconium oxide,lanthanum oxide, neodymium oxide, hafnium oxide, and tantalum oxide. Thegate insulating film 108 may be a stack of any of the above materials.

It is preferable that the gate insulating film 108 contain aluminumoxide because gettering of hydrogen contained in the multilayer film isperformed owing to the aluminum oxide so that the hydrogen in themultilayer film is reduced. Further, it is preferable that an oxideinsulating film containing excess oxygen be formed over the gateinsulating film 108 containing the aluminum oxide. With such astructure, the hydrogen in the multilayer film is reduced owing to thealuminum oxide and oxygen can be supplied to the multilayer film by theoxide insulating film.

Further, the gate insulating film 108 may be a stack of an oxideinsulating film containing excess oxygen and a barrier film. Siliconnitride or aluminum oxide can be used for the barrier film.

It is preferable that the gate insulating film 108 contain highly purehafnium oxide because leakage current can be reduced.

For the gate electrode 110, a conductive film of Al, Ti, Cr, Co, Ni, Cu,Y, Zr, Mo, Ru, Ag, Ta, W, or the like can be used. The gate electrode110 may be a stack of any of the above materials.

The oxide insulating film 112 may be formed over the gate insulatingfilm 108 and the gate electrode 110. The oxide insulating film can beformed using an insulating film containing one or more of aluminumoxide, magnesium oxide, silicon oxide, silicon oxynitride, galliumoxide, germanium oxide, yttrium oxide, zirconium oxide, lanthanum oxide,neodymium oxide, hafnium oxide, and tantalum oxide. The oxide insulatingfilm may be a stack of any of the above materials.

Here, the oxide insulating film 112 preferably contains excess oxygen.An oxide insulating film containing excess oxygen refers to an oxideinsulating film which can release oxygen by heat treatment or the like.Preferably, the amount of oxygen released from the insulating film,which is converted into oxygen atoms in thermal desorption spectroscopy,is preferably 1.0×10¹⁹ atoms/cm³ or higher. Oxygen released from theoxide insulating film can be diffused to a channel formation region ofthe oxide semiconductor film 104 b of the multilayer film 104 throughthe gate insulating film 108, so that oxygen vacancy which isundesirably formed can be filled with the oxygen. Accordingly, stableelectric characteristics of the transistor can be provided.

Further, the nitride insulating film 114 may be provided over the oxideinsulating film 112. The nitride insulating film 114 can prevent oxygenin the oxide insulating film 112 from diffusing to the outside at thetime of heat treatment and functions as a barrier film which preventshydrogen or a compound containing hydrogen (e.g., water) from enteringthe multilayer film 104 from the outside. Accordingly, the reliabilityof the transistor can be improved.

FIG. 5A illustrates another transistor structure. A transistor 190illustrated in FIG. 5A includes: the base insulating film 102 over thesubstrate 100; the oxide film 104 a over the base insulating film 102;the oxide semiconductor film 104 b over the oxide film 104 a; the sourceelectrode 106 a and the drain electrode 106 b over the oxidesemiconductor film 104 b; the oxide film 104 c over the source electrode106 a and the drain electrode 106 b; the low-resistance region 105 awhich is formed in such a manner that oxygen is extracted from the oxidesemiconductor film 104 b and the oxide film 104 c which are in contactwith the source electrode 106 a; the low-resistance region 105 b whichis formed in such a manner that oxygen is extracted from the oxidesemiconductor film 104 b and the oxide film 104 c which are in contactwith the drain electrode 106 b; the gate insulating film 108 over theoxide film 104 c, the source electrode 106 a, and the drain electrode106 b; and the gate electrode 110 over the gate insulating film 108.Further, the oxide insulating film 112 may be formed over the gateinsulating film 108 and the gate electrode 110. The oxide insulatingfilm 112 may be provided as necessary, and another insulating film(e.g., the nitride insulating film 114) may be formed thereover.

The transistor 190 in FIG. 5A is the same as the transistor 150 in FIGS.1A to 1C except that the oxide film 104 c is formed over the sourceelectrode 106 a and the drain electrode 106 b. Like the transistor 150,the transistor 190 includes the low-resistance region 105 a and thelow-resistance region 105 b.

An In—Ga—Zn oxide having an atomic ratio of In:Ga:Zn=1:3:2 can be usedfor the oxide film 104 a, an In—Ga—Zn oxide having an atomic ratio ofIn:Ga:Zn=1:1:1 can be used for the oxide semiconductor film 104 b, andan In—Ga—Zn oxide having an atomic ratio of In:Ga:Zn=1:3:2 can be usedfor the oxide film 104 c.

In the transistor 190, the oxide semiconductor film 104 b in which thechannel is formed is in contact with the source electrode 106 a and thedrain electrode 106 b, so that oxygen vacancy is generated at a highdensity in the oxide semiconductor film 104 b and n-type regions (thelow-resistance region 105 a and the low-resistance region 105 b) areformed. Therefore, there is a few resistance component in a carrier pathand carriers can be transported efficiently.

Further, the oxide film 104 c is formed after the source electrode 106 aand the drain electrode 106 b are formed; therefore, overetching of theoxide film 104 c does not occur at the time of forming the sourceelectrode 106 a and the drain electrode 106 b. Therefore, the oxidesemiconductor film 104 b where the channel is formed can be sufficientlydistant from the gate insulating film 108, and the effect of suppressinginfluence of diffusion of impurities from the interface can be enhanced.

Further, the oxide film 104 c functions as a barrier film whichsuppresses entry of hydrogen or a compound containing hydrogen (e.g.,water) from the outside to the oxide semiconductor film 104 b; thus, thereliability of the transistor can be improved. Therefore, the nitrideinsulating film 114 is not necessarily provided.

Further, when the source electrode 106 a and the drain electrode 106 bare formed using a conductive material which is likely to be bonded tooxygen, as in a transistor 195 illustrated in FIG. 5B, low-resistanceregions are also formed in the oxide film 104 c in contact with thesource electrode 106 a and the drain electrode 106 b.

Further, as in a transistor 200 illustrated in FIG. 5C, a structure inwhich the end portion of the oxide film 104 a and the end portion of theoxide semiconductor film 104 b are not continuous may be employed. Theshapes of the edge portions are formed in such a manner that a stack ofthe oxide film 104 a and the oxide semiconductor film 104 b iswet-etched using 85% phosphoric acid, an aluminum etchant (phosphoricacid (72%), nitric acid (2%), acetic acid (9%)), or the like underconditions where the etching rate of the oxide semiconductor film 104 bis higher than that of the oxide film 104 a.

The end portions of the oxide film 104 a and the oxide semiconductorfilm 104 b each have a taper shape. An inclination angle which is formedby the side surface and bottom surface of a layer having a taper shape(e.g., the oxide film 104 a) when the layer is seen from a directionperpendicular to a cross section thereof (a plane orthogonal to thesurface of the substrate) is referred to as a taper angle. A taper angleθ₁ of the oxide film 104 a is preferably greater than 30° and less thanor equal to 70°, a taper angle θ₂ of the oxide semiconductor film 104 bis larger than the taper angle θ₁ of the oxide film 104 a and ispreferably less than 90°, further preferably greater than 45° and lessthan 80°.

The contact area of the source electrode 106 a and the drain electrode106 b can be large when the multilayer film 104 has such a taperedshape. Accordingly, the contact resistance between the multilayer film104 and the source and drain electrodes 106 a and 106 b is reduced,whereby on-state current of the transistor can be increased.

Like in a transistor 210 illustrated in FIG. 6A, after the oxide film104 a, the oxide semiconductor film 104 b, and the oxide film 104 c areformed in this order over the base insulating film 102, the sourceelectrode 106 a and the drain electrode 106 b may be formed and then anoxide film 104 e may be formed over the source electrode 106 a and thedrain electrode 106 b. An In—Ga—Zn oxide having an atomic ratio ofIn:Ga:Zn=1:3:2 can be used for the oxide film 104 e.

Further, FIG. 6B illustrates another transistor structure. A transistor220 illustrated in FIG. 6B is the same as the transistor 150 in FIGS. 1Ato 1C except that a conductive film 107 a and a conductive film 107 bare formed over the source electrode 106 a and the drain electrode 106b. Like the transistor 150 described in Embodiment 1, the transistor 220includes the low-resistance region 105 a and the low-resistance region105 b.

Note that the conductive film 107 a and the conductive film 107 bfunction as part of the source electrode and part of the drainelectrode. Thus, in the transistor 220 in FIG. 6B, a channel lengthcorresponds to a distance between the conductive film 107 a and theconductive film 107 b.

Further, in the transistor 220 in FIG. 6B, a channel corresponds to aregion of the oxide semiconductor film 104 b which does not overlap withthe conductive film 107 a and the conductive film 107 b.

Furthermore, in the transistor 220 in FIG. 6B, a channel formationregion corresponds to regions of the oxide film 104 a, the oxidesemiconductor film 104 b, and the oxide film 104 c which do not overlapwith the conductive film 107 a and the conductive film 107 b.

After the conductive film 107 a and the conductive film 107 b areformed, oxygen is added to the region 105 c of the multilayer film 104,whereby the amount of oxygen vacancy in the channel formation region canbe reduced and a highly purified intrinsic region can be formed.Accordingly, the highly purified intrinsic region and the low-resistanceregions can be formed separately at one time.

When the conductive film 107 a and the conductive film 107 b are formedusing a conductive material which is less likely to be bonded to oxygenthan to a metal element included in the oxide semiconductor film,formation of oxygen vacancy in the channel formation region formed inthe oxide semiconductor film can be prevented, so that change of thechannel to an n-type can be prevented. Accordingly, even a transistorwith an extremely short channel length can have favorable electricalcharacteristics.

When the source electrode and the drain electrode are formed using onlythe conductive material which is less likely to be bonded to oxygen,contact resistance with the multilayer film 104 becomes too high.Therefore, for example, as illustrated in FIG. 6B and the like, theconductive film 107 a and the conductive film 107 b are preferablyformed to cover the source electrode 106 a and the drain electrode 106b.

Tantalum nitride, titanium nitride, ruthenium, or an alloy materialcontaining these substances as main components can be used for theconductive film 107 a and the conductive film 107 b. For example, a20-nm-thick tantalum nitride film is formed by a sputtering method orthe like.

When the conductive film 107 a and the conductive film 107 b are formedin such a manner that a conductive film is processed by light exposurewith an electron beam, ArF immersion, or extreme ultraviolet (EUV), withthe use of a resist mask with a small pattern width, the channel lengthcan be greater than or equal to 1 nm and less than or equal to 30 nm.Here, in an electron beam writing apparatus capable of electron beamirradiation, the acceleration voltage is preferably in the range from 5kV to 50 kV at the time of light exposure using an electron beam, forexample. The current intensity is preferably in the range from 5×10⁻¹² Ato 1×10⁻¹¹ A. The minimum beam size is preferably 2 nm or less. Theminimum possible pattern line width is preferably 8 nm or less.

The channel length of the transistor is preferably equal in any part ofthe transistor. In the case where the shape of the channel formationregion of the transistor includes a curved line, it is preferable toform the curved line by exposure to an electron beam so as to be smoothand so as to have an equal the line width.

In order to form a smooth curved line with an equal line width byexposure to an electron beam, there is a method for exposure of a curvedline by rotating a stage overlapping with a substrate thereon, forexample. With a linearly movable stage, a resist mask can also bepatterned so that the channel length of the transistor becomes equal, byusing a method in which the size or direction of a figure for dividingelectron beam writing regions is optimized in accordance with thepattern of the electron beam, a multi-pass writing method in which aFIG. is shifted by a uniform width and writing is performed with anoverlap so that the amount of light exposure of a pattern becomes equal,or the like. It is preferable to use the above method or the like toform a resist mask with an equal line width so that the channel lengthof the transistor becomes equal.

FIG. 7A illustrates another transistor structure. A transistor 230 has astructure of the transistor 190 in FIG. 5A which further includes theconductive film 107 a and the conductive film 107 b over the oxide film104 c.

FIG. 7B illustrates another transistor structure. A transistor 240 isformed by a formation process of the transistor 230 in FIG. 7A in whichthe formation process of the oxide film 104 c and the formation processof the conductive film 107 a and the conductive film 107 b are reversed.

The above is the description of the transistors of one embodiment of thepresent invention. The amount of oxygen vacancy in the channel formationregion of the oxide semiconductor in the multilayer film in any of thetransistors can be reduced and the electrical characteristics of any ofthe transistors are favorable; therefore, it is possible to provide ahighly reliable semiconductor device.

This embodiment can be combined as appropriate with any of the otherembodiments in this specification.

Embodiment 2

In this embodiment, a method for manufacturing the transistor 150described in Embodiment 1 with reference to FIGS. 1A to 1C is described.

First, the base insulating film 102 is formed over the substrate 100.

A glass substrate, a ceramic substrate, a quartz substrate, a sapphiresubstrate, or the like can be used as the substrate 100. Alternatively,a single crystal semiconductor substrate or a polycrystallinesemiconductor substrate made of silicon, silicon carbide, or the like, acompound semiconductor substrate made of silicon germanium or the like,a silicon-on-insulator (SOI) substrate, or the like may be used. Stillalternatively, any of these substrates further provided with asemiconductor element may be used.

The base insulating film 102 can be formed by a plasma chemical vapordeposition (CVD) method, a sputtering method, or the like using an oxideinsulating film of aluminum oxide, magnesium oxide, silicon oxide,silicon oxynitride, gallium oxide, germanium oxide, yttrium oxide,zirconium oxide, lanthanum oxide, neodymium oxide, hafnium oxide,tantalum oxide, or the like; a nitride insulating film of siliconnitride, silicon nitride oxide, aluminum nitride, aluminum nitrideoxide, or the like; or a mixed material of any of these. Further, astack of any of the above materials may be used, and at least an upperlayer of the base insulating film 102, which is in contact with themultilayer film 104, is preferably formed using a material containingoxygen that might serve as a supply source of oxygen to the multilayerfilm 104.

In the case where the surface of the substrate 100 is made of aninsulator and there is no influence of impurity diffusion to themultilayer film 104 to be formed later, the base insulating film 102 isnot necessarily provided.

Next, the multilayer film 104 is formed in such a manner that the oxidefilm 104 a, the oxide semiconductor film 104 b, and the oxide film 104 care formed over the base insulating film 102 in this order from thesubstrate 100 side by a sputtering method, a chemical vapor deposition(CVD) method, a molecular beam epitaxy (MBE) method, an atomic layerdeposition (ALD) method, or a pulsed laser deposition (PLD) method andare etched selectively (see FIG. 8A). Note that heating may be performedbefore the etching.

For the oxide film 104 a, the oxide semiconductor film 104 b, and theoxide film 104 c, any of the materials described in the above embodimentcan be used. For example, the oxide film 104 a can be formed using anIn—Ga—Zn oxide having an atomic ratio of In:Ga:Zn=1:3:2, the oxidesemiconductor film 104 b can be formed using an In—Ga—Zn oxide having anatomic ratio of In:Ga:Zn=1:1:1, and the oxide film 104 c can be formedusing an In—Ga—Zn oxide having an atomic ratio of In:Ga:Zn=1:3:2.

The multilayer film including the oxide film 104 a, the oxidesemiconductor film 104 b, and the oxide film 104 c preferably containsat least indium (In) or zinc (Zn). Alternatively, the multilayer filmpreferably contains both In and Zn. In order to reduce variation inelectrical characteristics of the transistors including the multilayerfilm, the multilayer film preferably contains a stabilizer in additionto In and Zn.

As a stabilizer, gallium (Ga), tin (Sn), hafnium (Hf), aluminum (Al),zirconium (Zr), and the like can be given. As another stabilizer,lanthanoid such as lanthanum (La), cerium (Ce), praseodymium (Pr),neodymium (Nd), samarium (Sm), europium (Eu), gadolinium (Gd), terbium(Tb), dysprosium (Dy), holmium (Ho), erbium (Er), thulium (Tm),ytterbium (Yb), or lutetium (Lu) can be given.

As the oxide films and the oxide semiconductor film, for example, any ofthe following can be used: indium oxide, tin oxide, zinc oxide, an In—Znoxide, a Sn—Zn oxide, an Al—Zn oxide, a Zn—Mg oxide, a Sn—Mg oxide, anIn—Mg oxide, an In—Ga oxide, an In—Ga—Zn oxide, an In—Al—Zn oxide, anIn—Sn—Zn oxide, a Sn—Ga—Zn oxide, an AL-Ga—Zn oxide, an Sn—Al—Zn oxide,an In—Hf—Zn oxide, an In-La—Zn oxide, an In—Ce—Zn oxide, an In—Pr—Znoxide, an In—Nd—Zn oxide, an In—Sm—Zn oxide, an In—Eu—Zn oxide, anIn—Gd—Zn oxide, an In—Tb—Zn oxide, an In—Dy—Zn oxide, an In—Ho—Zn oxide,an In—Er—Zn oxide, an In—Tm—Zn oxide, an In—Yb—Zn oxide, an In—Lu—Znoxide, an In—Sn—Ga—Zn oxide, an In—Hf—Ga—Zn oxide, an In—Al—Ga—Zn oxide,an In—Sn—Al—Zn oxide, an In—Sn—Hf—Zn oxide, or an In—Hf-AL-Zn oxide.

Note that, for example, an In—Ga—Zn oxide means an oxide containing In,Ga, and Zn as its main components and there is no particular limitationon the ratio of In, Ga, and Zn. The In—Ga—Zn oxide may contain a metalelement other than the In, Ga, and Zn. Further, in this specification, afilm formed using an In—Ga—Zn oxide is also referred to as an IGZO film.

Alternatively, a material represented by InMO₃(ZnO)_(m) (m>0 issatisfied, and m is not an integer) may be used as an oxidesemiconductor. Note that M represents one or more metal elementsselected from Ga, Fe, Mn, and Co. Alternatively, as the oxidesemiconductor, a material represented by a chemical formula,In₂SnO₅(ZnO)_(n) (n>0, n is a natural number) may be used.

Note that as described in Embodiment 1 in detail, a material of each ofthe oxide film 104 a and the oxide film 104 c is selected so that theoxide film 104 a and the oxide film 104 c have higher electronaffinities than that of the oxide semiconductor film 104 b.

Note that the oxide films and the oxide semiconductor film arepreferably formed by a sputtering method. As a sputtering method, an RFsputtering method, a DC sputtering method, an AC sputtering method, orthe like can be used. In particular, a DC sputtering method ispreferably used because dust generated in the deposition can be reducedand the film thickness can be uniform.

In the case where an In—Ga—Zn oxide is used for the oxide film 104 a,the oxide semiconductor film 104 b, and the oxide film 104 c, a targetwhich has an atomic ratio of, for example, In:Ga:Zn=1:1:1, 2:2:1, 3:1:2,1:3:2, 1:3:4, 1:4:3, 1:5:4, 1:6:2, 1:6:6, 1:6:10, 2:1:3, 1:6:2, 1:6:4,1:6:10, 1:9:6, 1:1:4, or 1:1:2 can be used so that the electron affinityof each of the oxide film 104 a and the oxide film 104 c is larger thanthat of the oxide semiconductor film 104 b. Alternatively, a Ga—Zn oxidemay be used for each of the oxide film 104 a, the oxide semiconductorfilm 104 b, and the oxide film 104 c.

The indium content in the oxide semiconductor film 104 b is preferablyhigher than those in the oxide film 104 a and the oxide film 104 c. Inan oxide semiconductor, the s orbital of heavy metal mainly contributesto carrier transfer, and when the proportion of In in the oxidesemiconductor is increased, overlap of the s orbitals is likely to beincreased. Therefore, an oxide having a composition in which theproportion of In is higher than that of Ga has higher mobility than anoxide having a composition in which the proportion of In is equal to orlower than that of Ga. Thus, with use of an oxide having a high indiumcontent for the oxide semiconductor film 104 b, a transistor having highmobility can be achieved.

A structure of an oxide semiconductor film is described below.

An oxide semiconductor film is classified roughly into a single-crystaloxide semiconductor film and a non-single-crystal oxide semiconductorfilm. The non-single-crystal oxide semiconductor film includes any of anamorphous oxide semiconductor film, a microcrystalline oxidesemiconductor film, a polycrystalline oxide semiconductor film, a c-axisaligned crystalline oxide semiconductor (CAAC-OS) film, and the like.

The amorphous oxide semiconductor film has disordered atomic arrangementand no crystalline component. A typical example thereof is an oxidesemiconductor film in which no crystal part exists even in a microscopicregion, and the whole of the film is amorphous.

The microcrystalline oxide semiconductor film includes a microcrystal(also referred to as nanocrystal) with a size greater than or equal to 1nm and less than 10 nm, for example. Thus, the microcrystalline oxidesemiconductor film has a higher degree of atomic order than theamorphous oxide semiconductor film. Hence, the density of defect statesof the microcrystalline oxide semiconductor film is lower than that ofthe amorphous oxide semiconductor film.

The CAAC-OS film is one of oxide semiconductor films including aplurality of crystal parts, and most of crystal parts each fit inside acube whose one side is less than 100 nm. Thus, there is a case where acrystal part included in the CAAC-OS film fits a cube whose one side isless than 10 nm, less than 5 nm, or less than 3 nm. The density ofdefect states of the CAAC-OS film is lower than that of themicrocrystalline oxide semiconductor film. The CAAC-OS film is describedin detail below.

In a transmission electron microscope (TEM) image of the CAAC-OS film, aboundary between crystal parts, that is, a grain boundary is not clearlyobserved. Thus, in the CAAC-OS film, a reduction in electron mobilitydue to the grain boundary is less likely to occur.

According to the TEM image of the CAAC-OS film observed in a directionsubstantially parallel to a sample surface (cross-sectional TEM image),metal atoms are arranged in a layered manner in the crystal parts. Eachmetal atom layer has a morphology reflected by a surface over which theCAAC-OS film is formed (hereinafter, a surface over which the CAAC-OSfilm is formed is referred to as a formation surface) or a top surfaceof the CAAC-OS film, and is arranged in parallel to the formationsurface or the top surface of the CAAC-OS film.

On the other hand, according to the TEM image of the CAAC-OS filmobserved in a direction substantially perpendicular to the samplesurface (plan TEM image), metal atoms are arranged in a triangular orhexagonal configuration in the crystal parts. However, there is noregularity of arrangement of metal atoms between different crystalparts.

From the results of the cross-sectional TEM image and the plan TEMimage, alignment is found in the crystal parts in the CAAC-OS film.

A CAAC-OS film is subjected to structural analysis with an X-raydiffraction (XRD) apparatus. For example, when the CAAC-OS filmincluding an InGaZnO₄ crystal is analyzed by an out-of-plane method, apeak appears frequently when the diffraction angle (2θ) is around 31°.This peak is derived from the (009) plane of the InGaZnO₄ crystal, whichindicates that crystals in the CAAC-OS film have c-axis alignment, andthat the c-axes are aligned in a direction substantially perpendicularto the formation surface or the top surface of the CAAC-OS film.

On the other hand, when the CAAC-OS film is analyzed by an in-planemethod in which an X-ray enters a sample in a direction substantiallyperpendicular to the c-axis, a peak appears frequently when 2θ is around56°. This peak is derived from the (110) plane of the InGaZnO₄ crystal.Here, analysis (ϕ scan) is performed under conditions where the sampleis rotated around a normal vector of a sample surface as an axis (ϕaxis) with 2θ fixed at around 56°. In the case where the sample is asingle-crystal oxide semiconductor film of InGaZnO₄, six peaks appear.The six peaks are derived from crystal planes equivalent to the (110)plane. On the other hand, in the case of a CAAC-OS film, a peak is notclearly observed even when ϕ scan is performed with 2θ fixed at around56°.

According to the above results, in the CAAC-OS film having c-axisalignment, while the directions of a-axes and b-axes are differentbetween crystal parts, the c-axes are aligned in a direction parallel toa normal vector of a formation surface or a normal vector of a topsurface. Thus, each metal atom layer arranged in a layered mannerobserved in the cross-sectional TEM image corresponds to a planeparallel to the a-b plane of the crystal.

Note that the crystal part is formed concurrently with deposition of theCAAC-OS film or is formed through crystallization treatment such as heattreatment. As described above, the c-axis of the crystal is aligned witha direction parallel to a normal vector of a formation surface or anormal vector of a top surface. Thus, for example, in the case where ashape of the CAAC-OS film is changed by etching or the like, the c-axismight not be necessarily parallel to a normal vector of a formationsurface or a normal vector of a top surface of the CAAC-OS film.

Further, the degree of crystallinity in the CAAC-OS film is notnecessarily uniform. For example, in the case where crystal growthleading to the CAAC-OS film occurs from the vicinity of the top surfaceof the film, the degree of the crystallinity in the vicinity of the topsurface is higher than that in the vicinity of the formation surface insome cases. Further, when an impurity is added to the CAAC-OS film, thecrystallinity in a region to which the impurity is added is changed, andthe degree of crystallinity in the CAAC-OS film varies depends onregions.

Note that when the CAAC-OS film with an InGaZnO₄ crystal is analyzed byan out-of-plane method, a peak of 2θ may also be observed at around 36°,in addition to the peak of 2θ at around 31°. The peak of 2θ at around36° indicates that a crystal having no c-axis alignment is included inpart of the CAAC-OS film. It is preferable that in the CAAC-OS film, apeak of 2θ appear at around 31° and a peak of 2θ do not appear at around36°.

With the use of the CAAC-OS film in a transistor, change in electriccharacteristics of the transistor due to irradiation with visible lightor ultraviolet light is small. Thus, the transistor has highreliability.

Note that an oxide semiconductor film may be a stacked film includingtwo or more films of an amorphous oxide semiconductor film, amicrocrystalline oxide semiconductor film, and a CAAC-OS film, forexample.

In this specification, a term “parallel” indicates that the angle formedbetween two straight lines is greater than or equal to −10° and lessthan or equal to 10°, and accordingly also includes the case where theangle is greater than or equal to −5° and less than or equal to 5°. Inaddition, a term “perpendicular” indicates that the angle formed betweentwo straight lines is greater than or equal to 80° and less than orequal to 100°, and accordingly includes the case where the angle isgreater than or equal to 85° and less than or equal to 95°.

In this specification, the trigonal and rhombohedral crystal systems areincluded in the hexagonal crystal system.

A CAAC-OS film can be deposited by a sputtering method using apolycrystalline oxide semiconductor sputtering target, for example. Whenions collide with the sputtering target, a crystal region included inthe sputtering target might be separated from the target along an a-bplane; in other words, a sputtered particle having a plane parallel toan a-b plane (flat-plate-like sputtered particle or pellet-likesputtered particle) might be separated from the sputtering target. Inthat case, the flat-plate-like sputtered particle reaches a substratewhile maintaining their crystal state, whereby the CAAC-OS film can beformed.

For the deposition of the CAAC-OS film, the following conditions arepreferably used.

By reducing the amount of impurities entering the CAAC-OS film duringthe deposition, the crystal state can be prevented from being broken bythe impurities. For example, impurities (e.g., hydrogen, water, carbondioxide, or nitrogen) which exist in the deposition chamber may bereduced. Furthermore, impurities in a deposition gas may be reduced.Specifically, a deposition gas whose dew point is −80° C. or lower,preferably −100° C. or lower is used.

By increasing the substrate heating temperature during the deposition,migration of a sputtered particle is likely to occur after the sputteredparticle reaches a substrate surface. Specifically, the substrateheating temperature during the deposition is higher than or equal to100° C. and lower than or equal to 740° C., preferably higher than orequal to 200° C. and lower than or equal to 500° C. By increasing thesubstrate heating temperature during the deposition, when theflat-plate-like sputtered particle reaches the substrate, migrationoccurs on the substrate surface, so that a flat plane of theflat-plate-like sputtered particle is attached to the substrate.

Furthermore, it is preferable that the proportion of oxygen in thedeposition gas be increased and the power be optimized in order toreduce plasma damage at the deposition. The proportion of oxygen in thedeposition gas is 30 vol % or higher, preferably 100 vol %.

As an example of the sputtering target, an In—Ga—Zn—O compound target isdescribed below.

The In—Ga—Zn—O compound target, which is polycrystalline, is made bymixing InO_(X) powder, GaO_(Y) powder, and ZnO_(Z) powder in apredetermined molar ratio, applying pressure, and performing heattreatment at a temperature higher than or equal to 1000° C. and lowerthan or equal to 1500° C. Note that X, Y, and Z are each a givenpositive number. The kinds of powder and the molar ratio for mixingpowder may be determined as appropriate depending on the desiredsputtering target.

Here, Table 1 shows comparison between oxide semiconductors (representedby OS) having crystal structures and silicon semiconductors (representedby Si) having crystal structures.

TABLE 1 amorphous microcrystal polycrystal continuous crystal singlecrystal OS a-OS nc-OS polycrystalline OS CAAC-OS single crystal OSa-OS:H μc-OS nanobeam halo spot spot spot spot electron and/ordiffraction ring crystal part — nm~μm discontinuous continuous — DOShigh relatively low — low extremely low density low middle — high — Sia-Si nc-Si polycrystalline Si continuous grain silicon single crystal Sia-Si:H μc-Si

As shown in Table 1, examples of crystal states of oxide semiconductorsinclude an amorphous oxide semiconductor (a-OS and a-OS:H), amicrocrystalline oxide semiconductor (nc-OS and μc-OS), apolycrystalline oxide semiconductor (polycrystalline OS), a continuouscrystal oxide semiconductor (CAAC-OS), and a single crystal oxidesemiconductor (single crystal OS). Note that examples of the crystalstate of silicon include, as shown in Table 1, amorphous silicon (a-Siand a-Si:H), microcrystalline silicon (nc-Si and μc-Si), polycrystallinesilicon (polycrystalline Si), continuous crystal silicon (continuousgrain (CG) silicon), and single crystal silicon (single crystal Si).

When the oxide semiconductors in the above crystal states are subjectedto electron diffraction (nanobeam electron diffraction) using anelectron beam whose diameter is reduced to less than or equal to 10 nmϕ,the following electron diffraction patterns (nanobeam electrondiffraction patterns) can be observed. A halo pattern (also referred toas a halo ring or a halo) is observed in the amorphous oxidesemiconductor. Spots and/or a ring pattern are/is observed in themicrocrystalline oxide semiconductor. Spots are observed in thepolycrystalline oxide semiconductor. Spots are observed in thecontinuous crystal oxide semiconductor. Spots are observed in the singlecrystal oxide semiconductor.

According to the nanobeam electron diffraction pattern, a crystal partin the microcrystalline oxide semiconductor has a diameter of nanometerorder (nm) to micrometer order (μm). The polycrystalline oxidesemiconductor has discontinuous grain boundaries between crystal parts.No boundary is observed between crystal parts in the continuous crystaloxide semiconductor and the crystal parts are connected continuously.

The density of the oxide semiconductor in each crystal state isdescribed. The amorphous oxide semiconductor has a low density. Themicrocrystalline oxide semiconductor has a medium density. Thecontinuous crystal oxide semiconductor has a high density. That is, thedensity of the continuous crystal oxide semiconductor is higher thanthat of the microcrystalline oxide semiconductor, and the density of themicrocrystalline oxide semiconductor is higher than that of theamorphous oxide semiconductor.

A feature of density of states (DOS) existing in the oxide semiconductorin each crystal state is described. The DOS of the amorphous oxidesemiconductor is high. The DOS of the microcrystalline oxidesemiconductor is relatively low. The DOS of the continuous crystal oxidesemiconductor is low. The DOS of the single crystal oxide semiconductoris extremely low. That is, the DOS of the single crystal oxidesemiconductor is lower than that of the continuous crystal oxidesemiconductor, the DOS of the continuous crystal oxide semiconductor islower than that of the microcrystalline oxide semiconductor, and the DOSof the microcrystalline oxide semiconductor is lower than that of theamorphous oxide semiconductor.

Next, first heat treatment is preferably performed. The first heattreatment may be performed at a temperature higher than or equal to 250°C. and lower than or equal to 650° C., preferably higher than or equalto 300° C. and lower than or equal to 500° C., in an inert gasatmosphere, an atmosphere containing an oxidizing gas at 10 ppm or more,or a reduced pressure state. Alternatively, the first heat treatment maybe performed in such a manner that heat treatment is performed in aninert gas atmosphere, and then another heat treatment is performed in anatmosphere containing an oxidizing gas at 10 ppm or more in order tocompensate desorbed oxygen. The first heat treatment can increase thecrystallinity of the oxide semiconductor film 104 b and removeimpurities such as water and hydrogen from the base insulating film 102,the oxide film 104 a, and the oxide film 104 c. Note that the first heattreatment may be performed before the etching for forming the multilayerfilm 104.

Next, a conductive film 106 to be the source electrode and the drainelectrode is formed over the multilayer film 104. In this embodiment, aconductive material which is more likely to be bonded to oxygen than toa metal element contained in the oxide semiconductor film is used as amaterial of the conductive film 106. Since the material of theconductive film 106 is the conductive material which is likely to bebonded to oxygen, oxygen in the multilayer film 104 is bonded to theconductive material (the conductive film 106). The bonding causes oxygenvacancy in the multilayer film 104 in the vicinity of the interface withthe conductive film 106. Further, damage (oxygen vacancy) to the topsurface of the multilayer film 104 is caused when the conductive film106 is formed over the multilayer film 104. By the oxygen vacancy, alow-resistance region 105 is formed in a self-aligned manner (see FIG.8B). In this embodiment, the low-resistance region 105 exists in aregion at a depth of greater than 0 nm and less than or equal to 15 nm,preferably less than 10 nm, further preferably less than 3 nm from theinterface between the multilayer film 104 including the oxidesemiconductor film and the conductive film 106 in the depth direction ofthe multilayer film 104.

Although the boundary between the low-resistance region 105 and themultilayer film 104 exists in the oxide film 104 c in this embodiment,this embodiment is not limited thereto; the boundary may exist in theoxide film 104 a, in the oxide semiconductor film 104 b, at theinterface between the oxide film 104 a and the oxide semiconductor film104 b, or at the interface between the oxide semiconductor film 104 band the oxide film 104 c.

For the conductive film 106, Al, Cr, Cu, Ta, Ti, Mo, W, or an alloymaterial containing any of these as a main component can be used. Forexample, a 100-nm-thick tungsten film is formed by a sputtering methodor the like.

When the low-resistance region 105 is formed, contact resistance betweenthe source electrode or the drain electrode to be formed later and themultilayer film 104 can be reduced, so that high speed operation of thetransistor 150 can be achieved.

Next, the conductive film 106 is etched so as to be separated over themultilayer film 104, so that the source electrode 106 a and the drainelectrode 106 b are formed (see FIG. 8C). The edge portions of thesource electrode 106 a and the drain electrode 106 b are formed to havea step as shown in the drawings. The end portions can be formed in sucha manner that a step of making a resist mask recede by ashing and anetching step are alternately performed plural times.

Note that the low-resistance region 105 a and the low-resistance region105 b exist below the source electrode 106 a and the drain electrode 106b, respectively, and an oxide semiconductor film between thelow-resistance region 105 a and the low-resistance region 105 bcorresponds to the region 105 c.

Further, the step of making the resist mask recede by ashing and theetching step are alternately performed, whereby the edge portions of thesource electrode 106 a and the drain electrode 106 b are provided overthe low-resistance region 105 a and the low-resistance region 105 b.

Therefore, the channel formation region of the transistor 150corresponds to the region 105 c, a region of the low-resistance region105 a which is not in contact with the source electrode 106 a, and aregion of the low-resistance region 105 b which is not in contact withthe drain electrode 106 b. The channel formation region of thetransistor 150 is an n-type region; therefore, it is necessary to reducethe impurity concentration of the multilayer film 104 so that thechannel formation region is highly purified to be intrinsic.

Note that at the time of etching the conductive film 106 to be separatedover the multilayer film 104, part of the oxide film 104 c might beetched and the thickness of the multilayer film in the channel formationregion might be reduced.

Next, the gate insulating film 108 is formed over the multilayer film104, the source electrode 106 a, and the drain electrode 106 b. Afterthat, oxygen 120 is added to the region 105 c of the multilayer film 104(see FIG. 9A).

The gate insulating film 108 can be formed using aluminum oxide,magnesium oxide, silicon oxide, silicon oxynitride, silicon nitrideoxide, silicon nitride, gallium oxide, germanium oxide, yttrium oxide,zirconium oxide, lanthanum oxide, neodymium oxide, hafnium oxide,tantalum oxide, or the like. The gate insulating film 108 may be a stackof any of the above materials. The gate insulating film 108 can beformed by a sputtering method, a CVD method, an MOCVD method, an MBEmethod, an ALD method, a PLD method, or the like.

It is preferable that the gate insulating film 108 contain aluminumoxide because gettering of hydrogen contained in the multilayer film isperformed owing to the aluminum oxide so that the hydrogen in themultilayer film is reduced. Further, it is preferable that an oxideinsulating film containing excess oxygen be formed over the aluminumoxide. With such a structure, the hydrogen in the multilayer film isreduced owing to the aluminum oxide and oxygen can be supplied to themultilayer film by the oxide insulating film.

Further, the gate insulating film 108 may be a stack of an oxideinsulating film containing excess oxygen and a barrier film. Siliconnitride or aluminum oxide can be used for the barrier film.

It is preferable that the gate insulating film 108 contain highly purehafnium oxide because leakage current can be reduced.

Oxygen can be added to the region 105 c of the multilayer film 104 by anion doping method or an ion implantation method. Alternatively, as amethod for adding oxygen, a plasma immersion ion implantation method maybe used. By a plasma immersion ion implantation method, oxygen can beadded efficiently even when the region 105 c has an uneven shape.Alternatively, oxygen can be added by a method other than an ion dopingmethod, an ion implantation method, or the like. For example, oxygen canbe added in such a manner that plasma is generated in an oxygenatmosphere and then the region 105 c is subjected to plasma treatment inthe oxygen atmosphere. As an apparatus for generating plasma, a dryetching apparatus, a plasma CVD apparatus, a high-density plasma CVDapparatus, or the like can be used.

The oxygen 120 added to the region 105 c is one or more of an oxygenradial, an oxygen atom, and an oxygen ion. Further, the oxygen 120 maybe added to at least part of the region 105 c, typically any of asurface of the region 105 c, the region 105 c, and the interface betweenthe region 105 c and the oxide film 104 c.

In the case where oxygen is added to the region 105 c by an ion dopingmethod or an ion implantation method, the amount of oxygen added to theregion 105 c is larger than or equal to 5×10¹⁹/cm³ and smaller than orequal to 5×10²¹/cm³. In this case, when the oxygen 120 has high energy,the region 105 c is damaged and physical defects are caused. Therefore,the oxygen 120 preferably has such energy which does not cause damage onthe multilayer film. The region 105 c includes a region in which anoxygen content increases from the surface toward the depth direction ofthe oxide semiconductor film.

The whole low-resistance region 105 a does not necessarily overlap withthe source electrode and may include a region which extends to theregion 105 c side and does not overlap with the source electrode.Further, the whole low-resistance region 105 b does not necessarilyoverlap with the drain electrode and may include a region which extendsto the region 105 c side and does not overlap with the drain electrode.The low-resistance region 105 a and the low-resistance region 105 b donot necessarily have uniform thickness. For example, the end portion ofthe low-resistance region 105 a which does not overlap with the sourceelectrode may gently spread from the bottom surface toward the surfaceof the low-resistance region 105 a. In a similar manner, for example,the end portion of the low-resistance region 105 b which does notoverlap with the drain electrode may gently spread from the bottomsurface toward the surface of the low-resistance region 105 b. Adifference between the length between the source electrode 106 a and thedrain electrode 106 b and the length between the low-resistance region105 a and the low-resistance region 105 b is less than 30%, preferablyless than 10%, further preferably less than 3% of the length between thesource electrode 106 a and the drain electrode 106 b.

In the above structure, the region 105 c has higher resistance than thelow-resistance region and functions as the channel formation region.Further, the amount of oxygen vacancy in the region 105 c can bereduced, a highly purified intrinsic region can be formed. Accordingly,the highly purified intrinsic region and the low-resistance regions canbe formed separately at one time. Note that the hydrogen concentrationof the region 105 c functioning as the channel formation region is lowerthan or equal to 5×10¹⁷ atoms/cm³, preferably lower than or equal to1×10¹⁷ atoms/cm³.

Although the oxygen 120 is added to the region 105 c of the multilayerfilm 104 after the gate insulating film 108 is formed in thisembodiment, this embodiment is not limited thereto; the oxygen 120 maybe added after the source electrode 106 a and the drain electrode 106 bare formed, and then the gate insulating film 108 may be formed.

Next, second heat treatment is preferably performed. The second heattreatment can be performed in a similar condition to the first heattreatment. By the second heat treatment, impurities such as hydrogen andwater can be further removed from the multilayer film 104.

Next, the gate electrode 110 is formed over the gate insulating film 108(see FIG. 9B).

For the gate electrode 110, Al, Ti, Cr, Co, Ni, Cu, Y, Zr, Mo, Ru, Ag,Ta, W, or an alloy material containing any of these as a main componentcan be used. The gate electrode 110 can be formed by a sputtering methodor the like.

Through the above process, the transistor 150 illustrated in FIGS. 1A to1C can be manufactured.

The oxide insulating film 112 may be formed over the gate insulatingfilm 108 and the gate electrode 110 (see FIG. 9C).

The oxide insulating film 112 can be formed using a material and amethod which are similar to those of the base insulating film 102. Theoxide insulating film 112 may be formed using aluminum oxide, magnesiumoxide, silicon oxide, silicon oxynitride, gallium oxide, germaniumoxide, yttrium oxide, zirconium oxide, lanthanum oxide, neodymium oxide,hafnium oxide, tantalum oxide, or an oxide insulating film containingnitrogen. The oxide insulating film 112 can be formed by a sputteringmethod, a CVD method, an MBE method, an ALD method, or a PLD method, andis preferably formed to contain excess oxygen so as to be able to supplyoxygen to the multilayer film 104 (the oxide semiconductor film 104 b).

The oxide insulating film 112 is preferably a stack of a first oxideinsulating film and a second oxide insulating film. As the first oxideinsulating film, a first silicon oxide film is deposited. The firstsilicon oxide film is preferably formed by a plasma CVD method which isone type of CVD method. Specifically, the first silicon oxide film maybe formed by supplying high-frequency power to an electrode under thefollowing conditions: the substrate temperature is higher than or equalto 180° C. and lower than or equal to 400° C., preferably higher than orequal to 200° C. and lower than or equal to 370° C., a deposition gascontaining silicon and an oxidizing gas are used, and the pressure ishigher than or equal to 20 Pa and lower than or equal to 250 Pa,preferably higher than or equal to 40 Pa and lower than or equal to 200Pa. Note that typical examples of the deposition gas containing siliconinclude silane, disilane, trisilane, and silane fluoride. Examples ofthe oxidization gas include oxygen, ozone, nitrous oxide, and nitrogendioxide.

By setting the flow rate of the oxidation gas to 100 times or more theflow rate of the deposition gas containing silicon, the hydrogen contentin the first silicon oxide film can be reduced and dangling bonds can bereduced.

Next, a second silicon oxide film is deposited as the second oxideinsulating film. The second silicon oxide film is preferably formed by aplasma CVD method. Specifically, the second silicon oxide film may beformed by supplying high-frequency power higher than or equal to 0.17W/cm² and lower than or equal to 0.5 W/cm², preferably higher than orequal to 0.25 W/cm² and lower than or equal to 0.35 W/cm², to anelectrode under the following conditions: the substrate temperature ishigher than or equal to 160° C. and lower than or equal to 350° C.,preferably higher than or equal to 180° C. and lower than or equal to260° C., a deposition gas containing silicon and an oxidizing gas areused, and the pressure is higher than or equal to 100 Pa and lower thanor equal to 250 Pa, preferably higher than or equal to 100 Pa and lowerthan or equal to 200 Pa.

By the above-described method, the decomposition efficiency of the gasin plasma is enhanced, oxygen radicals are increased, and oxidation ofthe gas is promoted; thus, the silicon oxide film containing excessoxygen can be formed as the second silicon oxide film.

Oxygen may be added to the oxide insulating film 112 by an ionimplantation method, an ion doping method, a plasma immersion ionimplantation method, or the like. By addition of oxygen, the oxideinsulating film 112 can supply oxygen much easily to the multilayer film104.

Further, the nitride insulating film 114 may be provided over the oxideinsulating film 112. The nitride insulating film 114 can prevent oxygenin the oxide insulating film 112 from diffusing to the outside at thetime of heat treatment and functions as a barrier film which preventshydrogen or a compound containing hydrogen (e.g., water) from enteringthe oxide semiconductor film 104 b from the outside. Accordingly, thereliability of the transistor can be improved.

The nitride insulating film is preferably a stack of a first nitrideinsulating film and a second nitride insulating film. A silicon nitridefilm is deposited as the first nitride insulating film. The firstsilicon nitride film is preferably formed by a plasma CVD method.Specifically, the first silicon nitride film may be formed by supplyinghigh-frequency power under the following conditions: the substratetemperature is higher than or equal to 180° C. and lower than or equalto 400° C., preferably higher than or equal to 200° C. and lower than orequal to 370° C., a deposition gas containing silicon, a nitrogen gas,and an ammonia gas are used, and the pressure is higher than or equal to20 Pa and lower than or equal to 250 Pa, preferably higher than or equalto 40 Pa and lower than or equal to 200 Pa.

Note that the flow rate of the nitrogen gas is set to 5 times or moreand 50 times or less, preferably 10 times or more and 50 times or lessthe flow rate of the ammonia gas. The use of ammonia gas can promotedecomposition of the deposition gas containing silicon and the nitrogengas. This is because the ammonia gas is dissociated by plasma energy orheat energy, and energy generated by the dissociation contributes todecomposition of a bond of the deposition gas containing silicon and abond of the nitrogen gas.

Next, a second silicon nitride film is deposited as the second nitrideinsulating film. The second silicon nitride film is preferably depositedby a sputtering method. Specifically, the second silicon nitride filmmay be formed under conditions where the substrate temperature is higherthan or equal to 300° C. and lower than or equal to 400° C., a silicontarget is used as a sputtering target, an argon gas and a nitrogen gasare used, the pressure in a reaction chamber is less than or equal to0.5 Pa, preferably greater than or equal to 0.1 Pa and less than orequal to 0.3 Pa, and a high frequency power is supplied.

Through the above method, a silicon nitride film from which the hydrogengas and the ammonia gas are less likely to be released and which can beapplied to the nitride insulating film can be formed. The siliconnitride film has low hydrogen content, and thus is dense and does nottransmit or hardly transmit hydrogen, water, and oxygen.

Next, third heat treatment is preferably performed. The third heattreatment can be performed under a condition similar to that of thefirst heat treatment. In the case where the base insulating film 102 andthe oxide insulating film 112 contain excess oxygen, the excess oxygenis easily released from the base insulating film 102 and the oxideinsulating film 112 by the third heat treatment, so that oxygen vacancyin the multilayer film 104 can be reduced. Accordingly, the amount ofoxygen vacancy in the channel formation region of the multilayer film104 can be further reduced, so that the channel formation region becomeshighly purified intrinsic.

Further, although the treatment for adding the oxygen 120 to the region105 c of the multilayer film 104 is performed just after the sourceelectrode 106 a and the drain electrode 106 b are formed in thisembodiment, this embodiment is not limited thereto; the treatment may beperformed after the gate insulating film 108 is formed, whereby oxygenmay be supplied from the gate insulating film 108 to the region 105 c ofthe multilayer film 104.

This embodiment can be combined as appropriate with any of the otherembodiments in this specification.

Embodiment 3

In this embodiment, a transistor having a structure different from thatof the transistor described in Embodiment 1 is described.

FIGS. 10A to 10C are a top view and cross-sectional views of atransistor of one embodiment of the present invention. FIG. 10A is a topview, and a cross section taken along a dashed-dotted line B1-B2 and adashed-dotted line B3-B4 in FIG. 10A is illustrated in FIG. 10B. FIG.10C is an enlarged view of a region surrounded by a dashed-line circlein FIG. 10B. Note that for simplification of the drawing, somecomponents in the top view in FIG. 10A are not illustrated.

A transistor 250 illustrated in FIGS. 10A to 10C includes: the gateelectrode 110 over the substrate 100; the gate insulating film 108 overthe gate electrode 110; the multilayer film 104 over the gate insulatingfilm 108; the low-resistance region 105 a and the low-resistance region105 b over the multilayer film 104; the source electrode 106 a over thelow-resistance region 105 a; the drain electrode 106 b over thelow-resistance region 105 b; and the oxide insulating film 112 over themultilayer film 104, the source electrode 106 a, and the drain electrode106 b. Further, another insulating film (e.g., the nitride insulatingfilm 114) may be provided over the oxide insulating film 112.

The transistor 250 in FIGS. 10A to 10C is the same as the transistor 150in FIGS. 1A to 1C except for the positions of the gate electrode 110 andthe gate insulating film 108. Further, like the transistor 150 describedin Embodiment 1, the transistor 250 includes the low-resistance region105 a and the low-resistance region 105 b.

The multilayer film 104 has a structure in which an oxide film 104 a, anoxide semiconductor film 104 b, and an oxide film 104 c are stacked fromthe substrate 100 side.

Depending on materials used for the oxide film 104 a, the oxidesemiconductor film 104 b, and the oxide film 104 c, boundaries betweenthe oxide film 104 a and the oxide semiconductor film 104 b and betweenthe oxide semiconductor film 104 b and the oxide film 104 c in themultilayer film 104 cannot be clearly recognized in some cases. Thus,the boundaries of the oxide film 104 a, the oxide semiconductor film 104b, and the oxide film 104 c are denoted by dotted lines in the drawings.

A material of a conductive film to be the source electrode and the drainelectrode is a conductive material which is more likely to be bonded tooxygen than to a metal element included in the oxide semiconductor film;therefore, oxygen in the multilayer film 104 is bonded to the conductivematerial of a conductive film to be the source electrode and the drainelectrode. The bonding causes oxygen vacancy in a region of themultilayer film 104 in the vicinity of an interface with the conductivefilm. Alternatively, damage (oxygen vacancy) to the top surface of themultilayer film 104 is caused when the conductive film to be formed overthe multilayer film 104 is formed. Regions whose resistances are reducedowing to the oxygen vacancy and hydrogen, i.e., the low-resistanceregion 105 a and the low-resistance region 105 b are formed, so thatcontact resistance between the multilayer film and the source electrodeor the drain electrode is reduced. Also in the case where the materialof the conductive film is a conductive material which is easily diffusedinto the oxide semiconductor film by heat treatment, the low-resistanceregions are formed. Although boundaries between the multilayer film 104and each of the low-resistance region 105 a and the low-resistanceregion 105 b exist in the oxide film 104 c, this embodiment is notlimited thereto; the boundaries may exist in the oxide film 104 a, inthe oxide semiconductor film 104 b, at the interface between the oxidefilm 104 a and the oxide semiconductor film 104 b, or at the interfacebetween the oxide semiconductor film 104 b and the oxide film 104 c.

The source electrode 106 a and the drain electrode 106 b are formed soas to have a step-like edge portion. The end portions can be formed insuch a manner that a step of making a resist mask recede by ashing andan etching step are alternately performed plural times. Therefore, theedge portions of the source electrode 106 a and the drain electrode 106b are provided over the low-resistance region 105 a and thelow-resistance region 105 b, respectively.

Accordingly, a channel formation region of the transistor 250corresponds to a region 105 c of the multilayer film 104 between thelow-resistance region 105 a and the low-resistance region 105 b, aregion of the low-resistance region 105 a which is not in contact withthe source electrode 106 a, and a region of the low-resistance region105 b which is not in contact with the drain electrode 106 b. Thechannel formation region of the transistor 250 is made to be an n-type;therefore, it is necessary that the impurity concentration of themultilayer film 104 is reduced so that the multilayer film is highlypurified to be intrinsic.

In order that the channel formation region of the transistor 250 ishighly purified to be intrinsic, oxygen is added to the region 105 c ofthe multilayer film 104. The addition of oxygen can reduces the amountof oxygen vacancy, so that a highly purified intrinsic region can beformed. Accordingly, the highly purified intrinsic region and the lowresistance regions can be formed separately at one time.

Further, excess oxygen can be easily released from the base insulatingfilm 102, the gate insulating film 108, and the oxide insulating film112 by heat treatment, so that the oxygen vacancy in the multilayer film104 can be reduced. Thus, the amount of oxygen vacancy in the channelformation region of the multilayer film 104 is further reduced, so thatthe channel formation region is highly purified intrinsic.

FIG. 11A illustrates another transistor structure. A transistor 290illustrated in FIG. 11A includes the gate electrode 110 over thesubstrate 100; the gate insulating film 108 over the gate electrode 110;the oxide film 104 a over the gate insulating film 108; the oxidesemiconductor film 104 b over the oxide film 104 a; the source electrode106 a and the drain electrode 106 b over the oxide semiconductor film104 b; the oxide film 104 c over the source electrode 106 a and thedrain electrode 106 b; the low-resistance region 105 a which is formedin such a manner that oxygen is extracted from the oxide semiconductorfilm 104 b which is in contact with the source electrode 106 a; thelow-resistance region 105 b which is formed in such a manner that oxygenis extracted from the oxide semiconductor film 104 b which is in contactwith the drain electrode 106 b; and the oxide insulating film 112 overthe oxide film 104 c, the source electrode 106 a, and the drainelectrode 106 b. Further, another insulating film (e.g., the nitrideinsulating film 114) may be formed over the oxide insulating film 112.

The transistor 290 in FIG. 11A is the same as the transistor 250 inFIGS. 10A to 10C except that the oxide film 104 c is provided over thesource electrode 106 a and the drain electrode 106 b. Like thetransistor 150 described in Embodiment 1, the transistor 290 includesthe low-resistance region 105 a and the low-resistance region 105 b.

An In—Ga—Zn oxide having an atomic ratio of In:Ga:Zn=1:1:1 can be usedfor the oxide film 104 a, an In—Ga—Zn oxide having an atomic ratio ofIn:Ga:Zn=1:3:2 can be used for the oxide semiconductor film 104 b, andan In—Ga—Zn oxide having an atomic ratio of In:Ga:Zn=1:1:1 can be usedfor the oxide film 104 c.

In the transistor 290, the oxide semiconductor film 104 b in which thechannel is formed is in contact with the source electrode 106 a and thedrain electrode 106 b, so that oxygen vacancy is generated at a highdensity in the oxide semiconductor film 104 b and n-type regions (thelow-resistance region 105 a and the low-resistance region 105 b) areformed. Therefore, there is a few resistance component in a carrier pathand carriers can be transported efficiently.

Further, the oxide film 104 c is formed after the source electrode 106 aand the drain electrode 106 b are formed; therefore, overetching of theoxide film 104 c does not occur at the time of forming the sourceelectrode 106 a and the drain electrode 106 b. Therefore, the oxidesemiconductor film 104 b where the channel is formed can be sufficientlydistant from the oxide insulating film 112, and the effect ofsuppressing influence of diffusion of impurities from the interface canbe enhanced.

Further, the oxide film 104 c functions as a barrier film whichsuppresses entry of hydrogen or a compound containing hydrogen (e.g.,water) from the outside to the multilayer film 104; thus, thereliability of the transistor can be improved. Therefore, the nitrideinsulating film 114 is not necessarily provided.

Further, when the source electrode 106 a and the drain electrode 106 bare formed using a conductive material which is likely to be bonded tooxygen, as in a transistor 295 illustrated in FIG. 11B, low-resistanceregions are also formed in the oxide film 104 c in contact with thesource electrode 106 a and the drain electrode 106 b.

Further, as in a transistor 300 illustrated in FIG. 11C, a structure inwhich the end portion of the oxide film 104 a and the end portion of theoxide semiconductor film 104 b are not continuous may be employed. Theshapes of the edge portions are formed in such a manner that a stack ofthe oxide film 104 a and the oxide semiconductor film 104 b iswet-etched under conditions where the etching rate of the oxidesemiconductor film 104 b is higher than that of the oxide film 104 a.

The contact area of the source electrode 106 a and the drain electrode106 b can be large when the multilayer film 104 has such a taperedshape. Accordingly, the contact resistance between the multilayer film104 and the source and drain electrodes 106 a and 106 b is reduced,whereby on-state current of the transistor can be increased.

Like in a transistor 310 illustrated in FIG. 12A, after the oxide film104 a, the oxide semiconductor film 104 b, and the oxide film 104 c areformed in this order over the gate insulating film 108, the sourceelectrode 106 a and the drain electrode 106 b may be formed and then anoxide film 104 e may be formed over the source electrode 106 a and thedrain electrode 106 b. An In—Ga—Zn oxide having an atomic ratio ofIn:Ga:Zn=1:3:2 can be used for the oxide film 104 e.

Further, FIG. 12B illustrates another transistor structure. A transistor320 illustrated in FIG. 12B is the same as the transistor 250 in FIGS.10A to 10C except that a conductive film 107 a and a conductive film 107b are formed over the source electrode 106 a and the drain electrode 106b. Like the transistor 150 described in Embodiment 1, the transistor 320includes the low-resistance region 105 a and the low-resistance region105 b.

Note that the conductive film 107 a and the conductive film 107 bfunction as part of the source electrode and part of the drainelectrode. Thus, in the transistor 320 in FIG. 12B, a channel lengthcorresponds to a distance between the conductive film 107 a and theconductive film 107 b.

Further, in the transistor 320 in FIG. 12B, a channel corresponds to aregion of the oxide semiconductor film 104 b which does not overlap withthe conductive film 107 a and the conductive film 107 b.

Furthermore, in the transistor 320 in FIG. 12B, a channel formationregion corresponds to regions of the oxide film 104 a, the oxidesemiconductor film 104 b, and the oxide film 104 c which do not overlapwith the conductive film 107 a and the conductive film 107 b.

After the conductive film 107 a and the conductive film 107 b areformed, oxygen is added to the region 105 c of the multilayer film 104,whereby the amount of oxygen vacancy in the channel formation region canbe reduced and a highly purified intrinsic region can be formed.Accordingly, the highly purified intrinsic region and the low-resistanceregions can be formed separately at one time.

The above embodiment can be referred to for the conductive film 107 aand the conductive film 107 b.

When the conductive film 107 a and the conductive film 107 b are formedin such a manner that a conductive film is processed by light exposurewith an electron beam, ArF immersion, EUV, with the use of a resist maskwith a small pattern width, the channel length can be greater than orequal to 1 nm and less than or equal to 30 nm.

FIG. 13A illustrates another transistor structure. A transistor 330 hasa structure of the transistor 290 in FIG. 11A which further includes theconductive film 107 a and the conductive film 107 b over the oxide film104 c.

Alternatively, a structure of a transistor 340 illustrated in FIG. 13Bmay be employed. The transistor 340 is formed by a formation process ofthe transistor 330 in FIG. 13A in which the formation process of theoxide film 104 c and the formation process of the conductive film 107 aand the conductive film 107 b are reversed.

The above is the description of the transistors of one embodiment of thepresent invention. The amount of oxygen vacancy in the channel formationregion of the oxide semiconductor in the multilayer film in any of thetransistors can be reduced and the electrical characteristics of any ofthe transistors are favorable; therefore, it is possible to provide ahighly reliable semiconductor device.

This embodiment can be combined as appropriate with any of the otherembodiments in this specification.

Embodiment 4

In this embodiment, a method for manufacturing the transistor 250described in Embodiment 3 with reference to FIGS. 10A to 10C isdescribed.

First, the gate electrode 110 is formed over the substrate 100, and thegate insulating film 108 is formed to cover the gate electrode 110 (seeFIG. 14A).

The above embodiment can be referred to for the substrate 100, the gateelectrode 110, and the gate insulating film 108.

The gate insulating film 108 is preferably an insulating film containingexcess oxygen.

A base insulating film may be formed over the substrate 100. The baseinsulating film 102 in the above embodiment can be referred to for thebase insulating film.

Next, the multilayer film 104 including the oxide film 104 a, the oxidesemiconductor film 104 b, and the oxide film 104 c is formed over thegate insulating film 108 (see FIG. 14B).

The above embodiment can be referred to for the multilayer film 104.

Next, first heat treatment is preferably performed. The first heattreatment may be performed at a temperature higher than or equal to 250°C. and lower than or equal to 650° C., preferably higher than or equalto 300° C. and lower than or equal to 500° C., in an inert gasatmosphere, an atmosphere containing an oxidizing gas at 10 ppm or more,or a reduced pressure state. Alternatively, the first heat treatment maybe performed in such a manner that heat treatment is performed in aninert gas atmosphere, and then another heat treatment is performed in anatmosphere containing an oxidizing gas at 10 ppm or more in order tocompensate desorbed oxygen. The first heat treatment can increase thecrystallinity of the oxide semiconductor film 104 b and removeimpurities such as water and hydrogen from the gate insulating film 108,the oxide film 104 a, and the oxide film 104 c. Note that the first heattreatment may be performed before the etching for forming the multilayerfilm 104.

Next, the conductive film 106 to be the source electrode and the drainelectrode is formed over the multilayer film 104. In this embodiment, aconductive material which is more likely to be bonded to oxygen than toa metal element contained in the oxide semiconductor film is used as amaterial of the conductive film 106. Since the material of theconductive film 106 is the conductive material which is likely to bebonded to oxygen, oxygen in the multilayer film 104 is bonded to theconductive material (the conductive film 106). The bonding causes oxygenvacancy in the multilayer film 104 in the vicinity of the interface withthe conductive film 106. Further, damage (oxygen vacancy) to the topsurface of the multilayer film 104 is caused when the conductive film106 is formed over the multilayer film 104. By the oxygen vacancy, thelow-resistance region 105 is formed (see FIG. 14C). In this embodiment,the low-resistance region 105 exists in a region at a depth of greaterthan 0 nm and less than or equal to 15 nm, preferably less than 10 nm,further preferably less than 3 nm from the interface between themultilayer film 104 including the oxide semiconductor film and theconductive film 106 in the depth direction of the multilayer film 104.

Although the boundary between the low-resistance region 105 and themultilayer film 104 exists in the oxide film 104 c in this embodiment,this embodiment is not limited thereto; the boundary may exist in theoxide film 104 a, in the oxide semiconductor film 104 b, at theinterface between the oxide film 104 a and the oxide semiconductor film104 b, or at the interface between the oxide semiconductor film 104 band the oxide film 104 c.

The above embodiment can be referred to for the conductive film 106.

When the low-resistance region 105 is formed, contact resistance betweenthe source electrode or the drain electrode to be formed later and themultilayer film 104 can be reduced, so that high speed operation of thetransistor 250 can be achieved.

Next, the conductive film 106 is etched so as to be separated over themultilayer film 104, so that the source electrode 106 a and the drainelectrode 106 b are formed (see FIG. 15A). The edge portions of thesource electrode 106 a and the drain electrode 106 b are formed to havea step as shown in the drawings. The end portions can be formed in sucha manner that a step of making a resist mask recede by ashing and anetching step are alternately performed plural times.

Note that the low-resistance region 105 a and the low-resistance region105 b exist below the source electrode 106 a and the drain electrode 106b, respectively, and an oxide film between the low-resistance region 105a and the low-resistance region 105 b corresponds to the region 105 c.

Further, the step of making the resist mask recede by ashing and theetching step are alternately performed, whereby the edge portions of thesource electrode 106 a and the drain electrode 106 b are provided overthe low-resistance region 105 a and the low-resistance region 105 b.

Therefore, the channel formation region of the transistor 250corresponds to the region 105 c, a region of the low-resistance region105 a which is not in contact with the source electrode 106 a, and aregion of the low-resistance region 105 b which is not in contact withthe drain electrode 106 b. The channel formation region of thetransistor 250 is an n-type region; therefore, it is necessary to reducethe impurity concentration of the multilayer film 104 so that thechannel formation region is highly purified to be intrinsic.

Note that at the time of etching the conductive film 106 to be separatedover the multilayer film 104, part of the oxide film 104 c might beetched and the thickness of the multilayer film in the channel formationregion might be reduced.

Next, the oxygen 120 is added to the region 105 c of the multilayer film104 (see FIG. 15B)

The above embodiment can be referred to for a method for adding oxygento the region 105 c of the multilayer film 104

The whole low-resistance region 105 a does not necessarily overlap withthe source electrode 106 a and may include a region which extends towardthe region 105 c and does not overlap with the source electrode 106 a.Further, the whole low-resistance region 105 b does not necessarilyoverlap with the drain electrode 106 b and may include a region whichextends toward the region 105 c and does not overlap with the drainelectrode 106 b. The low-resistance region 105 a and the low-resistanceregion 105 b do not necessarily have uniform thickness. For example, theend portion of the low-resistance region 105 a which does not overlapwith the source electrode 106 a may gently spread from the bottomsurface toward the surface of the low-resistance region 105 a. In asimilar manner, for example, the end portion of the low-resistanceregion 105 b which does not overlap with the drain electrode 106 b maygently spread from the bottom surface toward the surface of thelow-resistance region 105 b. A difference between the length between thesource electrode 106 a and the drain electrode 106 b and the lengthbetween the low-resistance region 105 a and the low-resistance region105 b is less than 30%, preferably less than 10%, further preferablyless than 3% of the length between the source electrode 106 a and thedrain electrode 106 b.

In the above structure, the region 105 c has higher resistance than thelow-resistance region and functions as the channel formation region.Further, the amount of oxygen vacancy in the region 105 c can bereduced, a highly purified intrinsic region can be formed. Accordingly,the highly purified intrinsic region and the low-resistance regions canbe formed separately at one time. Note that the hydrogen concentrationof the region 105 c functioning as the channel formation region is lowerthan or equal to 5×10¹⁷ atoms/cm³, preferably lower than or equal to1×10¹⁷ atoms/cm³.

Next, second heat treatment is preferably performed. The second heattreatment can be performed in a similar condition to the first heattreatment. By the second heat treatment, impurities such as hydrogen andwater can be further removed from the multilayer film 104.

Next, the oxide insulating film 112 is formed over the multilayer film104, the source electrode 106 a, and the drain electrode 106 b (see FIG.15C).

The above embodiment can be referred to for the oxide insulating film112. Further, the nitride insulating film 114 may be provided over theoxide insulating film 112. The nitride insulating film 114 can preventoxygen in the oxide insulating film 112 from diffusing to the outside atthe time of heat treatment and functions as a barrier film whichprevents hydrogen or a compound containing hydrogen (e.g., water) fromentering the multilayer film 104 from the outside. Accordingly, thereliability of the transistor can be improved.

Through the above process, the transistor 250 illustrated in FIGS. 10Ato 10C can be manufactured.

Next, third heat treatment is preferably performed. The third heattreatment can be performed under a condition similar to that of thefirst heat treatment. In the case where the gate insulating film 108 andthe oxide insulating film 112 contain excess oxygen, the excess oxygenis easily released from the gate insulating film 108 and the oxideinsulating film 112 by the third heat treatment, so that oxygen vacancyin the multilayer film 104 can be reduced. Accordingly, the amount ofoxygen vacancy in the channel formation region of the multilayer film104 can be further reduced, so that the channel formation region becomeshighly purified intrinsic.

Further, although the treatment for adding the oxygen 120 to the region105 c of the multilayer film 104 is performed just after the sourceelectrode 106 a and the drain electrode 106 b are formed in thisembodiment, this embodiment is not limited thereto; the treatment may beperformed after the gate insulating film 108 is formed, whereby oxygenmay be supplied from the gate insulating film 108 to the region 105 c ofthe multilayer film 104.

This embodiment can be combined as appropriate with any of the otherembodiments in this specification.

Embodiment 5

In this embodiment, an example of a semiconductor device (memory device)which includes a transistor of one embodiment of the present invention,which can retain stored data even when not powered, and which has anunlimited number of write cycles is described with reference todrawings.

FIG. 16A is a cross-sectional view of the semiconductor device, and FIG.16B is a circuit diagram of the semiconductor device.

The semiconductor device illustrated in FIGS. 16A and 16B includes atransistor 400 including a first semiconductor material in a lowerportion, and a transistor 402 including a second semiconductor materialand a capacitor 404 in an upper portion. As the transistor 402, any ofthe transistors described in the above embodiment can be used, and anexample in which the transistor 150 described in Embodiment 1 withreference to FIGS. 1A to 1C is applied to the transistor 402 isdescribed in this embodiment. One electrode of the capacitor 404 isformed using the same material as a gate electrode of the transistor402, the other electrode of the capacitor 404 is formed using the samematerial as a source electrode and a drain electrode of the transistor402, and a dielectric of the capacitor 404 is formed using the samematerial as a gate insulating film 108 of the transistor 402; thus, thecapacitor 404 can be formed at the same time as the transistor 402.

Here, the first semiconductor material and the second semiconductormaterial are preferably materials having different band gaps. Forexample, the first semiconductor material may be a semiconductormaterial (such as silicon) other than an oxide semiconductor, and thesecond semiconductor material may be the oxide semiconductor describedin Embodiment 1. A transistor including a material other than an oxidesemiconductor can operate at high speed easily. On the other hand, atransistor including an oxide semiconductor enables charge to be heldfor a long time owing to its electrical characteristics, that is, thelow off-state current.

Although both of the above transistors are n-channel transistors in thefollowing description, it is needless to say that p-channel transistorscan be used. The specific structure of the semiconductor device, such asthe material used for the semiconductor device and the structure of thesemiconductor device, is not necessarily limited to that described hereexcept for the use of the transistor described in the above embodiment,which is formed using an oxide semiconductor for storing data.

The transistor 400 in FIG. 16A includes a channel formation regionprovided in a substrate 410 including a semiconductor material (such ascrystalline silicon), impurity regions provided such that the channelformation region is provided therebetween, intermetallic compoundregions provided in contact with the impurity regions, a gate insulatingfilm provided over the channel formation region, and a gate electrodeprovided over the gate insulating film. Note that a transistor whosesource electrode and drain electrode are not illustrated in a drawingmay also be referred to as a transistor for the sake of convenience.Further, in such a case, in description of a connection of a transistor,a source region and a source electrode may be collectively referred toas a source electrode, and a drain region and a drain electrode may becollectively referred to as a drain electrode. That is, for example, inthis specification, the term “source electrode” might include a sourceregion.

Further, an element isolation insulating layer 406 is formed on thesubstrate 410 so as to surround the transistor 400, and an insulatingfilm 420 is formed so as to cover the transistor 400. Note that theelement isolation insulating layer 406 can be formed by an elementisolation technique such as local oxidation of silicon (LOCOS) orshallow trench isolation (STI).

For example, the transistor 400 formed using a crystalline siliconsubstrate can operate at high speed. Thus, when the transistor is usedas a reading transistor, data can be read at high speed. As treatmentprior to formation of the transistor 402 and the capacitor 404, CMPtreatment is performed on the insulating film 420 covering thetransistor 400, whereby the insulating film 420 is planarized and, atthe same time, an upper surface of the gate electrode of the transistor400 is exposed.

The transistor 402 is provided over the insulating film 420, and one ofthe source electrode and the drain electrode thereof is extended so asto function as the other electrode of the capacitor 404.

The transistor 402 in FIG. 16A is a top-gate transistor in which achannel is formed in an oxide semiconductor film. Since the off-statecurrent of the transistor 402 is low, stored data can be retained for along period owing to such a transistor. In other words, refreshoperation becomes unnecessary or the frequency of the refresh operationin a semiconductor memory device can be extremely low, which leads to asufficient reduction in power consumption.

In the transistor 402, low-resistance regions are formed in regions inthe vicinity of the interfaces of the multilayer film in contact withthe source electrode and the drain electrode, and the channel formationregion can be a highly purified intrinsic region by adding oxygen to themultilayer film using the source electrode and the drain electrode asmasks. By the addition of oxygen, the highly purified intrinsic regionand the low-resistance regions can be formed separately at one time. Theamount of oxygen vacancy in the channel formation region in themultilayer film in the transistor can be reduced and the electricalcharacteristics of the transistor are favorable; therefore, it ispossible to provide a highly reliable semiconductor device.

The transistor 400 and the transistor 402 can be formed so as to overlapwith each other as illustrated in FIG. 16A, whereby the area occupied bythem can be reduced. Accordingly, the degree of integration of thesemiconductor device can be increased.

An example of a circuit configuration corresponding to FIG. 16A isillustrated in FIG. 16B.

In FIG. 16B, a first wiring (1st Line) is electrically connected to asource electrode of the transistor 400. A second wiring (2nd Line) iselectrically connected to a drain electrode of the transistor 400. Athird wiring (3rd Line) is electrically connected to one of the sourceelectrode and the drain electrode of the transistor 402, and a fourthwiring (4th Line) is electrically connected to the gate electrode of thetransistor 402. The gate electrode of the transistor 400 and the one ofthe source electrode and the drain electrode of the transistor 402 areelectrically connected to the other electrode of the capacitor 404. Afifth wiring (5th Line) is electrically connected to the other electrodeof the capacitor 404.

The semiconductor device in FIG. 16B utilizes a characteristic in whichthe potential of the gate electrode of the transistor 400 can be held,and thus enables writing, storing, and reading of data as follows.

Writing and storing of data are described. First, the potential of thefourth wiring is set to a potential at which the transistor 402 isturned on, so that the transistor 402 is turned on. Accordingly, thepotential of the third wiring is supplied to the gate electrode of thetransistor 400 and the capacitor 404. That is, a predetermined charge issupplied to the gate electrode of the transistor 400 (writing). Here,one of two kinds of charges providing different potential levels(hereinafter referred to as a low-level charge and a high-level charge)is supplied. After that, the potential of the fourth wiring is set to apotential at which the transistor 402 is turned off, so that thetransistor 402 is turned off. Thus, the charge supplied to the gateelectrode of the transistor 400 is held (holding).

Since the off-state current of the transistor 402 is extremely low, thecharge of the gate electrode of the transistor 400 is held for a longtime.

Next, reading of data is described. By supplying an appropriatepotential (a reading potential) to the fifth wiring while supplying apredetermined potential (a constant potential) to the first wiring, thepotential of the second wiring varies depending on the amount of chargeheld in the gate electrode of the transistor 400. This is because ingeneral, when the transistor 400 is an n-channel transistor, an apparentthreshold voltage V_(th_H) in the case where the high-level charge isgiven to the gate electrode of the transistor 400 is lower than anapparent threshold voltage V_(th_L) in the case where the low-levelcharge is given to the gate electrode of the transistor 400. Here, anapparent threshold voltage refers to the potential of the fifth wiringwhich is needed to turn on the transistor 400. Thus, the potential ofthe fifth wiring is set to a potential V₀ which is between V_(th_H) andV_(th_L), whereby charge supplied to the gate electrode of thetransistor 400 can be determined. For example, in the case where thehigh-level charge is supplied in writing, when the potential of thefifth wiring is V₀ (>V_(th_H)), the transistor 400 is turned on. In thecase where the low-level charge is supplied in writing, even when thepotential of the fifth wiring is V₀ (<V_(th_L)), the transistor 400remains off. Therefore, the data stored in the gate electrode can beread by determining the potential of the second wiring.

Note that in the case where memory cells are arrayed, it is necessarythat only data of a desired memory cell be able to be read. The fifthwiring in the case where data is not read may be supplied with apotential at which the transistor 400 is turned off regardless of thestate of the gate electrode, that is, a potential lower than V_(th_H).Alternatively, the fifth wiring may be supplied with a potential atwhich the transistor 400 is turned on regardless of the state of thegate electrode, that is, a potential higher than V_(th_L).

When including a transistor having a channel formation region formedusing an oxide semiconductor and having an extremely low off-statecurrent, the semiconductor device described in this embodiment canretain stored data for an extremely long period. In other words, refreshoperation becomes unnecessary or the frequency of the refresh operationcan be extremely low, which leads to a sufficient reduction in powerconsumption. Moreover, stored data can be retained for a long periodeven when power is not supplied (note that a potential is preferablyfixed).

Further, in the semiconductor device described in this embodiment, thetransistor 400 can be a transistor of various types as well as a planertype. For example, a fin-type transistor, a tri-gate transistor or thelike can be applied. An example of the cross-sectional view of thetransistor 400 is illustrated in FIG. 16C. In FIG. 16C, across-sectional view along a channel length direction is illustrated onthe left side of a dashed-dotted line, and a cross-sectional view alonga channel width direction is illustrated on the right side of thedashed-dotted line. An insulating film 2212 is provided over asemiconductor substrate 2211. The semiconductor substrate 2211 includesa protruding portion with a thin tip (also referred to a fin). Note thatan insulating film may be provided over the protruding portion. Theinsulating film functions as a mask for preventing the semiconductorsubstrate from being etched when the protruding portion is formed.Alternatively, the protruding portion may not have the thin tip; aprotruding portion with a cuboid-like protruding portion and aprotruding portion with a thick tip are permitted, for example. A gateinsulating film 2214 is provided over the protruding portion of thesemiconductor substrate 2211, and a gate electrode 2213 is provided overthe gate insulating film 2214. Further, a sidewall is provided on a sidesurface of the gate electrode 2213. Source and drain regions 2215 areformed in the semiconductor substrate 2211. Note that here is providedan example where the semiconductor substrate 2211 includes theprotruding portion; however, a semiconductor device according to oneembodiment of the present invention is not limited thereto. For example,a semiconductor region having a protruding potion may be formed byprocessing an SOI substrate.

Further, in the semiconductor device described in this embodiment, highvoltage is not needed for writing data and there is no problem ofdeterioration of elements. For example, unlike a conventionalnonvolatile memory, it is not necessary to inject and extract electronsinto and from a floating gate, and thus a problem such as deteriorationof a gate insulating film does not arise at all. That is, thesemiconductor device according to the disclosed invention does not havea limitation on the number of times data can be rewritten, which is aproblem of a conventional nonvolatile memory, and the reliabilitythereof is drastically improved. Furthermore, data is written dependingon the on state and the off state of the transistor, whereby high-speedoperation can be easily achieved.

As described above, a miniaturized and highly-integrated semiconductordevice having high electrical characteristics and a fabrication methodof the semiconductor device can be provided.

This embodiment can be combined as appropriate with any of the otherembodiments in this specification.

Embodiment 6

In this embodiment, a semiconductor device including a transistor of oneembodiment of the present invention, which can retain stored data evenwhen not powered, which does not have a limitation on the number ofwrite cycles, and which has a structure different from that described inEmbodiment 5, is described.

FIG. 17A illustrates an example of a circuit configuration of thesemiconductor device, and FIG. 17B is a conceptual diagram illustratingan example of the semiconductor device. As a transistor 562 included inthe semiconductor device, any of the transistors described in the aboveembodiment can be used. A capacitor 554 can be formed through the sameprocess and at the same time as the transistor 562 in a manner similarto that of the capacitor 404 described in Embodiment 5.

In the semiconductor device illustrated in FIG. 17A, a bit line BL iselectrically connected to a source electrode of the transistor 562, aword line WL is electrically connected to a gate electrode of thetransistor 562, and a drain electrode of the transistor 562 iselectrically connected to one terminal of the capacitor 554.

Next, writing and storing of data in the semiconductor device (a memorycell 550) illustrated in FIG. 17A are described.

First, the potential of the word line WL is set to a potential at whichthe transistor 562 is turned on, and the transistor 562 is turned on.Accordingly, the potential of the bit line BL is supplied to the oneterminal of the capacitor 554 (writing). After that, the potential ofthe word line WL is set to a potential at which the transistor 562 isturned off, so that the transistor 562 is turned off. Thus, thepotential of the one terminal of the capacitor 554 is held (holding).

In addition, the transistor 562 including an oxide semiconductor has anextremely low off-state current. For that reason, the potential of theone terminal of the capacitor 554 (or a charge accumulated in thecapacitor 554) can be held for an extremely long time by turning off thetransistor 562.

Next, reading of data is described. When the transistor 562 is turnedon, the bit line BL which is in a floating state and the capacitor 554are electrically connected to each other, and the charge isredistributed between the bit line BL and the capacitor 554. As aresult, the potential of the bit line BL is changed. The amount ofchange in potential of the bit line BL varies depending on the potentialof the one terminal of the capacitor 554 (or the charge accumulated inthe capacitor 554).

For example, the potential of the bit line BL after chargeredistribution is (C_(B)×V_(B0)+C×V)/(C_(B)+C), where V is the potentialof the one terminal of the capacitor 554, C is the capacitance of thecapacitor 554, C_(B) is the capacitance component of the bit line BL(hereinafter also referred to as bit line capacitance), and V_(B0) isthe potential of the bit line BL before the charge redistribution.Therefore, it can be found that assuming that the memory cell 550 is ineither of two states in which the potentials of the one terminal of thecapacitor 554 are V₁ and V₀ (V₁>V₀), the potential of the bit line BL inthe case of holding the potential V₁ (=(C_(B)×V_(B0)+C×V₁)/(C_(B)+C)) ishigher than the potential of the bit line BL in the case of holding thepotential V₀ (=(C_(B)×V_(B0)+C×V₀)/(C_(B)+C)).

Then, by comparing the potential of the bit line BL with a predeterminedpotential, data can be read.

As described above, the semiconductor device illustrated in FIG. 17A canhold charge that is accumulated in the capacitor 554 for a long timebecause the off-state current of the transistor 562 is extremely low. Inother words, refresh operation becomes unnecessary or the frequency ofthe refresh operation can be extremely low, which leads to a sufficientreduction in power consumption. Moreover, stored data can be retainedfor a long period even when power is not supplied.

Next, the semiconductor device illustrated in FIG. 17B is described.

The semiconductor device illustrated in FIG. 17B includes a memory cellarray 551 (memory cell arrays 551 a and 551 b) including the pluralityof memory cells 550 illustrated in FIG. 17A as memory circuits in theupper portion, and a peripheral circuit 553 in the lower portion, whichis necessary for operating the memory cell array 551. Note that theperipheral circuit 553 is electrically connected to the memory cellarray 551.

It is preferable that a semiconductor material of the transistorprovided in the peripheral circuit 553 be different from that of thetransistor 562. For example, silicon, germanium, silicon germanium,silicon carbide, or gallium arsenide can be used, and a single crystalsemiconductor is preferably used. Alternatively, an organicsemiconductor material or the like may be used. A transistor includingsuch a semiconductor material can operate at sufficiently high speed.Thus, the transistor enables a variety of circuits (e.g., a logiccircuit and a driver circuit) which need to operate at high speed to befavorably obtained.

Note that FIG. 17B illustrates, as an example, the semiconductor devicein which the memory cell array 551 has a stack of the memory cell array551 a and the memory cell array 551 b; however, the number of stackedmemory cell arrays is not limited to two. For the memory cell array 551,a stack of three or more memory cell arrays may be used, or only onememory cell array may be used.

The transistor 562 is formed using an oxide semiconductor, and any ofthe transistors described in the above embodiment can be used as thetransistor 562. Since the off-state current of the transistor includingan oxide semiconductor is low, stored data can be retained for a longperiod. In other words, the frequency of refresh operation can beextremely low, which leads to a sufficient reduction in powerconsumption.

A semiconductor device having a novel feature can be obtained by beingprovided with both a peripheral circuit which includes the transistorincluding a material other than an oxide semiconductor (in other words,a transistor capable of operating at sufficiently high speed) and amemory circuit which includes the transistor including an oxidesemiconductor (in a broader sense, a transistor whose off-state currentis sufficiently low). In addition, with a structure where the peripheralcircuit and the memory circuit are stacked, an increase in the degree ofintegration of the semiconductor device can be achieved.

As described above, a miniaturized and highly-integrated semiconductordevice having high electric characteristics can be provided.

This embodiment can be combined as appropriate with any of the otherembodiments in this specification.

Embodiment 7

In this embodiment, a model of crystal growth of a CAAC-OS film whichcan be used for any of the transistors described in the aboveembodiments is described with reference to FIGS. 18A and 18B, FIGS. 19Ato 19C, and FIGS. 20A and 20B.

FIG. 18A is a schematic diagram showing how an ion 601 collides with asputtering target 600 and a sputtered particle 602 is separated. Notethat the sputtered particle 602 may have a hexagonal cylinder shapewhose hexagonal plane is parallel to the a-b plane or a triangular prismshape. In such a case, a direction perpendicular to the hexagonal planeor the triangular plane is a c-axis direction (see FIG. 18B). Thediameter (equivalent circle diameter) of the plane parallel to the a-bplane of the sputtered particle 602, although depending on the kind ofoxide, is approximately greater than or equal to 1 nm and less than orequal to 30 nm or greater than or equal to 1 nm and less than or equalto 10 nm. Note that an oxygen cation is used as the ion 601. Further, inaddition to the oxygen cation, an argon cation may be used. Instead ofthe argon cation, a cation of another rare gas may be used.

With the use of the oxygen cation as the ion 601, plasma damage at thedeposition can be alleviated. Thus, a reduction in the crystallinity ofthe sputtering target 600 or a change of the sputtering target 600 intoan amorphous state, which is caused when the ion 601 collides with thesurface of the sputtering target 600, can be suppressed.

It is preferable that the separated sputtered particle 602 be positivelycharged. However, there is no particular limitation on the timing atwhich the sputtered particle 602 is positively charged. Specifically,the sputtered particle 602 is in some cases positively charged by beingexposed to plasma. Alternatively, the sputtered particle 602 is in somecases positively charged by receiving an electric charge at thecollision of the ion 601. Further alternatively, the sputtered particle602 is in some cases positively charged in such a manner that the ion601 which is an oxygen cation is bonded to a side, top, or bottomsurface of the sputtered particle 602.

In the sputtered particle 602, the corners of the hexagonal plane arepositively charged, whereby positive charges of the hexagonal planerepel each other. Thus, the flat-plate shape of the sputtered particle602 can be maintained.

It is preferable to use a direct-current (DC) power source to positivelycharge the corners of the hexagonal plane of the sputtered particle 602.Note that a radio frequency (RF) power source or an alternating-current(AC) power source can be used. Note that it is difficult to use an RFpower source for a sputtering apparatus which is capable of depositionto a large substrate. In addition, a DC power source is preferred to anAC power source from the viewpoint below.

In the case where the AC power source is used, adjacent targetsalternately have a cathode potential and an anode potential. In a periodA shown in FIG. 19A, a target 1 functions as a cathode and a target 2functions as an anode as illustrated in FIG. 19B1. In a period B shownin FIG. 19A, the target 1 functions as an anode and the target 2functions as a cathode as illustrated in FIG. 19B2. The total time ofthe period A and the period B is 20 μsec to 50 μsec and the period A andthe period B are repeated at a constant frequency.

In the case where the sputtered particle 602 is positively charged,positive charges in the sputtered particle 602 repel each other, wherebythe flat-plate shape of the sputtered particles 602 can be maintained.However, in the case where the AC power source is used, there is timeduring which an electric field is not applied instantaneously; thus,some charges of the sputtered particle 602 are lost and the structure ofthe sputtered particle might be broken (see FIG. 19C). Thus, a DC powersource is preferred to an AC power source.

A description on how a sputtered particle is deposited on a depositionsurface is given with reference to FIGS. 20A and 20B. FIG. 20Aillustrates the case where deposition is performed with substrateheating and FIG. 20B illustrates a case where deposition is performedwithout substrate heating.

As illustrated in FIG. 20A, in the case where substrate heating isperformed, one sputtered particle 602 moves to a region of a depositionsurface 603 where other sputtered particles 602 have not been depositedyet, and migration of the sputtered particle 602 occurs, whereby thesputtered particle 602 is bonded to the sides of the sputtered particleswhich are already deposited.

The CAAC-OS film which is obtained by such a mechanism has highcrystallinity even on an amorphous surface, a surface of an amorphousinsulating film, a surface of an amorphous oxide film, or the like.

As illustrated in FIG. 20B, in the case where substrate heating is notperformed, the sputtered particles 602 fall irregularly to thedeposition surface 603. Thus, the sputtered particles 602 are depositedrandomly also in a region where other sputtered particles 602 arealready deposited. That is, an oxide film which is obtained by thedeposition has neither a uniform thickness nor a uniform crystalorientation. The oxide film which is obtained in the above manner is theone which includes a crystal part because the crystallinity of flatplate-like sputtered particles 602 is maintained to some extent.

As described above, the diameter of the plane of the sputtered particle602 which is parallel to the a-b plane is, for example, approximatelygreater than or equal to 1 nm and less than or equal to 30 nm or greaterthan or equal to 1 nm and less than or equal to 10 nm, and a crystalpart included in the formed oxide film is smaller than the sputteredparticle 602 in some cases. The oxide film includes a crystal part witha size of, for example, 10 nm or less or 5 nm or less in some cases. Theoxide film including such a crystal part is referred to as ananocrystalline (nc) oxide film.

The nanocrystalline oxide film is macroscopically equivalent to a filmhaving disordered atomic arrangement. For this reason, in some cases, apeak indicating an orientation is not observed in X-ray diffraction(XRD) analysis which is performed on a large area of a measurementsample (for example, in which the beam diameter is larger than that ofthe sputtered particle 602). Further, in some cases, an electrondiffraction pattern obtained by using an electron beam with a diameterlarger than that of the sputtered particle 602 is a halo pattern. Inthis case, for example, a nanocrystalline oxide film is measured with anelectron beam having a beam diameter much smaller than the sputteredparticle 602, whereby a spot (bright spot) can be observed in theobtained nanobeam electron diffraction pattern.

Electron diffraction patterns of nanocrystalline oxide semiconductorfilms are described with reference to FIGS. 54A to 54D, FIGS. 55A and55B, FIGS. 56A to 56C, FIG. 57 , FIG. 58 , FIGS. 59A and 59B, and FIG.60 .

An electron diffraction pattern obtained by electron diffraction with abeam diameter of 10 nmϕ or less (nanobeam electron diffraction) of ananocrystalline oxide semiconductor film is neither a halo patternindicating an amorphous state nor a pattern with spots having regularityindicating a crystalline state in which crystals are aligned with aspecific plane. That is, the nanocrystalline oxide semiconductor film isan oxide semiconductor film whose electron diffraction pattern has spotsnot having directionality.

FIG. 54A is a cross-sectional transmission electron microscopy (TEM)image of a nanocrystalline oxide semiconductor film. FIGS. 54B, 54C, and54D show electron diffraction patterns obtained by nanobeam electrondiffraction performed on Points 1, 2, 3 in FIG. 54A, respectively.

A sample in which an In—Ga—Zn-based oxide film was formed, as an exampleof the nanocrystalline oxide semiconductor film in FIGS. 54A to 54D,over a quartz glass substrate to a thickness of 50 nm was used. Thenanocrystalline oxide semiconductor film shown in FIGS. 54A to 54D wasformed under the following conditions: an oxide target containing In,Ga, and Zn at an atomic ratio of 1:1:1 was used, the atmosphere was anoxygen atmosphere (flow rate of 45 sccm), the pressure was 0.4 Pa, adirect current (DC) power of 0.5 kW was applied, and the substratetemperature was room temperature. Then, the width of the formednanocrystalline oxide semiconductor film was reduced to 100 nm or less(e.g., 40 nm±10 nm), and a cross-sectional TEM image and nanobeamelectron diffraction patterns were obtained.

FIG. 54A is the cross-sectional TEM image of the nanocrystalline oxidesemiconductor film which was taken with a transmission electronmicroscope (“H-9000NAR” manufactured by Hitachi High-TechnologiesCorporation) at an acceleration voltage of 300 kV and at a magnificationof 2,000,000-fold. FIGS. 54B to 54D show the electron diffractionpatterns obtained by nanobeam electron diffraction with a beam diameterof about 1 nmϕ, with a transmission electron microscope (“HF-2000”manufactured by Hitachi High-Technologies Corporation) at anacceleration voltage of 200 kV. Note that the measurement area of thenanobeam electron diffraction with a beam diameter of about 1 nmϕ isgreater than or equal to nmϕ and less than or equal to 10 nmϕ.

As shown in FIG. 54B, in the nanobeam electron diffraction pattern ofthe nanocrystalline oxide semiconductor film, a plurality ofcircumferentially arranged spots (bright points) are observed. In otherwords, in the pattern of the nanocrystalline oxide semiconductor film, aplurality of circumferentially (concentrically) distributed spots areobserved, or a plurality of circumferentially distributed spots form aplurality of concentric circles.

In FIG. 54C showing the central portion of the nanocrystalline oxidesemiconductor film in the thickness direction and in FIG. 54D showingthe vicinity of an interface between the nanocrystalline oxidesemiconductor film and the quartz glass substrate, a plurality ofcircumferentially distributed spots are observed as in FIG. 54B. In FIG.54C, the distance from a main spot to each of the circumferentiallydistributed spots is in the range from 3.88/nm to 4.93/nm, or from 0.203nm to 0.257 nm when converted into interplanar spacing.

The nanobeam electron diffraction patterns shown in FIGS. 54B to 54Dindicate that the nanocrystalline oxide semiconductor film includes aplurality of crystal parts whose surface orientations are random andwhose sizes are different from each other

FIG. 55A is a plane TEM image of a nanocrystalline oxide semiconductorfilm. FIG. 55B shows an electron diffraction pattern obtained byselected-area electron diffraction performed on a region surrounded by acircle in FIG. 55A.

A sample in which an In—Ga—Zn-based oxide film was formed, as an exampleof the nanocrystalline oxide semiconductor film shown in FIGS. 55A and55B, over a quartz glass substrate to a thickness of 30 nm was used. Thenanocrystalline oxide semiconductor film shown in FIGS. 55A and 55B wasformed under the following conditions: an oxide target containing In,Ga, and Zn at an atomic ratio of 1:1:1 was used, the atmosphere was anoxygen atmosphere (flow rate of 45 sccm), the pressure was 0.4 Pa, adirect current (DC) power of 0.5 kW was applied, and the substratetemperature was room temperature. Then, the sample was thinned, and theplane TEM image and the selected-area electron diffraction pattern ofthe nanocrystalline oxide semiconductor film were obtained.

FIG. 55A is the plane TEM image of the nanocrystalline oxidesemiconductor film which was taken with a transmission electronmicroscope (“H-9000NAR” manufactured by Hitachi High-TechnologiesCorporation) at an acceleration voltage of 300 kV and at a magnificationof 500,000-fold. FIG. 55B is the electron diffraction pattern obtainedby electron diffraction with a selected area of 300 nmϕ. Note that themeasurement area in FIG. 55B is greater than or equal to 300 nmϕ inconsideration of electron beam expansion (about several nanometers).

As shown in FIG. 55B, the electron diffraction pattern of thenanocrystalline oxide semiconductor film which was obtained byselected-area electron diffraction the measurement area of which iswider than that of the nanobeam electron diffraction is a halo pattern,in which the plurality of spots observed by the nanobeam electrondiffraction are not observed.

FIGS. 56A to 56C conceptually show diffraction intensity distribution inthe electron diffraction patterns shown in FIGS. 54B to 54D and FIG.55B. FIG. 56A is a conceptual diagram showing diffraction intensitydistribution in the nanobeam electron diffraction patterns shown inFIGS. 54B to 54D. FIG. 56B is a conceptual diagram showing diffractionintensity distribution in the selected-area electron diffraction patternshown in FIG. 55B. FIG. 56C is a conceptual diagram showing diffractionintensity distribution in an electron diffraction pattern of a singlecrystal structure or a polycrystalline structure.

In each of FIGS. 56A to 56C, the vertical axis represents the electrondiffraction intensity (arbitrary unit) indicating distribution of spotsor the like and the horizontal axis represents the distance from a mainspot.

In FIG. 56C for the single crystal structure or the polycrystallinestructure, peaks are each observed at a specific distance from the mainspot, which is based on interplanar spacing (d value) between planeswith which crystal parts are aligned.

As shown in each of FIGS. 54B to 54D, a circumferential region formed bythe plurality of spots observed in the nanobeam electron diffractionpattern of the nanocrystalline oxide semiconductor film has a relativelylarge width. Thus, FIG. 56A shows discrete distribution. Further, in thenanobeam electron diffraction pattern, a region with high luminanceformed by spots which are not clear is observed in a region betweenconcentric circles.

Further, the electron diffraction intensity distribution in theselected-area electron diffraction pattern of the nanocrystalline oxidesemiconductor film is continuous as shown in FIG. 56B. Since FIG. 56Bcan approximate a result obtained by widely observing the electrondiffraction intensity distribution shown in FIG. 56A, the continuousintensity distribution can be considered to result from the overlappingand connection of the plurality of spots.

FIGS. 56A to 56C indicate that the nanocrystalline oxide semiconductorfilm includes a plurality of crystal parts whose surface orientationsare random and whose sizes are different from each other and that thecrystal parts are so minute that spots are not observed in theselected-area electron diffraction pattern.

In FIGS. 54B to 54D in which the plurality of spots are observed, thewidth of the nanocrystalline oxide semiconductor film is 50 nm or less.Further, since the diameter of the electron beam was reduced to 1 nmϕ,the measurement area is greater than or equal to 5 nm and less than orequal to 10 nm. Thus, it is assumed that the diameter of the crystalpart included in the nanocrystalline oxide semiconductor film is 50 nmor less, for example, 10 nm or less or nm or less.

FIG. 57 shows a nanobeam electron diffraction pattern of a quartz glasssubstrate. The measurement conditions for FIG. 57 were similar to thosefor FIGS. 54B to 54D.

As shown in FIG. 57 , the nanobeam electron diffraction pattern of thequartz glass substrate having an amorphous structure is a halo patternwithout specific spots in which the luminance is gradually changed forma main spot. This means that a plurality of circumferentiallydistributed spots like those observed in the pattern of thenanocrystalline oxide semiconductor film are not observed in the patternof a film having an amorphous structure even when electron diffractionis performed on a minute region. This indicates that the plurality ofcircumferentially distributed spots observed in FIGS. 54B to 54D arepeculiar to the nanocrystalline oxide semiconductor film.

FIG. 58 shows an electron diffraction pattern obtained after one-minuteirradiation of Point 2 in FIG. 54A with an electron beam whose diameterwas reduced to about 1 nmϕ.

As in the electron diffraction pattern shown in FIG. 54C, a plurality ofcircumferentially distributed spots are observed in the electrondiffraction pattern shown in FIG. 58 , and there is no significantdifference from FIG. 54C. This means that the crystal part observed inthe electron diffraction pattern shown in FIG. 54C existed at the timeof the formation of the nanocrystalline oxide semiconductor film and didnot result from irradiation with the electron beam with the reduceddiameter.

FIGS. 59A and 59B are enlarged images of portions in the cross-sectionalTEM image of FIG. 54A. FIG. 59A is a cross-sectional TEM image of thevicinity of Point 1 (the surface of the nanocrystalline oxidesemiconductor film) in FIG. 54A, which was observed at a magnificationof 8,000,000-fold. FIG. 59B is a cross-sectional TEM image of thevicinity of Point 2 (the central portion of the nanocrystalline oxidesemiconductor film in the thickness direction) in FIG. 54A, which wasobserved at a magnification of 8,000,000-fold.

According to each of the TEM images of FIGS. 59A and 59B, a crystallinestructure cannot be clearly observed in the nanocrystalline oxidesemiconductor film.

The samples in each of which the nanocrystalline oxide semiconductorfilm of this embodiment was formed over the quartz glass substrate,which were used for FIGS. 54A to 54D and FIGS. 55A and 55B, wereanalyzed by X-ray diffraction (XRD). FIG. 60 shows an XRD spectrum ofthe samples measured by an out-of-plane method.

In FIG. 60 , the vertical axis represents the X-ray diffractionintensity (arbitrary unit) and the horizontal axis represents thediffraction angle 2θ (degree). Note that the XRD spectrum was measuredwith an X-ray diffractometer, D8 ADVANCE manufactured by Bruker AXS.

As shown in FIG. 60 , a peak corresponding to quartz is observed ataround 2θ=20° to 23°; however, a peak corresponding to the crystal partincluded in the nanocrystalline oxide semiconductor film cannot beobserved.

The results in FIGS. 59A and 59B and FIG. 60 also indicate that thecrystal part included in the nanocrystalline oxide semiconductor film isminute.

As described above, in the case of the nanocrystalline oxidesemiconductor film of this embodiment, a peak indicating an orientationwas not observed by X-ray diffraction (XRD) analysis the measurementarea of which is wide and the electron diffraction pattern obtained byselected-area electron diffraction the measurement area of which is wideis a halo pattern. This indicates that the nanocrystalline oxidesemiconductor film of this embodiment is macroscopically equivalent to afilm having disordered atomic arrangement. However, spots (brightpoints) can be observed in the nanobeam electron diffraction pattern ofthe nanocrystalline oxide semiconductor film which was obtained bynanobeam electron diffraction in which the diameter of an electron beamis sufficiently small (e.g., 10 nmϕ or less). Thus, it can be assumedthat the nanocrystalline oxide semiconductor film of this embodiment isa film in which minute crystal parts having random surface orientations(e.g., crystal parts each with a diameter of 10 nm or less, 5 nm orless, or 3 nm or less) cohere. A nanocrystal region including the minutecrystal parts is included in the entire region of the nanocrystallineoxide semiconductor film in the thickness direction.

Note that the deposition surface 603 is preferably an insulatingsurface. When the deposition surface 603 is an insulating surface, thesputtered particles 602 which are deposited on the deposition surface603 are unlikely to loose positive charges. However, in the case wherethe deposition rate of the sputtered particles 602 is lower than therate at which a positive charge is lost, the deposition surface 603 mayhave conductivity. The deposition surface 603 is preferably an amorphoussurface or an amorphous insulating surface.

With the use of a sputtering target in the way described above, an oxidefilm having a uniform thickness and a uniform crystal orientation can beformed.

This embodiment can be combined as appropriate with any of the otherembodiments in this specification.

Embodiment 8

In this embodiment, a sputtering target of one embodiment of the presentinvention is described.

The relative density of the sputtering target is higher than or equal to90%, higher than or equal to 95%, or higher than or equal to 99%.

The sputtering target includes a polycrystalline oxide containing aplurality of crystal grains whose average grain size is less than orequal to 3 μm, preferably less than or equal to 2.5 μm, furtherpreferably less than or equal to 2 μm.

Alternatively, the sputtering target includes a polycrystalline oxidecontaining a plurality of crystal grains, in which the proportion ofcrystal grains whose grain size is greater than or equal to 0.4 μm andless than or equal to 1 μm is higher than or equal to 8%, preferablyhigher than or equal to 15%, further preferably higher than or equal to25%. Note that the grain size of the crystal grain can be measured byelectron backscatter diffraction (EBSD). The grain size of the crystalgrain described here is calculated from a cross-sectional area of onecrystal grain measured from a crystal grain map obtained by EBSD,assuming that the cross section of the crystal grain is a perfectcircle. Specifically, when the cross-sectional area of the crystal grainis denoted by S and the radius of the cross section of the crystal grainis denoted by r, the radius r is calculated from a relation, S=πr² toobtain the grain size which can be represented by 2r (twice the radiusr).

Further, the plurality of crystal grains included in the sputteringtarget have cleavage planes. The cleavage plane is a plane parallel toan a-b plane, for example.

When the plurality of crystal grains have a small gain size, a sputteredparticle is separated from the cleavage plane by collision of an ionwith the sputtering target. The separated sputtered particle has aflat-plate-like shape with upper and lower surfaces parallel to thecleavage plane. Further, owing to small grain sizes of the plurality ofcrystal grains, distortion in crystal is caused and a sputtered particlebecomes easily separated from the cleavage plane.

Note that when the plurality of crystal grains included in thesputtering target are hexagonal crystals, flat-plate-like sputteredparticles each have the shape of a hexagonal cylinder whose top andbottom surfaces are approximately equilateral hexagons each havinginterior angles of 120°.

Although sputtered particles are ideally single crystals, part of thesputtered particles may be changed into an amorphous state due to theimpact of ion collision.

As such a polycrystalline oxide included in the sputtering target, anoxide containing In, M (M is Ga, Sn, Hf, Al, La, Ce, Pr, Nd, Sm, Eu, Gd,Tb, Dy, Ho, Er, Tm, Yb, or Lu), and Zn is used. The oxide containing In,M, and Zn is also referred to as In-M-Zn oxide.

Moreover, the atomic ratio of In to M and Zn contained in the In-M-Znoxide is preferably close to the stoichiometric composition. When theatomic ratio of In, M, and Zn contained in the In-M-Zn oxide becomesclose to the stoichiometric composition ratio, the crystallinity of theIn-M-Zn oxide can be increased.

In the In-M-Zn oxide, a cleavage plane is, in many cases, a planeparallel to an a-b plane in which M and Zn are mixed.

A method for forming the above sputtering target is described withreference to FIGS. 21A and 21B.

FIG. 21A shows formation of an oxide powder containing a plurality ofmetal elements to be a sputtering target. First, the oxide powder isweighed in Step S101.

Here, description is given on the case where an oxide powder containingIn, M, and Zn (also referred to as an In-M-Zn oxide powder) is obtainedas the oxide powder containing a plurality of metal elements.Specifically, an InO_(X) oxide powder, an MO_(Y) oxide powder, and aZnO_(Z) oxide powder are prepared as a raw material. Note that X, Y, andZ are each a given positive number; for example, X, Y, and Z are 1.5,1.5, and 1, respectively. It is needless to say that the above oxidepowders are an example, and oxide powders can be selected as appropriatein order to obtain a desired composition. Note that M refers to Ga, Sn,Hf, Al, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, or Lu.Although the case where three kinds of oxide powders are used is shownas an example in this embodiment, one embodiment of the presentinvention is not limited thereto. For example, this embodiment may beapplied to the case where four or more kinds of oxide powders are usedor the case where one or two kinds of oxide powders are used.

Next, the InO_(X) oxide powder, the MO_(Y) oxide powder, and the ZnO_(Z)oxide powder are mixed in a predetermined molar ratio.

For example, the predetermined molar ratio of the InO_(X) oxide powder,the MO_(Y) oxide powder, and the ZnO_(Z) oxide powder is 2:2:1, 8:4:3,3:1:1, 1:1:1, 4:2:3, 1:1:2, 3:1:4, 1:3:2, 1:3:4, 1:3:6, 1:3:8, 1:3:10,1:3:12, 1:6:4, 1:6:6, 1:6:8, 1:6:10, 1:6:12, 1:6:14, 1:6:16, 1:6:20, or3:1:2. With such a molar ratio, a sputtering target including apolycrystalline oxide with high crystallinity can be obtained easilylater.

Next, in Step S102, an In-M-Zn oxide is obtained by performing firstbaking on the InO_(X) oxide powder, the MO_(Y) oxide powder, and theZnO_(Z) oxide powder which are mixed in a predetermined molar ratio.

Note that the first baking is performed in an inert atmosphere, anoxidation atmosphere, or a reduced-pressure atmosphere at a temperaturehigher than or equal to 400° C. and lower than or equal to 1700° C.,preferably higher than or equal to 900° C. and lower than or equal to1500° C. The first baking is performed for longer than or equal to 3minutes and shorter than or equal to 24 hours, preferably longer than orequal to 30 minutes and shorter than or equal to 17 hours, morepreferably longer than or equal to 30 minutes and shorter than or equalto 5 hours, for example. When the first baking is performed under theabove conditions, secondary reactions other than the main reaction canbe suppressed, and the concentration of impurities in the In-M-Zn oxidepowder can be reduced. Accordingly, the crystallinity of the In-M-Znoxide powder can be increased.

The first baking may be performed plural times at different temperaturesand/or in different atmospheres. For example, the In-M-Zn oxide powdermay be first held at a first temperature in a first atmosphere and thenat a second temperature in a second atmosphere. Specifically, it ispreferable that the first atmosphere be an inert atmosphere or areduced-pressure atmosphere and the second atmosphere be an oxidationatmosphere. This is because oxygen vacancy is generated in the In-M-Znoxide when impurities contained in the In-M-Zn oxide powder are reducedin the first atmosphere. Therefore, it is preferable that oxygen vacancyin the obtained In-M-Zn oxide be reduced in the second atmosphere. Theconcentration of impurities contained in the In-M-Zn oxide is decreasedand oxygen vacancy is reduced, whereby the crystallinity of the In-M-Znoxide powder can be increased.

Next, the In-M-Zn oxide powder is obtained by grinding the In-M-Zn oxidein Step S103.

The In-M-Zn oxide has many surface structures of planes parallel to thea-b plane. Therefore, the obtained In-M-Zn oxide powder includes manyflat plate-like crystal grains whose top and bottom surfaces areparallel to the a-b plane. Moreover, the crystal of the In-M-Zn oxide isin many cases a hexagonal crystal; therefore, in many cases, the aboveflat plate-like crystal grains each have the shape of a hexagonalcylinder whose top and bottom surfaces are approximately equilateralhexagons each having internal angles of 120°.

Next, the grain size of the obtained In-M-Zn oxide powder is checked inStep S104. Here, the average grain size of the In-M-Zn oxide powder ischecked to be less than or equal to 3 μm, preferably less than or equalto 2.5 μm, further preferably less than or equal to 2 μm. Note that StepS104 may be skipped and only the In-M-Zn oxide powder whose grain sizeis less than or equal to 3 μm, preferably less than or equal to 2.5 μm,further preferably less than or equal to 2 μm may be sifted using agrain size filter. The average grain size of the In-M-Zn oxide powdercan be certainly less than or equal to 3 μm, preferably less than orequal to 2.5 μm, further preferably less than or equal to 2 μm bysifting the In-M-Zn oxide powder to have the grain size which is lessthan or equal to 3 μm, preferably less than or equal to 2.5 μm, furtherpreferably less than or equal to 2 μm.

In the case where the average grain size of the In-M-Zn oxide powderexceeds a predetermined size in Step S104, the procedure returns to StepS103 and the In-M-Zn oxide powder is ground again.

In the above manner, the In-M-Zn oxide powder whose average grain sizeis less than or equal to 3 μm, preferably less than or equal to 2.5 μm,further preferably less than or equal to 2 μm can be obtained. Note thatthe average grain size of the obtained In-M-Zn oxide powder is less thanor equal to 3 μm, preferably less than or equal to 2.5 μm, furtherpreferably less than or equal to 2 μm, which enables the grain size of acrystal grain included in a sputtering target that is to be formed laterto be reduced.

Next, FIG. 21B shows a method for manufacturing a sputtering targetusing the In-M-Zn oxide powder obtained as shown in the flow chart inFIG. 21A.

In Step S111, the In-M-Zn oxide powder is molded. Here, molding refersto spreading powder or the like over a mold to obtain a uniformthickness. Specifically, the In-M-Zn oxide powder is introduced to themold, and then vibration is externally applied so that the In-M-Zn oxidepowder is molded. Alternatively, the In-M-Zn oxide powder is introducedto the mold, and then molding is performed using a roller or the like soas to obtain a uniform thickness. Note that in Step S111, slurry inwhich the In-M-Zn oxide powder is mixed with water, a dispersant, and abinder may be molded. In that case, the slurry is poured into the moldand then molded by sucking the slurry from the bottom of the mold. Afterthat, drying treatment is performed on a molded body after the slurry issucked. The drying treatment is preferably natural drying because themolded body is less likely to be cracked. After that, the molded body issubjected to heat treatment at a temperature higher than or equal to300° C. and lower than or equal to 700° C., so that residual moisture orthe like which cannot be taken out by natural drying is removed.

When the In-M-Zn oxide powder including many flat plate-like crystalgrains whose top and bottom surfaces are parallel to the a-b plane ismolded, the crystal grains are arranged with the planes which areparallel to the a-b plane thereof facing upward. Therefore, theproportion of the surface structures of planes parallel to the a-b planecan be increased in such a manner that the obtained In-M-Zn oxide powderis molded. Note that the mold may be formed of a metal or an oxide andthe upper shape thereof is rectangular or rounded.

Next, first pressure treatment is performed on the In-M-Zn oxide powderin Step S112. After that, in Step S113, second baking is performed toobtain a plate-like In-M-Zn oxide. The second baking is performed underconditions similar to those of the first baking. The crystallinity ofthe In-M-Zn oxide can be increased by performing the second baking.

Note that the first pressure treatment may be performed in any manner aslong as the In-M-Zn oxide powder can be pressed. For example, a weightwhich is formed of the same kind of material as the mold can be used.Alternatively, the In-M-Zn oxide powder may be pressed under highpressure using compressed air. Besides, the first pressure treatment canbe performed using a variety of techniques. Note that the first pressuretreatment may be performed at the same time as the second baking.

Planarization treatment may be performed after the first pressuretreatment. As the planarization treatment, chemical mechanical polishing(CMP) treatment or the like can be employed.

The plate-like In-M-Zn oxide thus obtained becomes a polycrystallineoxide with high crystallinity.

Next, the thickness of the obtained plate-like In-M-Zn oxide is checkedin Step S114. When the thickness of the plate-like In-M-Zn oxide is lessthan a desired thickness, the procedure returns to Step S111 and theIn-M-Zn oxide powder is made to spread over the plate-like In-M-Zn oxideand molded. When the plate-like In-M-Zn oxide has a desired thickness,the plate-like In-M-Zn oxide is used as a sputtering target. The casewhere the thickness of the plate-like In-M-Zn oxide is less than adesired thickness is described below.

Then, in Step S112, second pressure treatment is performed on theplate-like In-M-Zn oxide and the In-M-Zn oxide powder over theplate-like In-M-Zn oxide. After that, in Step S113, third baking isperformed, whereby a plate-like In-M-Zn oxide whose thickness isincreased by the thickness of the In-M-Zn oxide powder is obtained. Aplate-like In-M-Zn oxide with an increased thickness is obtained throughcrystal growth with the use of the plate-like In-M-Zn oxide as a seedcrystal; therefore, the plate-like In-M-Zn oxide is a polycrystallineoxide with high crystallinity.

Note that the third baking may be performed under conditions similar tothose of the second baking. The second pressure treatment may beperformed under conditions similar to those of the first pressuretreatment. The second pressure treatment may be performed at the sametime as the third baking.

The thickness of the obtained plate-like In-M-Zn oxide is checked againin Step S114.

Through the above steps, the thickness of the plate-like In-M-Zn oxidecan be gradually increased while the crystal alignment is improved.

By repeating these steps of increasing the thickness of the plate-likeIn-M-Zn oxide n (n is a natural number) times, the plate-like In-M-Znoxide having a desired thickness (t), for example, greater than or equalto 2 mm and less than or equal to 20 mm, preferably greater than orequal to 3 mm and less than or equal to 20 mm can be obtained. Theplate-like In-M-Zn oxide is used as a sputtering target.

After that, planarization treatment may be performed.

Note that fourth baking may be performed on the obtained sputteringtarget. The fourth baking is performed under conditions similar to thoseof the first baking. A sputtering target including a polycrystallineoxide with much higher crystallinity can be obtained by performing thefourth baking.

In the above manner, the sputtering target which includes apolycrystalline oxide containing a plurality of crystal grains havingcleavage planes parallel to the a-b plane and a small average grain sizecan be formed.

Note that the sputtering target formed in such a manner can have highdensity. When the density of the sputtering target is increased, thedensity of a film to be deposited can also be increased. Specifically,the relative density of the sputtering target can be set higher than orequal to 90%, preferably higher than or equal to 95%, further preferablyhigher than or equal to 99%.

This embodiment can be combined as appropriate with any of the otherembodiments in this specification.

Embodiment 9

In this embodiment, observation results of electron diffraction patternsof a CAAC-OS film which can be used for one embodiment of the presentinvention are described.

The CAAC-OS film used in this embodiment is an In—Ga—Zn-based oxide filmwhich is formed by a sputtering method using a sputtering gas containingoxygen and a target of an In—Ga—Zn oxide (having an atomic ratio ofIn:Ga:Zn=1:1:1). The above embodiment can be referred to for detaileddescription of a manufacturing method and the like of the CAAC-OS film.

FIG. 45 is a cross-sectional transmission electron microscopy (TEM)image of the CAAC-OS film. FIGS. 46A to 46D show electron diffractionpatterns which were obtained by measurement of Points 1 to 4 in FIG. 45using electron diffraction.

The cross-sectional TEM image shown in FIG. 45 was taken with atransmission electron microscope (“H-9000NAR” manufactured by HitachiHigh-Technologies Corporation) at an acceleration voltage of 300 kV anda magnification of 2,000,000-fold. The electron diffraction patternsshown in FIGS. 46A to 46D were obtained with a transmission electronmicroscope (“HF-2000” manufactured by Hitachi High-TechnologiesCorporation) at an acceleration voltage of 200 kV and beam diameters ofabout 1 nmϕ and about 50 nmϕ. Note that electron diffraction with a beamdiameter of 10 nmϕ is particularly referred to as nanobeam electrondiffraction in some cases. Further, a measurement area of the electrondiffraction with a beam diameter of about 1 nmϕ is greater than or equalto 5 nmϕ and less than or equal to 10 nmϕ.

Electron diffraction patterns of Point 1 (the surface side of the film),Point 2 (the center of the film), and Point 3 (the base side of thefilm) shown in FIG. 45 correspond to FIGS. 46A, 46B, and 46C,respectively and are obtained with an electron-beam diameter of about 1nmϕ. An electron diffraction pattern in Point 4 (the whole film) shownin FIG. 45 corresponds to FIG. 46D and is obtained with an electron-beamdiameter of about 50 nmϕ.

A pattern formed by spots (bright points) is observed in each of theelectron diffraction patterns of Point 1 (on the surface side of thefilm) and Point 2 (the center of the film), and a slightly brokenpattern is observed in Point 3 (on the base side of the film). Thisindicates that the crystal state varies in the thickness direction inthe CAAC-OS film. Note that a pattern formed by spots (bright points) isobserved in Point 4 (the whole film), which indicates that the wholefilm is a CAAC-OS film or a film including a CAAC-OS film.

FIG. 47 is an enlarged view of a portion in the vicinity of Point 1 (onthe surface side of the film) in FIG. 45 . In FIG. 47 , a clear latticeimage which shows alignment of the CAAC-OS film extends to the interfacewith an SiON film that is an interlayer insulating film.

FIGS. 48A and 48B are a cross-sectional TEM photograph and an X-raydiffraction spectrum of a CAAC-OS film different from the CAAC-OS filmused for the cross-sectional TEM image in FIG. 45 . A CAAC-OS film mayhave a variety of forms, and Peak A which indicates a crystal componentappears around 2θ=31° as shown in FIG. 48B, but the peak does not appearclearly in some cases.

FIGS. 49A to 49D show results of electron diffraction in regions in theCAAC-OS film with electron-beam diameters of 1 nmϕ, 20 nmϕ, 50 nmϕ, and70 nmϕ. The regions are indicated by concentric circles in FIG. 48A. Inthe case of an electron-beam diameter of 1 nmϕ, a pattern formed byclear spots (bright points) can be observed as in FIGS. 46A and 46B. Asthe electron-beam diameter is increased, the spots (bright points)become unclear but a diffraction pattern can be observed; therefore, itcan be said that the whole film is a CAAC-OS film or a film including aCAAC-OS film.

FIGS. 50A and 50B are a cross-sectional TEM image and an X-raydiffraction spectrum of the CAAC-OS film used for the cross-sectionalTEM observation in FIG. 48A, which are obtained after annealing at 450°C.

FIGS. 51A to 51D show results of electron diffraction in regions in theCAAC-OS film with electron-beam diameters of 1 nmϕ, 20 nmϕ, 50 nmϕ, and70 nmϕ. The regions are indicated by concentric circles in FIG. 50A. Inthe case of an electron-beam diameter of 1 nmϕ, a pattern formed byclear spots (bright points) can be observed as in the results shown inFIGS. 49A to 49D. As the electron-beam diameter is increased, the spots(bright points) become unclear but a diffraction pattern can beobserved; therefore, it can be said that the whole film is a CAAC-OSfilm or a film including a CAAC-OS film.

FIGS. 52A and 52B are a cross-sectional TEM image and an X-raydiffraction spectrum of a CAAC-OS film different from the CAAC-OS filmused for the cross-sectional TEM image of FIG. 45 and thecross-sectional TEM observation of FIG. 48A. The CAAC-OS film has avariety of forms, and as shown in FIG. 52B, as well as Peak A indicatinga crystal component around 2θ=31°, Peak B which is derived from a spinelcrystal structure appears in some cases.

FIGS. 53A to 53D show results of electron diffraction in regions in theCAAC-OS film with electron-beam diameters of 1 nmϕ, 20 nmϕ, 50 nmϕ, and90 nmϕ. The regions are indicated by concentric circles in FIG. 52A. Inthe case of an electron-beam diameter of 1 nmϕ, a pattern formed byclear spots (bright points) can be observed. As the electron-beamdiameter is increased, the spots (bright points) become unclear but adiffraction pattern can be observed. Further, in the case of a beamdiameter of 90 nmϕ, clearer spots (bright points) can be observed.Accordingly, the whole film is a CAAC-OS film or a film including aCAAC-OS film.

This embodiment can be combined as appropriate with any of the otherembodiments in this specification.

Embodiment 10

In this embodiment, an example of a semiconductor device (displaydevice) including the transistor described in the above embodiment isdescribed.

<Structure of Semiconductor Device>

FIG. 26A illustrates an example of a semiconductor device. Thesemiconductor device in FIG. 26A includes a pixel portion 1100, a scanline driver circuit 1104, a signal line driver circuit 1106, m scanlines 1107 which are arranged in parallel or substantially in paralleland whose potentials are controlled by the scan line driver circuit1104, and n signal lines 1109 which are arranged in parallel orsubstantially in parallel and whose potentials are controlled by thesignal line driver circuit 1106. Further, the pixel portion 1100includes a plurality of pixels 1101 arranged in a matrix. Furthermore,capacitor lines 1115 arranged in parallel or substantially in parallelare provided along the scan lines 1107. Note that the capacitor lines1115 may be arranged in parallel or substantially in parallel along thesignal lines 1109.

Each scan line 1107 is electrically connected to the n pixels 1101 inthe corresponding row among the pixels 1101 arranged in m rows and ncolumns in the pixel portion 1100. Each signal line 1109 is electricallyconnected to the m pixels 1101 in the corresponding column among thepixels 1101 arranged in m rows and n columns. Note that m and n are eachan integer of 1 or more. Each capacitor line 1115 is electricallyconnected to then pixels 1101 in the corresponding row among the pixels1101 arranged in m rows and n columns. Note that in the case where thecapacitor lines 1115 are arranged in parallel or substantially inparallel along the signal lines 1109, each capacitor line 1115 iselectrically connected to them pixels 1101 in the corresponding columnamong the pixels 1101 arranged in m rows and n columns.

FIG. 26B is an example of a circuit diagram of the pixel 1101 includedin the semiconductor device illustrated in FIG. 26A. The pixel 1101 inFIG. 26B includes a transistor 1103 which is electrically connected tothe scan line 1107 and the signal line 1109, a capacitor 1105 oneelectrode of which is electrically connected to a drain electrode of thetransistor 1103 and the other electrode of which is electricallyconnected to the capacitor line 1115 which supplies a constantpotential, and a liquid crystal element 1108. A pixel electrode of theliquid crystal element 1108 is electrically connected to the drainelectrode of the transistor 1103 and the one electrode of the capacitor1105, and an electrode (counter electrode) facing the pixel electrode iselectrically connected to a wiring which supplies a counter potential.

The liquid crystal element 1108 is an element which controlstransmission of light by an optical modulation action of liquid crystalwhich is sandwiched between a substrate provided with the transistor1103 and the pixel electrode and a substrate provided with the counterelectrode. The optical modulation action of liquid crystal is controlledby an electric field applied to the liquid crystal (including a verticalelectric field and a diagonal electric field). Note that in the casewhere a counter electrode (also referred to as a common electrode) isprovided over a substrate where a pixel electrode is provided, anelectric field applied to liquid crystal is a transverse electric field.

Next, a specific example of the pixel 1101 of the liquid crystal displaydevice is described. FIG. 27 is a top view of the pixel 1101. Note thatin FIG. 27 , the counter electrode and the liquid crystal element areomitted.

In FIG. 27 , the scan line 1107 is provided so as to extend in thedirection perpendicular or substantially perpendicular to the signalline 1109 (in the horizontal direction in the drawing). The signal line1109 is provided so as to extend in the direction perpendicular orsubstantially perpendicular to the scan line 1107 (in the verticaldirection in the drawing). The capacitor line 1115 is provided so as toextend in the direction parallel to the scan line 1107. Note that thescan line 1107 and the capacitor line 1115 are electrically connected tothe scan line driver circuit 1104 (see FIG. 26A), and the signal line1109 is electrically connected to the signal line driver circuit 1106(see FIG. 26A).

The transistor 1103 is provided in a region where the scan line 1107 andthe signal line 1109 cross each other. The transistor 1103 includes atleast a semiconductor film 1111 including a channel formation region, agate electrode, a gate insulating film (not illustrated in FIG. 27 ), asource electrode, and a drain electrode. A portion of the scan line 1107which overlaps with the semiconductor film 1111 functions as the gateelectrode of the transistor 1103. A portion of the signal line 1109which overlaps with the semiconductor film 1111 functions as the sourceelectrode of the transistor 1103. A portion of a conductive film 1113which overlaps with the semiconductor film 1111 functions as the drainelectrode of the transistor 1103. Thus, the gate electrode, the sourceelectrode, and the drain electrode may be referred to as the scan line1107, the signal line 1109, and the conductive film 1113, respectively.Further, in FIG. 27 , an edge of the scan line 1107 is on the outer sideof an edge of the semiconductor film when seen from above. Thus, thescan line 1107 functions as a light-blocking film for blocking lightfrom a light source such as a backlight. For this reason, thesemiconductor film 1111 included in the transistor is not irradiatedwith light, so that variations in the electrical characteristics of thetransistor can be suppressed.

The conductive film 1113 is electrically connected to a pixel electrode1121 b formed using a light-transmitting conductive film, through anopening 1117. In FIG. 27 , the hatch pattern of the pixel electrode 1121b is not shown.

The capacitor 1105 is provided in a region which is in the pixel 1101and surrounded by capacitor lines 1115 and signal lines 1109. Thecapacitor 1105 is electrically connected to the capacitor line 1115through an electrode 1121 a and a conductive film 1125 provided in andover an opening 1123 a and an opening 1123 b. The capacitor 1105includes light-transmitting a conductive film 1120 formed of alight-transmitting oxide semiconductor film with increased conductivity,the light-transmitting pixel electrode 1121 b, and a light-transmittinginsulating film (not illustrated in FIG. 27 ) which serves as adielectric film and is included in the transistor 1103. In other words,the capacitor 1105 transmits light.

Thanks to the light-transmitting property of the conductive film 1120,the capacitor 1105 can be formed large (covers a large area) in thepixel 1101. Thus, a semiconductor device having increased chargecapacity while improving the aperture ratio, to typically 55% or more,preferably 60% or more can be obtained. For example, in a semiconductordevice with a high resolution such as a liquid crystal display device,the area of a pixel is small and thus the area of a capacitor is alsosmall. For this reason, the charge capacity of the capacitor is small ina semiconductor device with a high resolution. However, since thecapacitor 105 of this embodiment transmits light, when it is provided ina pixel, enough charge capacity can be obtained in the pixel and theaperture ratio can be improved. Typically, the capacitor 105 can befavorably used in a high-resolution semiconductor device with a pixeldensity of 200 ppi or more, or furthermore, 300 ppi or more. Further,according to an embodiment of the present invention, the aperture ratiocan be improved even in a display device with a high resolution, whichmakes it possible to use light from a light source such as a backlightefficiently, so that power consumption of the display device can bereduced.

Next, FIG. 28 illustrates a cross-sectional view of a transistorprovided in the scan line driver circuit 1104 (see FIG. 26A) andcross-sectional views taken along dashed-dotted line A1-A2,dashed-dotted line B1-B2, and dashed-dotted line C1-C2 in FIG. 27 .Here, a top view of the scan line driver circuit 1104 is omitted, and across-sectional view of the scan line driver circuit 1104 corresponds toa cross section along D1-D2. The cross-sectional view of the transistorprovided in the scan line driver circuit 1104 is illustrated here, andthe transistor can be provided in the signal line driver circuit 1106.

First, structures of the pixel 1101 taken along dashed-dotted lineA1-A2, dashed-dotted line B1-B2, and dashed-dotted line C1-C2 aredescribed. The scan line 1107 including a gate electrode of thetransistor 1103 and the capacitor line 1115 on the same surface as thescan line 1107 are provided over a substrate 1102. A gate insulatingfilm 1127 is provided over the scan line 1107 and the capacitor line1115. The semiconductor film 1111 is provided over a portion of the gateinsulating film 1127 which overlaps with the scan line 1107, and theconductive film 1120 is provided over the gate insulating film 1127. Thesignal line 1109 including a source electrode of the transistor 1103 andthe conductive film 1113 including a drain electrode of the transistor1103 are provided over the semiconductor film 1111 and the gateinsulating film 1127. The conductive film 1125 is provided over theconductive film 1120. An insulating film 1129, an insulating film 1131,and an insulating film 1133 functioning as protective insulating filmsof the transistor 1103 are provided over the gate insulating film 1127,the signal line 1109, the semiconductor film 1111, the conductive films1113 and 1125, and the conductive film 1120. The opening 1123 a reachingthe capacitor line 1115 is provided in the gate insulating film 1127,the insulating films 1129, 1131, and 1133, the opening 1123 b reachingthe conductive film 1125 is provided in the insulating films 1129, 1131,and 1133, and the electrode 1121 a is provided in the opening 1123 a andthe opening 1123 b and over the capacitor line 1115, the conductive film1125 and the insulating film 1133. Note that the opening 1117 (see FIG.27 ) reaching the conductive film 1113 is formed in the insulating film1129, the insulating film 1131, and the insulating film 1133, and thepixel electrode 1121 b is provided in the opening 1117 and over aninsulating film 1133.

In the capacitor 1105 described in this embodiment, the conductive film1120 formed in the same process as the semiconductor film 1111 serves asone of a pair of electrodes, the pixel electrode 1121 b serves as theother of the pair of electrodes, and the insulating films 1129, 1131,and 1133 serve as a dielectric film provided between the pair ofelectrodes.

Next, the structure of the transistor provided in the scan line drivercircuit 1104 is described. A gate electrode 1627 of a transistor 1623 isprovided over the substrate 1102. The gate insulating film 1127 isprovided over the gate electrode 1627. A semiconductor film 1628 isprovided over a region of the gate insulating film 1127 which overlapswith the gate electrode 1627. A source electrode 1629 and a drainelectrode 1639 of the transistor 1623 are provided over thesemiconductor film 1628 and the gate insulating film 1127. Further, theinsulating films 1129, 1131, and 1133 serving as protective insulatingfilms of the transistor 1623 are provided over the gate insulating film1127, the source electrode 1629, the semiconductor film 1628, and thedrain electrode 1639. A conductive film 1641 is provided over theinsulating film 1133.

Note that a base insulating film may be provided between the substrate1102, and the scan line 1107, the capacitor line 1115, the gateelectrode 1627, and the gate insulating film 1127.

In the transistor 1623, the conductive film 1641 overlapping with thegate electrode 1627 with the semiconductor film 1628 providedtherebetween is provided, whereby variations in gate voltage at which anon-current rises at different drain voltages can be reduced. Further, acurrent flowing between the source electrode 1629 and the drainelectrode 1639 at a surface of the semiconductor film 1628 facing theconductive film 1641 can be controlled and thus variations in electricalcharacteristics between different transistors can be reduced. Further,when the conductive film 1641 is provided, an influence of a change inambient electric field on the semiconductor film 1628 can be reduced,leading to an improvement in reliability of the transistor. Further,when the potential of the conductive film 1641 is the same orsubstantially the same as the minimum potential (Vss; for example, thepotential of the source electrode 1629 in the case where the potentialof the source electrode 1629 is a reference potential), variations inthreshold voltage of the transistor can be reduced and the reliabilityof the transistor can be improved.

The insulating films 1129 and 1131 can be formed to have a single-layerstructure or a layered structure using, for example, any of oxideinsulating materials such as silicon oxide, silicon oxynitride, aluminumoxide, hafnium oxide, gallium oxide, and a Ga—Zn-based metal oxide.

The insulating film 1129 can have a thickness of greater than or equalto 5 nm and less than or equal to 150 nm, preferably greater than orequal to 5 nm and less than or equal to 50 nm, more preferably greaterthan or equal to 10 nm and less than or equal to 30 nm. The insulatingfilm 1131 can have a thickness of greater than or equal to 30 nm andless than or equal to 500 nm, preferably greater than or equal to 150 nmand less than or equal to 400 nm.

Further, the insulating film 1133 can be formed using a nitrideinsulating material such as silicon nitride oxide, silicon nitride,aluminum nitride, aluminum nitride oxide, and the like to have asingle-layer structure or a stacked structure.

As the insulating film 1133, a nitride insulating film where thehydrogen content is low may be provided. The nitride insulating film isas follows, for example: the number of hydrogen released from thenitride insulating film is less than 5.0×10²¹ atoms/cm³, preferably lessthan 3.0×10²¹ atoms/cm³, more preferably less than 1.0×10²¹ atoms/cm³when measured by TDS spectroscopy.

The insulating film 1133 has a thickness large enough to prevent entryof impurities such as hydrogen and water from the outside. For example,the thickness can become greater than or equal to 50 nm and less than orequal to 200 nm, preferably greater than or equal to 50 nm and less thanor equal to 150 nm, and further preferably greater than or equal to 50nm and less than or equal to 100 nm.

Next, connection of the components included in the pixel 1101 describedin this embodiment is described with reference to the circuit diagram inFIG. 26C and the cross-sectional view in FIG. 28 .

FIG. 26C is an example of a detailed circuit diagram of the pixel 1101included in the semiconductor device illustrated in FIG. 26A. Asillustrated in FIG. 26C and FIG. 28 , the transistor 1103 includes thescan line 1107 including the gate electrode, the signal line 1109including the source electrode, and the conductive film 1113 includingthe drain electrode.

The conductive film 1120 which is electrically connected to thecapacitor line 1115 through the electrode 1121 a and the conductive film1125 serves as one electrode of the capacitor 1105. Further, the pixelelectrode 1121 b which is electrically connected to the conductive film1113 including the drain electrode serves as the other electrode of thecapacitor 1105. The insulating films 1129, 1131, and 1133 providedbetween the conductive film 1120 and the pixel electrode 1121 b serve asa dielectric film.

The liquid crystal element 1108 includes the pixel electrode 1121 b, thecounter electrode 1154, and the liquid crystal layer provided betweenthe pixel electrode 1121 b and the counter electrode 1154.

The conductive film 1120 in the capacitor 1105, which has the samestructure as the semiconductor film 1111, is doped with a dopant tofunction as the electrode of the capacitor 1105. This is because thepixel electrode 1121 b can function as a gate electrode, the insulatingfilms 1129, 1131, and 1133 can function as gate insulating films, andthe capacitor line 1115 can function as a source electrode or a drainelectrode, so that the capacitor 1105 can be operated in a mannersimilar to that of a transistor and the conductive film 1120 can be madeto be in a conductive state. In other words, the capacitor 1105 can be ametal oxide semiconductor (MOS) capacitor. A MOS capacitor is chargedwhen a voltage higher than the threshold voltage (Vth) is applied to oneelectrode of the MOS capacitor (the pixel electrode 1121 b of thecapacitor 1105). Further, the conductive film 1120 can be made to be ina conductive state so that the conductive film 1120 can function as oneelectrode of the capacitor by controlling a potential to be supplied tothe capacitor line 1115. In this case, the potential to be supplied tothe capacitor line 1115 is set as follows. The potential of the pixelelectrode 1121 b is changed in the positive direction and the negativedirection relative to the center potential of a video signal in order tooperate the liquid crystal element 1108 (see FIG. 26C). The potential ofthe capacitor line 1115 needs to be constantly lower than the potentialto be supplied to the pixel electrode 1121 b by the threshold voltage(Vth) of the capacitor 1105 (MOS capacitor) or more in order that thecapacitor 1105 (MOS capacitor) be constantly in a conductive state.However, in the capacitor 1105, the conductive film 1120 serving as oneelectrode is n-type and has high conductivity, so that the thresholdvoltage is shifted in the negative direction. The potential of theconductive film 1120 (in other words, the potential of the capacitorline 1115) can be raised in accordance with the shift amount of thethreshold voltage of the capacitor 1105 in the negative direction, fromthe lowest potential of the pixel electrode 1121 b. Therefore, in thecase where the threshold voltage of the capacitor 1105 is a largernegative value, the potential of the capacitor line 1115 can be higherthan the potential of the pixel electrode 1121 b. In such a manner, theconductive film 1120 can be made to be constantly in a conductive state;thus, the capacitor 1105 (MOS capacitor) can be made to be in aconductive state.

When an oxide insulating film that oxygen permeates and which has a lowinterface state density at the interfaces with the semiconductor films1111 and 1628 is used as the insulating film 1129 over the semiconductorfilms 1111 and 1628 and an oxide insulating film which includes anoxygen excess region or an oxide insulating film in which the oxygencontent is higher than that in the stoichiometric composition is used asthe insulating film 1131, oxygen can be easily supplied to the oxidesemiconductor films that are the semiconductor films 1111 and 1628, therelease of oxygen from the semiconductor films can be prevented, and theoxygen contained in the insulating film 1131 can be transferred to theoxide semiconductor films to fill oxygen vacancies in the oxidesemiconductor films. Thus, the transistor 1103 can be prevented frombeing normally on and a potential to be supplied to the capacitor line1115 can be controlled so that the capacitor 1105 (MOS capacitor) can beconstantly in a conductive state; thus, the semiconductor device canhave favorable electrical characteristics and high reliability.

The use of a nitride insulating film as the insulating film 1133 overthe insulating film 1131 can prevent entry of impurities such ashydrogen and water into the semiconductor film 1111 and the conductivefilm 1120 from the outside. Moreover, the use of a nitride insulatingfilm with a low hydrogen content as the insulating film 1133 canminimize variations in electrical characteristics of the transistor andthe capacitor 1105 (MOS capacitor).

Further, the capacitor 1105 can be formed large (in a large area) in thepixel 1101. For this reason, the semiconductor device can have chargecapacity increased while improving the aperture ratio. Accordingly, thesemiconductor device can have excellent display quality.

This embodiment can be combined as appropriate with any of the otherembodiments in this specification.

Embodiment 11

In this embodiment, examples of an electronic appliances which can useany of the transistors described in the above embodiments are described.

The transistors described in the above embodiments can be applied to avariety of electronic appliances (including game machines) and electricappliances. Examples of the electronic appliances and electricappliances include display devices of televisions, monitors, and thelike, lighting devices, desktop personal computers and laptop personalcomputers, word processors, image reproduction devices which reproducestill images or moving images stored in recording media such as digitalversatile discs (DVDs), portable compact disc (CD) players, radioreceivers, tape recorders, headphone stereos, stereos, cordless phonehandsets, transceivers, mobile phones, car phones, portable gamemachines, calculators, portable information terminals, electronicnotebooks, e-book readers, electronic dictionary, electronictranslators, audio input devices, still cameras, video cameras, electricshavers, IC chips, high-frequency heating appliances such as microwaveovens, electric rice cookers, electric washing machines, electric vacuumcleaners, air-conditioning systems such as air conditioners,dishwashers, dish dryers, clothes dryers, futon dryers, electricrefrigerators, electric freezers, electric refrigerator-freezers,freezers for preserving DNA, radiation counters, and medical equipmentsuch as dialyzers. In addition, the examples include alarm devices suchas smoke detectors, gas alarm devices, and security alarm devices.Further, the examples also include industrial equipment such as guidelights, traffic lights, belt conveyors, elevators, escalators,industrial robots, and power storage systems. In addition, movingobjects and the like driven by oil engines and electric motors usingpower from non-aqueous secondary batteries, for example, electricvehicles (EV), hybrid electric vehicles (HEV) which include both aninternal-combustion engine and a motor, plug-in hybrid electric vehicles(PHEV), tracked vehicles in which caterpillar tracks are substituted forwheels of these vehicles, motorized bicycles including motor-assistedbicycles, motorcycles, electric wheelchairs, golf carts, boats or ships,submarines, helicopters, aircrafts, rockets, artificial satellites,space probes, planetary probes, spacecrafts, and the like can be given.Specific examples of these electronic appliances are illustrated in FIG.22 , FIG. 23 , FIGS. 24A to 24C, and FIGS. 25A to 25C.

First, as an example of the alarm device, a structure of a fire alarm isdescribed. A fire alarm in this specification refers to any device whichraises an alarm over fire occurrence instantly, and for example, aresidential fire alarm, an automatic fire alarm system, and a firedetector used for the automatic fire alarm system are included in itscategory.

An alarm device illustrated in FIG. 22 includes at least a microcomputer700. Here, the microcomputer 700 is provided in the alarm device. Themicrocomputer 700 includes a power gate controller 703 electricallyconnected to a high potential power supply line VDD, a power gate 704electrically connected to the high potential power supply line VDD andthe power gate controller 703, a CPU (central processing unit) 705electrically connected to the power gate 704, and a sensor portion 709electrically connected to the power gate 704 and the CPU 705. Further,the CPU 705 includes a volatile memory portion 706 and a nonvolatilememory portion 707.

The CPU 705 is electrically connected to a bus line 702 through aninterface 708. The interface 708 as well as the CPU 705 is electricallyconnected to the power gate 704. As a bus standard of the interface 708,an I²C bus can be used, for example. A light-emitting element 730electrically connected to the power gate 704 through the interface 708is provided in the alarm device described in this embodiment.

The light-emitting element 730 is preferably an element which emitslight with high directivity, and for example, an organic EL element, aninorganic EL element, or a light-emitting diode (LED) can be used.

The power gate controller 703 includes a timer and controls the powergate 704 with the use of the timer. The power gate 704 allows or stopssupply of power from the high potential power supply line VDD to the CPU705, the sensor portion 709, and the interface 708, in accordance withthe control by the power gate controller 703. Here, as an example of thepower gate 704, a switching element such as a transistor can be given.

With the use of the power gate controller 703 and the power gate 704,power is supplied to the sensor portion 709, the CPU 705, and theinterface 708 in a period during which the amount of light is measured,and supply of power to the sensor portion 709, the CPU 705, and theinterface 708 can be stopped during an interval between measurementperiods. The alarm device operates in such a manner, whereby a reductionin power consumption of the alarm device can be achieved compared withthat of the case where power is continuously supplied to the abovestructures.

In the case where a transistor is used as the power gate 704, it ispreferable to use a transistor which has an extremely low off-statecurrent and is used for the nonvolatile memory portion 707, for example,a transistor including an oxide semiconductor. With the use of such atransistor, a leakage current can be reduced when supply of power isstopped by the power gate 704, so that a reduction in power consumptionof the alarm device can be achieved.

A direct-current power source 701 may be provided in the alarm devicedescribed in this embodiment so that power is supplied from thedirect-current power source 701 to the high potential power supply lineVDD. An electrode of the direct-current power source 701 on a highpotential side is electrically connected to the high potential powersupply line VDD, and an electrode of the direct-current power source 701on a low potential side is electrically connected to a low potentialpower supply line VSS. The low potential power supply line VSS iselectrically connected to the microcomputer 700. Here, the highpotential power supply line VDD is supplied with a high potential H. Thelow potential power supply line VSS is supplied with a low potential L,for example, a ground potential (GND).

In the case where a battery is used as the direct-current power source701, for example, a battery case including an electrode electricallyconnected to the high potential power supply line VDD, an electrodeelectrically connected to the low potential power supply line VSS, and ahousing which can hold the battery is provided in a housing. Note thatthe alarm device described in this embodiment does not necessarilyinclude the direct-current power source 701 and may have, for example, astructure in which power is supplied from an alternate-current powersource provided outside the alarm device through a wiring.

As the above battery, a secondary battery such as a lithium ionsecondary battery (also called a lithium ion storage battery or alithium ion battery) can be used. Further, a solar battery is preferablyprovided so that the secondary battery can be charged.

The sensor portion 709 measures a physical quantity relating to anabnormal situation and transmits a measurement value to the CPU 705. Aphysical quantity relating to an abnormal situation depends on the usageof the alarm device, and in an alarm device functioning as a fire alarm,a physical quantity relating to a fire is measured. Accordingly, thesensor portion 709 measures the amount of light as a physical quantityrelating to a fire and senses smoke.

The sensor portion 709 includes an optical sensor 711 electricallyconnected to the power gate 704, an amplifier 712 electrically connectedto the power gate 704, and an AD converter 713 electrically connected tothe power gate 704 and the CPU 705. The optical sensor 711, theamplifier 712, and the AD converter 713 which are provided in the sensorportion 709, and the light-emitting element 730 operate when the powergate 704 allows supply of power to the sensor portion 709.

FIG. 23 illustrates part of the cross section of the alarm device. Inthe alarm device, element isolation regions 803 are formed in a p-typesemiconductor substrate 801, and an re-channel transistor 870 includinga gate insulating film 807, a gate electrode 809, n-type impurityregions 811 a and 811 b, an insulating film 815, and an insulating film817 is formed. Here, the n-channel transistor 870 is formed using asemiconductor other than an oxide semiconductor, such as single crystalsilicon, so that the n-channel transistor 870 can operate atsufficiently high speed. Accordingly, a volatile memory portion of a CPUthat can achieve high-speed access can be formed.

In addition, contact plugs 819 a and 819 b are formed in openings whichare formed by partly etching the insulating films 815 and 817, and aninsulating film 821 having groove portions is formed over the insulatingfilm 817 and the contact plugs 819 a and 819 b.

Wirings 823 a and 823 b are formed in the groove portions of theinsulating film 821, and an insulating film 820 formed by a sputteringmethod, a CVD method, or the like is provided over the insulating film821 and the wirings 823 a and 823 b. An insulating film 822 is formedover the insulating film.

An insulating film 825 formed by a sputtering method, a CVD method, orthe like is provided over the insulating film 822, and a secondtransistor 880 and a photoelectric conversion element 890 are providedover the insulating film 825.

The second transistor 880 includes an oxide film 806 a; an oxidesemiconductor film 806 b; an oxide film 806 c; a low-resistance region805 a and a low-resistance region 805 b which are in contact with theoxide film 806 a, the oxide semiconductor film 806 b, and the oxide film806 c; a source electrode 816 a and a drain electrode 816 b which are incontact with the low-resistance region 805 a and the low-resistanceregion 805 b; a gate insulating film 812; a gate electrode 804; and anoxide insulating film 818. Moreover, an insulating film 845 covering thephotoelectric conversion element 890 and the second transistor 880 isprovided, and a wiring 849 in contact with the drain electrode 816 b isformed over the insulating film 845. The wiring 849 functions as a nodewhich electrically connects the drain electrode of the second transistor880 to the gate electrode 809 of the n-channel transistor 870. Note thata cross section C-D in the drawing shows a cross section in the depthdirection of the transistor 870 in the cross section A-B.

Here, any of the transistors described in the above embodiments can beused as the second transistor 880, and the oxide film 806 a, the oxidesemiconductor film 806 b, and the oxide film 806 c correspond to theoxide film 104 a, the oxide semiconductor film 104 b, and the oxide film104 c described in Embodiment 1, respectively. Moreover, the sourceelectrode 816 a and the drain electrode 816 b correspond to the sourceelectrode 106 a and the drain electrode 106 b described in Embodiment 1,respectively.

In the transistor 880, low-resistance regions are formed in regions inthe vicinity of the interfaces of the multilayer film in contact withthe source electrode and the drain electrode in a self-aligned manner,and the channel formation region can be a highly purified intrinsicregion by adding oxygen to the multilayer film using the sourceelectrode and the drain electrode as masks. By the addition of oxygen,the highly purified intrinsic region and the low-resistance regions canbe formed in a self-aligned manner. The amount of oxygen vacancy in thechannel formation region in the multilayer film in the transistor can bereduced and the electrical characteristics of the transistor arefavorable; therefore, it is possible to provide a highly reliablesemiconductor device.

The optical sensor 711 includes the photoelectric conversion element890, a capacitor, a first transistor, the second transistor 880, a thirdtransistor, and the n-channel transistor 870. As the photoelectricconversion element 890, a photodiode can be used here, for example.

One of terminals of the photoelectric conversion element 890 iselectrically connected to the low potential power supply line VSS, andthe other of the terminals thereof is electrically connected to one ofthe source electrode 816 a and the drain electrode 816 b of the secondtransistor 880.

The gate electrode 804 of the second transistor 880 is supplied with anelectric charge accumulation control signal Tx, and the other of thesource electrode 816 a and the drain electrode 816 b of the secondtransistor 880 is electrically connected to one of a pair of electrodesof the capacitor, one of a source electrode and a drain electrode of thefirst transistor, and the gate electrode of the n-channel transistor 870(hereinafter the node is referred to as a node FD in some cases).

The other of the pair of electrodes of the capacitor is electricallyconnected to the low potential power supply line VSS. A gate electrodeof the first transistor is supplied with a reset signal Res, and theother of the source electrode and the drain electrode thereof iselectrically connected to the high potential power supply line VDD.

One of a source electrode and a drain electrode of the n-channeltransistor 870 is electrically connected to one of a source electrodeand a drain electrode of the third transistor and the amplifier 712. Theother of the source electrode and the drain electrode of the n-channeltransistor 870 is electrically connected to the high potential powersupply line VDD. A gate electrode of the third transistor is suppliedwith a bias signal Bias, and the other of the source electrode and thedrain electrode thereof is electrically connected to the low potentialpower supply line VSS.

Note that the capacitor is not necessarily provided. For example, in thecase where parasitic capacitance of the n-channel transistor 870 or thelike is sufficiently large, a structure without the capacitor may beemployed.

Further, as each of the first transistor and the second transistor 880,a transistor having an extremely low off-state current is preferablyused. As the transistor having an extremely low off-state current, atransistor including an oxide semiconductor is preferably used. Withsuch a structure, the potential of the node FD can be held for a longtime.

In the structure in FIG. 23 , the photoelectric conversion element 890is electrically connected to the second transistor 880 and is providedover the insulating film 825.

The photoelectric conversion element 890 includes a semiconductor film860 provided over the insulating film 825, and the source electrode 816a and an electrode 816 c which are in contact with a top surface of thesemiconductor film 860. The source electrode 816 a is an electrodefunctioning as the source electrode or the drain electrode of the secondtransistor 880 and electrically connects the photoelectric conversionelement 890 to the second transistor 880.

Over the semiconductor film 860, the source electrode 816 a, and theelectrode 816 c, the gate insulating film 812, the oxide insulating film818, and the insulating film 845 are provided. Further, a wiring 856 isformed over the insulating film 845 and is in contact with the electrode816 c through an opening provided in the gate insulating film 812, theoxide insulating film 818, and the insulating film 845.

The electrode 816 c can be formed in steps similar to those of thesource electrode 816 a and the drain electrode 816 b, and the wiring 856can be formed in steps similar to those of the wiring 849.

As the semiconductor film 860, a semiconductor film which can performphotoelectric conversion is provided, and for example, silicon orgermanium can be used. In the case of using silicon, the semiconductorfilm 860 functions as an optical sensor which senses visible light.Further, there is a difference, between silicon and germanium, inwavelengths of electromagnetic waves that can be absorbed. When thesemiconductor film 860 includes germanium, a sensor which mainly sensesan infrared ray can be obtained.

In the above manner, the sensor portion 709 including the optical sensor711 can be incorporated into the microcomputer 700, so that the numberof components can be reduced and the size of the housing of the alarmdevice can be reduced. Note that in the case where the place of theoptical sensor or the photoelectric conversion element needs a highdegree of freedom, the optical sensor or the photoelectric conversionelement may be externally provided so as to be electrically connected tothe microcomputer 700.

In the alarm device including the above-described IC chip, the CPU 705in which a plurality of circuits including any of the transistorsdescribed in the above embodiments are combined and mounted on one ICchip is used.

FIGS. 24A to 24C are block diagrams illustrating a specificconfiguration of a CPU at least partly including any of the transistorsdescribed in the above embodiments.

The CPU illustrated in FIG. 24A includes an arithmetic logic unit (ALU)921, an ALU controller 922, an instruction decoder 923, an interruptcontroller 924, a timing controller 925, a register 926, a registercontroller 927, a bus interface (Bus I/F) 928, a rewritable ROM 929, andan ROM interface (ROM I/F) 919 over a substrate 920. A semiconductorsubstrate, an SOI substrate, a glass substrate, or the like is used asthe substrate 920. The ROM 929 and the ROM interface 919 may be providedover a separate chip. Needless to say, the CPU in FIG. 24A is just anexample in which the configuration has been simplified, and an actualCPU may have various configurations depending on the application.

An instruction that is input to the CPU through the bus interface 928 isinput to the instruction decoder 923 and decoded therein, and then,input to the ALU controller 922, the interrupt controller 924, theregister controller 927, and the timing controller 925.

The ALU controller 922, the interrupt controller 924, the registercontroller 927, and the timing controller 925 conduct various controlsin accordance with the decoded instruction. Specifically, the ALUcontroller 922 generates signals for controlling the operation of theALU 921. While the CPU is executing a program, the interrupt controller924 determines an interrupt request from an external input/output deviceor a peripheral circuit on the basis of its priority or a mask state,and processes the request. The register controller 927 generates anaddress of the register 926, and reads/writes data from/to the register926 in accordance with the state of the CPU.

The timing controller 925 generates signals for controlling operationtimings of the ALU 921, the ALU controller 922, the instruction decoder923, the interrupt controller 924, and the register controller 927. Forexample, the timing controller 925 includes an internal clock generatorfor generating an internal clock signal CLK2 based on a reference clocksignal CLK1, and supplies the internal clock signal CLK2 to the abovecircuits.

In the CPU illustrated in FIG. 24A, a memory cell is provided in theregister 926. As the memory cell of the register 926, any of thetransistors described in the above embodiments can be used.

In the CPU illustrated in FIG. 24A, the register controller 927 selectsoperation of storing data in the register 926 in accordance with aninstruction from the ALU 921. That is, the register controller 927selects whether data is stored by a flip-flop or by a capacitor in thememory cell included in the register 926. When data storing by theflip-flop is selected, a power supply voltage is supplied to the memorycell in the register 926. When data storing by the capacitor isselected, the data is rewritten in the capacitor, and supply of powersupply voltage to the memory cell in the register 926 can be stopped.

The power supply can be stopped by a switching element provided betweena memory cell group and a node to which a power supply potential VDD ora power supply potential VSS is supplied, as illustrated in FIG. 24B orFIG. 24C. Circuits illustrated in FIGS. 24B and 24C are described below.

FIGS. 24B and 24C each illustrate an example of the configuration of amemory circuit in which any of the transistors described in the aboveembodiments is used as a switching element which controls supply of apower supply potential to a memory cell.

The memory device illustrated in FIG. 24B includes a switching element901 and a memory cell group 903 including a plurality of memory cells902. Specifically, as each of the memory cells 902, any of thetransistors described in the above embodiments can be used. Each of thememory cells 902 included in the memory cell group 903 is supplied withthe high-level power supply potential VDD via the switching element 901.Further, each of the memory cells 902 included in the memory cell group903 is supplied with a potential of a signal IN and the low-level powersupply potential VSS.

In FIG. 24B, any of the transistors described in the above embodimentsis used as the switching element 901, and the switching of thetransistor is controlled by a signal SigA supplied to a gate electrodethereof.

Note that FIG. 24B illustrates the configuration in which the switchingelement 901 includes only one transistor; however, without particularlimitation thereon, the switching element 901 may include a plurality oftransistors. In the case where the switching element 901 includes aplurality of transistors which function as switching elements, theplurality of transistors may be connected to each other in parallel, inseries, or in combination of parallel connection and series connection.

Although the switching element 901 controls the supply of the high-levelpower supply potential VDD to each of the memory cells 902 included inthe memory cell group 903 in FIG. 24B, the switching element 901 maycontrol the supply of the low-level power supply potential VSS.

In FIG. 24C, an example of a memory device in which each of the memorycells 902 included in the memory cell group 903 is supplied with thelow-level power supply potential VSS via the switching element 901 isillustrated. The supply of the low-level power supply potential VSS toeach of the memory cells 902 included in the memory cell group 903 canbe controlled by the switching element 901.

When a switching element is provided between a memory cell group and anode to which the power supply potential VDD or the power supplypotential VSS is supplied, data can be stored even in the case where anoperation of a CPU is temporarily stopped and the supply of the powersupply voltage is stopped; accordingly, power consumption can bereduced. Specifically, for example, while a user of a personal computerdoes not input data to an input device such as a keyboard, the operationof the CPU can be stopped, so that the power consumption can be reduced.

Although the CPU is given as an example here, the transistor can also beapplied to an LSI such as a digital signal processor (DSP), a customLSI, or a field programmable gate array (FPGA).

In FIG. 25A, a display device 1000 is an example of an electricappliance including the CPU in which any of the transistors described inthe above embodiments is used. Specifically, the display device 1000corresponds to a display device for TV broadcast reception and includesa housing 1001, a display portion 1002, speaker portions 1003, a CPU1004, and the like. The CPU 1004 is provided in the housing 1001. Thedisplay device 1000 can receive electric power from a commercial powersupply. Alternatively, the display device 1000 can use electric powerstored in a power storage device. When any of the transistors describedin the above embodiments is used as the CPU in the display device 1000,a reduction in power consumption of the display device 1000 can beachieved.

A semiconductor display device such as a liquid crystal display device,a light-emitting device in which a light-emitting element such as anorganic EL element is provided in each pixel, an electrophoresis displaydevice, a digital micromirror device (DMD), a plasma display panel(PDP), a field emission display (FED), and the like can be used for thedisplay portion 1002.

Note that the display device includes, in its category, all ofinformation display devices for personal computers, advertisementdisplays, and the like other than TV broadcast reception.

In FIG. 25A, an alarm device 1010 is a residential fire alarm, whichincludes a sensor portion and a microcomputer 1011. Note that themicrocomputer 1011 is an example of an electric appliance including theCPU in which any of the transistors described in the above embodimentsis used.

In FIG. 25A, an air conditioner which includes an indoor unit 1020 andan outdoor unit 1024 is an example of an electric appliance includingthe CPU in which any of the transistors described in the aboveembodiments is used. Specifically, the indoor unit 1020 includes ahousing 1021, an air outlet 1022, a CPU 1023, and the like. Although theCPU 1023 is provided in the indoor unit 1020 in FIG. 25A, the CPU 1023may be provided in the outdoor unit 1024. Alternatively, the CPU 1023may be provided in both the indoor unit 1020 and the outdoor unit 1024.By using any of the transistors described in the above embodiments forthe CPU in the air conditioner, a reduction in power consumption of theair conditioner can be achieved.

In FIG. 25A, an electric refrigerator-freezer 1030 is an example of anelectric appliance including the CPU in which any of the transistorsdescribed in the above embodiments is used. Specifically, the electricrefrigerator-freezer 1030 includes a housing 1031, a door for arefrigerator 1032, a door for a freezer 1033, a CPU 1034, and the like.In FIG. 25A, the CPU 1034 is provided in the housing 1031. When any ofthe transistors described in the above embodiments is used as the CPU1034 of the electric refrigerator-freezer 1030, a reduction in powerconsumption of the electric refrigerator-freezer 1030 can be achieved.

FIG. 25B illustrates an example of an electric vehicle which is anexample of an electric appliance. An electric vehicle 1040 is equippedwith a secondary battery 1041. The output of the electric power of thesecondary battery 1041 is adjusted by a control circuit 1042 and theelectric power is supplied to a driving device 1043. The control circuit1042 is controlled by a processing unit 1044 including a ROM, a RAM, aCPU, or the like which is not illustrated. When any of the transistorsdescribed in the above embodiments is used as the CPU in the electricvehicle 1040, a reduction in power consumption of the electric vehicle1040 can be achieved.

The driving device 1043 includes a DC motor or an AC motor either aloneor in combination with an internal-combustion engine. The processingunit 1044 outputs a control signal to the control circuit 1042 based oninput data such as data of operation (e.g., acceleration, deceleration,or stop) by a driver or data during driving (e.g., data on an upgrade ora downgrade, or data on a load on a driving wheel) of the electricvehicle 1040. The control circuit 1042 adjusts the electric energysupplied from the secondary battery 1041 in accordance with the controlsignal of the processing unit 1044 to control the output of the drivingdevice 1043. In the case where the AC motor is mounted, although notillustrated, an inverter which converts a direct current into analternate current is also incorporated.

This embodiment can be combined as appropriate with any of the otherembodiments in this specification.

Example 1

In this example, cross-sectional observation results and thermaldesorption spectroscopy (TDS) analysis results of a nitride insulatingfilm are described. First, a method for forming a sample used for thecross-sectional observation of the nitride insulating film is described.

A thermal oxidation film was deposited over a silicon wafer. The thermaloxidation film was formed to a thickness of 100 nm at 950° C. in anoxygen atmosphere containing HCl at 3%. Next, a 300-nm-thick siliconnitride film was deposited over the thermal oxidation film by asputtering method. The silicon nitride film was deposited under thefollowing conditions: silicon was used as a sputtering target, argon andnitrogen were supplied to a treatment chamber of a sputtering apparatusas a sputtering gas at flow rates of 5 sccm and 20 sccm, respectively,the pressure in the treatment chamber was controlled to 0.2 Pa, and anRF power of 3.0 kW was supplied. Note that the substrate temperature inthe deposition of the silicon nitride film was 350° C.

A cross section of the example sample was observed by scanningtransmission electron microscopy (STEM). FIG. 29 shows a STEM image ofthe example sample.

As shown in FIG. 29 , generation of a void portion was not observed inthe nitride insulating film.

Next, evaluation obtained by TDS analysis of the nitride insulating filmis described.

A example sample was formed as follows. A thermal oxidation film wasformed over a silicon wafer. The thermal oxidation film was formed to athickness of 100 nm at 950° C. in an oxygen atmosphere containing HCl at3%. Next, by a sputtering method, a 300-nm-thick first silicon nitridefilm was deposited over the thermal oxidation film and a 50-nm-thicksecond silicon nitride film was deposited over the first silicon nitridefilm. The first silicon nitride film was formed by a plasma CVD methodunder the following conditions: silane with a flow rate of 60 sccm,nitrogen with a flow rate of 1000 sccm, and ammonia with a flow rate of480 sccm were used as the source gas; the pressure in a reaction chamberwas 300 Pa; the substrate temperature was 350° C.; and a high-frequencypower of 350 W was supplied to parallel plate electrodes. The secondsilicon nitride film was formed under the following conditions: siliconwas used as a sputtering target, argon and nitrogen were supplied to atreatment chamber of a sputtering apparatus as a sputtering gas at flowrates of 5 sccm and 20 sccm, respectively, the pressure in the treatmentchamber was controlled to 0.2 Pa, and an RF power of 3.0 kW wassupplied. Note that the substrate temperature in the deposition of thesilicon nitride film was 350° C. For comparison, a comparative examplesample in which an thermal oxide film and the first silicon nitride filmwere formed over a silicon wafer was prepared.

Each sample was subjected to TDS analysis. FIG. 30 shows the TDS resultsof M/z=2 (H₂), M/z=18 (H₂O), M/z=28 (N₂), and M/z=32 (O₂) measured inthe comparative example sample. FIG. 31 shows the TDS results of M/z=2(H₂), M/z=18 (H₂O), M/z=28 (N₂), and M/z=32 (O₂) measured in the examplesample.

According to FIG. 30 and FIG. 31 , when the heating temperature is lowerthan or equal to 400° C., the intensity of hydrogen (H₂) is reducedowing to the second silicon nitride film.

This results show that the second silicon nitride film formed by asputtering method has a high barrier property against hydrogen.

Example 2

In this example, the crystal state of an oxide semiconductor film wasmeasured by X-ray diffraction (XRD). Methods for forming Samples 2A to2G used for the measurement are described.

First, a thermal oxidation film was formed over a silicon wafer. Thethermal oxidation film was formed to a thickness of 100 nm at 950° C. inan oxygen atmosphere containing HCl at 3%. Next, a 300-nm-thick siliconoxide film was deposited over the thermal oxidation film by a sputteringmethod. The silicon oxide film was formed in the following manner:silicon oxide was used as a sputtering target, oxygen was supplied to atreatment chamber of a sputtering apparatus as a sputtering gas at aflow rate of 50 sccm, the pressure in the treatment chamber wascontrolled to 0.4 Pa, and an RF power of 1.5 kW was supplied. Note thatthe substrate temperature in the deposition of the silicon oxide filmwas 100° C.

Next, a multilayer film was deposited over the silicon oxide film. Themultilayer film included three layers and was formed in the followingmanner. First, a 5-nm-thick In—Ga—Zn oxide film having an atomic ratioof In:Ga:Zn=1:3:2 was deposited as a first oxide film over a siliconoxide film. The In—Ga—Zn oxide film was formed under the followingconditions: a sputtering target having an atomic ratio of In:Ga:Zn=1:3:2was used; argon and oxygen were supplied to a treatment chamber of asputtering apparatus as a sputtering gas at flow rates of sccm and 30sccm, respectively; the pressure in the treatment chamber was controlledto 0.4 Pa; and a DC power of 0.5 kW was supplied. Note that thesubstrate temperature in the deposition of the In—Ga—Zn oxide film was200° C.

Next, a 15-nm-thick In—Ga—Zn oxide film having an atomic ratio ofIn:Ga:Zn=1:1:1 was deposited as an oxide semiconductor film over thefirst oxide film. The In—Ga—Zn oxide film was formed under the followingconditions: a sputtering target having an atomic ratio of In:Ga:Zn=1:1:1was used; argon and oxygen were supplied to a treatment chamber of asputtering apparatus as a sputtering gas at flow rates of 30 sccm and 15sccm, respectively; the pressure in the treatment chamber was controlledto 0.4 Pa; and a DC power of 0.5 kW was supplied. Note that thesubstrate temperature in the deposition of the In—Ga—Zn oxide film was400° C.

Next, an In—Ga—Zn oxide film having an atomic ratio of In:Ga:Zn=1:3:2was deposited as a second oxide film over the oxide semiconductor film.The In—Ga—Zn oxide film was formed under the following conditions: asputtering target having an atomic ratio of In:Ga:Zn=1:3:2 was used;argon and oxygen were supplied to a treatment chamber of a sputteringapparatus as a sputtering gas at flow rates of 30 sccm and 15 sccm,respectively; the pressure in the treatment chamber was controlled to0.4 Pa; and a DC power of 0.5 kW was supplied.

Note that the substrate temperature in the deposition of the In—Ga—Znoxide film was set at 200° C. Note that the thickness of the third oxidesemiconductor film was 5 nm, 10 nm, and 15 nm.

Next, oxygen (O₂ ⁺) was added to the IGZO film by an ion implantationmethod. Note that the conditions of the addition were as follows: anacceleration voltage of 5 kV and a dosage of 5.0×10¹⁵ ions/cm².

Through the above process, Sample 2A in which the thickness of thesecond oxide film was 5 nm, Sample 2B in which the thickness of thesecond oxide film was 10 nm, and Sample 2C in which the thickness of thesecond oxide film was 20 nm were formed.

Samples 2D to 2F are described. Just after the second oxide film wasformed, a 20-nm-thick silicon oxynitride film was formed over the secondoxide film. The silicon oxynitride film was formed under the followingconditions: silane and dinitrogen monoxide were supplied to a reactionchamber of a plasma CVD apparatus at flow rates of 1 sccm and 800 sccm,respectively, the pressure in the reaction chamber was controlled to 40Pa, and a power of 100 W was supplied with the use of a 27.12 MHzhigh-frequency power source. Note that the silicon oxynitride was formedat a substrate temperature of 350° C.

Next, oxygen (¹⁶O₂ ⁺) was added to the silicon oxynitride film by an ionimplantation method. Note that the conditions of the addition were asfollows: an acceleration voltage of 5 kV and a dosage of 5.0×10¹⁵ions/cm².

Through the above process, Sample 2D in which the thickness of thesecond oxide film was 5 nm, Sample 2E in which the thickness of thesecond oxide film was 10 nm, and Sample 2F in which the thickness of thesecond oxide film was 20 nm were formed.

Sample 2G which is Sample 2A formed without addition of oxygen wasformed as a comparative example.

Then, FIGS. 32A to 32F and FIG. 33 show results of measurement of XRDspectra of Sample 2A to Sample 2G by an out-of-plane method. In FIGS.32A to 32F and FIG. 33 , the vertical axis represents the X-raydiffraction intensity (given unit) and the horizontal axis representsthe diffraction angle 2θ (deg.). Note that the XRD spectra were measuredwith the use of an X-ray diffractometer D8 ADVANCE manufactured byBruker AXS.

As shown in the XRD spectra in FIGS. 32A to 32C, in the case whereoxygen was directly added to the second oxide film, a peak around 2θ=31°which was derived from a crystal became small as the thickness of thesecond oxide film was reduced. Further, as shown in FIGS. 32D to 32F, inthe case where oxygen was added to the second oxide film through thesilicon oxynitride film, a peak derived from a crystal was observedaround 2θ=31° regardless of the thickness of the second oxide film,which showed that a crystalline oxide semiconductor film was formed.Further, there was no difference in peak around 2θ=31° derived from acrystal between the XRD spectra of FIGS. 32D to 32F and the XRD spectraof FIG. 33 , which showed that the crystalline oxide semiconductor filmwas protected by the silicon oxynitride film.

Example 3

In this example, a conductive film was formed over an oxide film whichis formed over an oxide semiconductor film and then the conductive filmwas removed. After that, the sheet resistance of the oxide film wasmeasured. Methods for forming Samples 3A to 3H which were used for themeasurement are described.

First, a thermal oxidation film was formed over a silicon wafer. Thethermal oxidation film was deposited to a thickness of 100 nm at 950° C.in an oxygen atmosphere containing HCl at 3%. Next, a 300-nm-thicksilicon oxide film was deposited over the thermal oxidation film by asputtering method. The silicon oxide film was formed in the followingmanner: silicon oxide was used as a sputtering target, oxygen wassupplied to a treatment chamber of a sputtering apparatus as asputtering gas at a flow rate of 50 sccm, the pressure in the treatmentchamber was controlled to 0.4 Pa, and an RF power of 1.5 kW wassupplied. Note that the substrate temperature in the deposition of thesilicon oxide film was 100° C.

Next, a multilayer film was deposited over the silicon oxide film. Themultilayer film included three layers and was formed in the followingmanner. First, a 20-nm-thick In—Ga—Zn oxide film having an atomic ratioof In:Ga:Zn=1:3:2 was deposited as a first oxide film over a siliconoxide film. The In—Ga—Zn oxide film was formed under the followingconditions: a sputtering target having an atomic ratio of In:Ga:Zn=1:3:2was used; argon and oxygen were supplied to a treatment chamber of asputtering apparatus as a sputtering gas at flow rates of sccm and 30sccm, respectively; the pressure in the treatment chamber was controlledto 0.4 Pa; and a DC power of 0.5 kW was supplied. Note that thesubstrate temperature in the deposition of the In—Ga—Zn oxide film was200° C.

Next, a 15-nm-thick In—Ga—Zn oxide film having an atomic ratio ofIn:Ga:Zn=1:1:1 was deposited as an oxide semiconductor film over thefirst oxide film. The In—Ga—Zn oxide film was formed under the followingconditions: a sputtering target having an atomic ratio of In:Ga:Zn=1:1:1was used; argon and oxygen were supplied to a treatment chamber of asputtering apparatus as a sputtering gas at flow rates of 30 sccm and 15sccm, respectively; the pressure in the treatment chamber was controlledto 0.4 Pa; and a DC power of 0.5 kW was supplied. Note that thesubstrate temperature in the deposition of the In—Ga—Zn oxide film was300° C.

Next, an In—Ga—Zn oxide film having an atomic ratio of In:Ga:Zn=1:3:2was deposited as a second oxide film over the oxide semiconductor film.The In—Ga—Zn oxide film was formed under the following conditions: asputtering target having an atomic ratio of In:Ga:Zn=1:3:2 was used;argon and oxygen were supplied to a treatment chamber of a sputteringapparatus as a sputtering gas at flow rates of 30 sccm and 15 sccm,respectively; the pressure in the treatment chamber was controlled to0.4 Pa; and a DC power of 0.5 kW was supplied. Note that the substratetemperature in the deposition of the In—Ga—Zn oxide film was set at 200°C. Note that the thickness of the third oxide semiconductor film was 0nm, 5 nm, 10 nm, and nm.

Next, first heat treatment was performed. The first heat treatment wasperformed at 450° C. in a nitrogen atmosphere for one hour, and thenperformed at 450° C. in an oxygen atmosphere for one hour.

Next, a 100-nm-thick tungsten film was deposited as a conductive filmover the second oxide film. The tungsten film was formed under thefollowing conditions: a sputtering target of tungsten was used; argonand heated argon were supplied to a treatment chamber of a sputteringapparatus as a sputtering gas at flow rates of 80 sccm and 10 sccm,respectively; the pressure in the treatment chamber was controlled to0.8 Pa; and a DC power of 1.0 kW was supplied.

Next, second heat treatment was performed. The second treatment wasperformed at 400° C. in an oxygen atmosphere for one hour.

Through the above process, Sample 3A in which the thickness of thesecond oxide film was 0 nm, Sample 3B in which the thickness of thesecond oxide film was 5 nm, Sample 3C in which the thickness of thesecond oxide film was 10 nm, and Sample 3D in which the thickness of thesecond oxide film was 20 nm were formed.

For comparison, samples which was not subjected to the second heattreatment was formed. Sample 3E in which the thickness of the secondoxide film was 0 nm, Sample 3F in which the thickness of the secondoxide film was 5 nm, Sample 3G in which the thickness of the secondoxide film was 10 nm, and Sample 3H in which the thickness of the secondoxide film was 20 nm were formed.

Next, the tungsten film was dry-etched. The etching was performed underthe following conditions: Cl₂ with a flow rate of 45 sccm, CH₄ with aflow rate of 55 sccm, and O₂ with a flow rate of 55 sccm were used as anetching gas, the bias power was 110 W, the power of the ICP power sourcewas 3000 W, and the pressure was 0.67 Pa. Note that the substratetemperature at the time of the dry etching of the tungsten film was 40°C.

Next, oxygen (¹⁸O₂) was added to the second oxide film by an ionimplantation method. Note that the conditions of the addition were asfollows: an acceleration voltage of 5 kV and a dosage of 5.0×10¹⁵ions/cm².

Further, for comparison, samples to which an oxygen ion was not addedwere also formed.

Next, the second oxide film was etched and a sheet resistance value withrespect to the etching depth was measured. A mixed solution of hydrogenperoxide water and ammonia (hydrogen peroxide water:ammoniawater:water=5:2:5) was used for the etching. The remaining thickness ofthe second oxide film after the etching was measured using spectroscopicellipsometry before and after the etching in order to obtain the depthto which the second oxide film was etched.

FIG. 34 shows the sheet resistances of Sample 3A to 3D, which weresubjected to the heat treatment, and FIG. 35 shows the sheet resistancesof Samples 3E to 3H, which were not subjected to the heat treatment.Note that dotted lines in the drawings each denote the measurement limitvalue (6M Ω/square).

FIG. 34 and FIG. 35 show that the sheet resistance value is increased byaddition of oxygen and the sheet resistance value is reduced by heattreatment. Further, FIG. 34 and FIG. 35 show that when oxygen is addedin the case where the second oxide film has a large thickness, theresistance around the surface is increased but a low-resistance regionexists in the second oxide film.

It was found that in the samples in which the tungsten film was formedover the IGZO film (the second oxide film), the resistance of a regionof the IGZO film, which was formed to a depth of about 15 nm from thesurface of the IGZO film, was reduced. This suggests that alow-resistant mixed layer of IGZO and tungsten is formed in the vicinityof the surface of the second oxide film, and that an n-type region isformed owing to oxygen vacancies which exist in the vicinity of thesurface of the IGZO film by transfer of oxygen of the IGZO film to thetungsten film, for example.

Example 4

In this example, evaluation results of a multilayer film obtained bysecondary ion mass spectrometry (SIMS) are described.

The following samples were analyzed: Sample 3E, Sample 3F, and Sample 3Gwhich were used in Example 3, and Sample 4A which was Sample 3F in whichthe thickness of the second oxide film was 15 nm. Oxygen was added toeach sample by an ion implantation method.

FIG. 36 shows ¹⁸O concentration profiles of Samples 3E to 3G and Sample4A.

In each sample, a peak of the ¹⁸O concentration was observed at a depthof approximately 5 nm from a surface of the multilayer film to whichoxygen was added. Further, it was found that ¹⁸O was diffused to aregion at a depth of approximately 20 nm from the surface of themultilayer film.

Example 5

In this example, a transistor was formed and electrical characteristicsthereof were evaluated. A method for forming a sample used for theevaluation is described.

First, a thermal oxidation film was formed over a silicon wafer. Thethermal oxidation film was formed to a thickness of 100 nm at 950° C. inan oxygen atmosphere containing HCl at 3%. Next, a 300-nm-thick siliconoxide film was deposited over the thermal oxidation film by a sputteringmethod. The silicon oxide film was formed in the following manner:silicon oxide was used as a sputtering target, oxygen was supplied to atreatment chamber of a sputtering apparatus as a sputtering gas at aflow rate of 50 sccm, the pressure in the treatment chamber wascontrolled to 0.4 Pa, and an RF power of 1.5 kW was supplied. Note thatthe substrate temperature in the deposition of the silicon oxide filmwas 100° C.

Next, heat treatment was performed. The heat treatment was performed ina vacuum (reduced pressure) atmosphere at 450° C. for one hour. Afterthat, oxygen (¹⁶O) was added to the silicon oxide film by an ionimplantation method. Note that the conditions of the addition were asfollows: an acceleration voltage of 60 kV and a dosage of 2.0×10¹⁶ions/cm².

Next, a multilayer film was deposited over the silicon oxide film. Themultilayer film included three layers and was formed in the followingmanner. First, a 20-nm-thick In—Ga—Zn oxide film having an atomic ratioof In:Ga:Zn=1:3:2 was deposited as a first oxide film over a siliconoxide film. The In—Ga—Zn oxide film was formed under the followingconditions: a sputtering target having an atomic ratio of In:Ga:Zn=1:3:2was used; argon and oxygen were supplied to a treatment chamber of asputtering apparatus as a sputtering gas at flow rates of sccm and 30sccm, respectively; the pressure in the treatment chamber was controlledto 0.4 Pa; and a DC power of 0.5 kW was supplied. Note that thesubstrate temperature in the deposition of the In—Ga—Zn oxide film was200° C.

Next, a 15-nm-thick In—Ga—Zn oxide film having an atomic ratio ofIn:Ga:Zn=1:1:1 was deposited as an oxide semiconductor film over thefirst oxide film. The In—Ga—Zn oxide film was formed under the followingconditions: a sputtering target having an atomic ratio of In:Ga:Zn=1:1:1was used; argon and oxygen were supplied to a treatment chamber of asputtering apparatus as a sputtering gas at flow rates of 30 sccm and 15sccm, respectively; the pressure in the treatment chamber was controlledto 0.4 Pa; and a DC power of 0.5 kW was supplied. Note that thesubstrate temperature in the deposition of the In—Ga—Zn oxide film was300° C.

Next, a 10-nm-thick In—Ga—Zn oxide film having an atomic ratio ofIn:Ga:Zn=1:3:2 was deposited as a second oxide film over the oxidesemiconductor film. The In—Ga—Zn oxide film was formed under thefollowing conditions: a sputtering target having an atomic ratio ofIn:Ga:Zn=1:3:2 was used; argon and oxygen were supplied to a treatmentchamber of a sputtering apparatus as a sputtering gas at flow rates of30 sccm and 15 sccm, respectively; the pressure in the treatment chamberwas controlled to 0.4 Pa; and a DC power of 0.5 kW was supplied. Notethat the substrate temperature in the deposition of the In—Ga—Zn oxidefilm was set at 200° C.

Next, first heat treatment was performed. The first heat treatment wasperformed under a nitrogen atmosphere at 450° C. for one hour, and thenperformed under an oxygen atmosphere at 450° C. for one hour.

Next, a 100-nm-thick tungsten film was deposited as a conductive filmover the second oxide film. The tungsten film was formed under thefollowing conditions: a sputtering target of tungsten was used; argonand heated argon were supplied to a treatment chamber of a sputteringapparatus as a sputtering gas at flow rates of 80 sccm and 10 sccm,respectively; the pressure in the treatment chamber was controlled to0.8 Pa; and a DC power of 1.0 kW was supplied. After the formation ofthe tungsten film, the tungsten film was partly etched (etchingconditions: an etching gas (CF₄=55 sccm, Cl₂=45 sccm, O₂=55 sccm), apower of an ICP power supply of 3000 W, a bias power of 110 W, apressure of 0.67 Pa, and a substrate temperature of 40° C.), whereby asource electrode and a drain electrode were formed.

Then, oxygen (¹⁶O₂ ⁺) was added to the multilayer film by an ionimplantation method. Note that the conditions of the addition were asfollows: an acceleration voltage of 5 kV and a dosage of 5.0×10¹⁵ions/cm².

Next, a gate insulating film was formed. A 20-nm-thick silicon oxidefilm was formed as the gate insulating film. The silicon oxide film wasformed by a CVD method in which the pressure in a reaction chamber wascontrolled to 200 Pa.

Next, a gate electrode was formed. A 30-nm-thick tantalum nitride filmwas formed by a sputtering method and a 135-nm-thick tungsten film wasformed over the tantalum nitride film by a sputtering method. Thetantalum nitride film was formed under the following conditions:tantalum nitride was used as a sputtering target; argon and nitrogenwere supplied to a treatment chamber of a sputtering apparatus as asputtering gas at flow rates of 50 sccm and 10 sccm, respectively; thepressure in the treatment chamber was controlled to be 0.6 Pa; and a DCpower of 1.0 kW was supplied. The tungsten film was formed under thefollowing conditions: tungsten was used as a sputtering target; argonand heated argon were supplied to a treatment chamber of a sputteringapparatus as a sputtering gas at flow rates of 100 sccm and sccm,respectively; the pressure in the treatment chamber was controlled to be2.0 Pa; and a DC power of 4.0 kW was supplied. After the deposition ofthe tungsten film, the tantalum nitride film and part of the tungstenfilm were etched (etching conditions of the tungsten film: an etchinggas (CF₄=55 sccm, Cl₂=45 sccm, O₂=55 sccm), a power of an ICP powersource of 3000 W, a bias power of 110 W, a pressure of 0.67 Pa, and asubstrate temperature of 40° C.; etching conditions of the tantalumnitride film: an etching gas (Cl₂=100 sccm), a power of an ICP powersupply of 2000 W, a bias power of 50 W, a pressure of 0.67 Pa, and asubstrate temperature of 40° C.), so that the gate electrode was formed.

Then, an oxide insulating film was formed. A 70-nm-thick aluminum oxidefilm was formed by sputtering and then a 135-nm-thick silicon oxynitridefilm was formed over the aluminum oxide film by a CVD method.

Then, openings reaching the source electrode and the drain electrodewere formed in the gate insulating film and the oxide insulating film.

A wiring layer (a 200-nm-thick aluminum film was formed over a50-nm-thick titanium film and a 50-nm-thick titanium film was formedover the 200-nm-thick aluminum film) was formed in the openings.

A 1.5-μm-polyimide film was formed over the wiring layers and wassubjected to heat treatment at 300° C. in the air for one hour.

Through the above process, an example transistor with a channel lengthof 0.44 μm and a channel width of 1 μm was formed. Further, acomparative example transistor to which oxygen was not added was formedfor comparison.

Next, in the formed transistors, a drain current (I_(d): [A]) wasmeasured under the conditions where a drain voltage (V_(d): [V]) was setto 3 V or 0.1 V and a gate voltage (V_(g): [V]) was swept from −3 V to 3V. FIG. 37A shows measurement results of the example transistor and FIG.37B shows measurement results of the comparative example transistor.FIGS. 37A and 37B show measurement results in the cases of drainvoltages (V_(d): [V]) of 3 V and 0.1 V, where the horizontal axisrepresents the gate voltage (V_(g): [V]) and the vertical axisrepresents the drain current (I_(d): [A]). Note that “drain voltage(V_(d): [V])” refers to a potential difference between a drain and thesource when the potential of the source is used as a referencepotential, and “gate voltage (V_(g): [V])” refers to a potentialdifference between a gate and a source when the potential of the sourceis used as a reference potential.

It was found that electrical characteristic variation of the transistorformed in this example shown in FIG. 37A was smaller than that of thecomparative example transistor shown in FIG. 37B.

The above results suggested that the transistor in this example hadextremely high electric characteristics.

Reference Example 1

Measurement of Vg-Id characteristics of a transistor shows that a gatevoltage (also referred to as a rising gate voltage) at which on-statecurrent due to a drain voltage Vd begins to flow varies as the channellength of the transistor is reduced. Thus, a relation between thechannel length and the rising gate voltage was examined by calculation.

FIG. 38 illustrates a structure of the transistor structure assumed inthe calculation. In FIG. 38 , “OS” denotes an oxide semiconductor film,“S” denotes a source electrode, “D” denotes a drain electrode, “GI”denotes a gate insulating film, and “GE” denotes a gate electrode. Notethat an n-layer (denoted by “n” in the drawings) having higher carrierdensity than the oxide semiconductor film is included between the oxidesemiconductor film and the source and drain electrodes. An oxidesemiconductor film (OS) is shown as an i-layer (denoted by “i”) to bedistinguished from the n-layer. Each length of regions in the channellength direction of the n-layer which do not overlap with the source anddrain electrodes is denoted by ΔL. At this time, when an effectivechannel length Leff is defined as Leff=L−2ΔL (ΔL≥0), Leff is shorterthan the channel length L.

The following calculation conditions were employed: L (channel length)was 2 μm; W (channel width) was 1 μm; the work function of the gateelectrode was 5 eV, the gate insulating film was a stack in which a400-nm-thick silicon nitride film (the dielectric constant ε=7.5) and a50-nm-thick silicon oxynitride film (the dielectric constant ε=4.1) werestacked sequentially from the gate electrode side; and the oxidesemiconductor film had a thickness of nm. An energy difference Egbetween the bottom of the conduction band and the top of the valenceband in the oxide semiconductor film was 3.2 eV. The electron affinity xof the oxide semiconductor film was 4.8 eV. The dielectric constant c ofthe oxide semiconductor film was 15. The electron mobility μn of theoxide semiconductor film was 10 cm²/Vs. The hole mobility μm of theoxide semiconductor film was 0.01 cm²/Vs. The effective density ofstates Nc in the conduction band was 5×10¹⁸ cm⁻³. The effective densityof states N_(V) in the valence band was 5×10¹⁸ cm⁻³. The donor densityNd was 6.6×10⁻⁹ cm⁻³. Further, the donor density of the n-layer was5×10¹⁸ cm⁻³. Note that four conditions of the length ΔL, i.e., 0 μm, 0.1μm, 0.3 μm, and 0.5 μm were used for the calculation.

The calculation results are shown in FIG. 39 . As shown in FIG. 39 , therising gate voltage at a drain voltage Vd of 1 V was the same as that ata drain voltage of 10 V in the following cases: when the length ΔL was 0μm (that is, the effective channel length was 2.0 μm), when the lengthΔL was 0.1 μm (that is, the effective channel length was 1.8 μm (10% ofthe channel length was the length ΔL)), and when the length ΔL was 0.3μm (that is, the effective channel length was 1.4 μm (30% of the channellength was ΔL)). On the other hand, when the length ΔL was 0.5 μm (thatis, the effective channel length was 1.0 μm), the rising gate voltage ata drain voltage V_(d) of 1 V was different from that at a drain voltageof 10 V, i.e., the rising positions, were split.

The above results show that the ring positions are split when theeffective channel length is short, and therefore, when the n-layer ismade an i-layer by addition of oxygen to the oxide semiconductor film,the effective channel length can be increased and the split of therising positions can be prevented.

The length ΔL is less than 30%, preferably less than 10%, furtherpreferably less than 3% of the channel length. The width of the split at1 pA/μm between two drain voltages which are different by one or moredigits is smaller than a larger one of the two drain voltages. The widthof the split is preferably less than ⅓ of the larger one of the twodrain voltages.

EXPLANATION OF REFERENCE

100: substrate, 102: base insulating film, 104: multilayer film, 104 a:oxide film, 104 b: oxide semiconductor film, 104 c: oxide film, 104 d:region, 104 e: oxide film, 105: low-resistance region, 105 a:low-resistance region, 105 b: low-resistance region, 105 c: region, 106:conductive film, 106 a: source electrode, 106 b: drain electrode, 107 a:conductive film, 107 b: conductive film, 108: gate insulating film, 110:gate electrode, 112: oxide insulating film, 114: nitride insulatingfilm, 120: oxygen, 150: transistor, 190: transistor, 195: transistor,200: transistor, 210: transistor, 220: transistor, 230: transistor, 240:transistor, 250: transistor, 290: transistor, 295: transistor, 300:transistor, 310: transistor, 320: transistor, 330: transistor, 340:transistor, 400: transistor, 402: transistor, 404: capacitor, 406:element isolation insulating layer, 410: substrate, 420: insulatingfilm, 550: memory cell, 551: memory cell array, 551 a: memory cellarray, 551 b: memory cell array, 553: peripheral circuit, 554:capacitor, 562: transistor, 600: sputtering target, 601: ion, 602:sputtered particle, 603: deposition surface, 700: microcomputer, 701:direct-current power source, 702: bus line, 703: power gate controller,704: power gate, 705: CPU, 706: volatile memory portion, 707:nonvolatile memory portion, 708: interface, 709: sensor portion, 711:optical sensor, 712: amplifier, 713: AD converter, 730: light-emittingelement, 801: semiconductor substrate, 803: element isolation region,804: gate electrode, 805 a: low-resistance region, 805 b: low-resistanceregion, 806 a: oxide film, 806 b: oxide semiconductor film, 806 c: oxidefilm, 807: gate insulating film, 809: gate electrode, 811 a: impurityregion, 811 b: impurity region, 812: gate insulating film, 815:insulating film, 816 a: source electrode, 816 b: drain electrode, 816 c:electrode, 817: insulating film, 818: oxide insulating film, 819 a:contact plug, 819 b: contact plug, 820: insulating film, 821: insulatingfilm, 822: insulating film, 823 a: wiring, 823 b: wiring, 825:insulating film, 845: insulating film, 849: wiring, 856: wiring, 860:semiconductor film, 870: transistor, 880: transistor, 890: photoelectricconversion element, 901: switching element, 902: memory cell, 903:memory cell group, 919: ROM interface, 920: substrate, 921: ALU, 922:ALU controller, 923: instruction decoder, 924: interrupt controller,925: timing controller, 926: register, 927: register controller, 928:bus interface, 929: ROM, 1000: display device, 1001: housing, 1002:display portion, 1003: speaker portion, 1004: CPU, 1010: alarm device,1011: microcomputer, 1020: indoor unit, 1021: housing, 1022: air outlet,1023: CPU, 1024: outdoor unit, 1030: electric refrigerator-freezer,1031: housing, 1032: door for a refrigerator, 1033: door for a freezer,1034: CPU, 1040: electric vehicle, 1041: secondary battery, 1042:control circuit, 1043: driving device, 1044: processing unit, 1100:pixel portion, 1101: pixel, 1102: substrate, 1103: transistor, 1104:scan line driver circuit, 1105: capacitor, 1106: signal line drivercircuit, 1107: scan line, 1108: liquid crystal element, 1109: signalline, 1111: semiconductor film, 1113: conductive film, 1115: capacitorline, 1117: opening, 1120: conductive film, 1121 a: electrode, 1121 b:pixel electrode, 1123 a: opening, 1123 b: opening, 1125: conductivefilm, 1127: gate insulating film, 1129: insulating film, 1131:insulating film, 1132: insulating film, 1133: insulating film, 1154:counter electrode, 1623: transistor, 1627: gate electrode, 1628:semiconductor film, 1629: source electrode, 1639: drain electrode, 1641:conductive film.

This application is based on Japanese Patent Application serial no.2012-281801 filed with Japan Patent Office on Dec. 25, 2012, the entirecontents of which are hereby incorporated by reference.

1. (canceled)
 2. A semiconductor device comprising: a first transistorincluding silicon in a channel formation region; a second transistorover the first transistor, the second transistor including an oxidesemiconductor film and a gate electrode over the oxide semiconductorfilm; an insulating film over the second transistor; and a first wiringover the insulating film, the first wiring being electrically connectedto a gate electrode of the first transistor and to the oxidesemiconductor film.
 3. A semiconductor device comprising: a firsttransistor including silicon in a channel formation region; a secondtransistor over the first transistor, the second transistor including anoxide semiconductor film and a gate electrode over the oxidesemiconductor film; an insulating film over the second transistor; and afirst wiring over the insulating film, the first wiring beingelectrically connected to a gate electrode of the first transistor andto the oxide semiconductor film, wherein the gate electrode of the firsttransistor and the oxide semiconductor film do not overlapped with eachother.
 4. A semiconductor device comprising: a first transistorincluding silicon in a channel formation region; a second transistorover the first transistor, the second transistor including an oxidesemiconductor film and a gate electrode over the oxide semiconductorfilm; an insulating film over the second transistor; a first wiring overthe insulating film, the first wiring being electrically connected to agate electrode of the first transistor and to the oxide semiconductorfilm; and a second wiring electrically connected to the silicon, whereinthe second wiring and the oxide semiconductor film overlap with eachother.
 5. The semiconductor device according to claim 4, wherein thesecond wiring is located between the first transistor and the secondtransistor.
 6. A semiconductor device comprising: a first transistorincluding silicon; a second transistor over the first transistor, thesecond transistor including an oxide semiconductor film and a gateelectrode over the oxide semiconductor film; an insulating film over thesecond transistor; a first wiring over the insulating film, the firstwiring being electrically connected to a gate electrode of the firsttransistor and to the oxide semiconductor film; and a second wiringelectrically connected to the silicon, wherein the gate electrode of thefirst transistor and the oxide semiconductor film do not overlapped witheach other, and wherein the second wiring and the oxide semiconductorfilm overlap with each other.
 7. The semiconductor device according toclaim 6, wherein the second wiring is located between the firsttransistor and the second transistor.